Microcircuit engineering ...:
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | Undetermined |
| Veröffentlicht: |
Amsterdam [u.a.]
Elsevier
|
| Schlagworte: |
Internformat
MARC
| LEADER | 00000nam a2200000zca4500 | ||
|---|---|---|---|
| 001 | BV021850262 | ||
| 003 | DE-604 | ||
| 005 | 20150807 | ||
| 007 | t | ||
| 008 | 901031nuuuuuuuu |||| 10||| und d | ||
| 035 | |a (OCoLC)633663478 | ||
| 035 | |a (DE-599)BVBBV021850262 | ||
| 040 | |a DE-604 |b ger | ||
| 041 | |a und | ||
| 245 | 1 | 0 | |a Microcircuit engineering ... |
| 264 | 1 | |a Amsterdam [u.a.] |b Elsevier | |
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 0 | 7 | |a Schaltung |0 (DE-588)4052056-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikroelektronik |0 (DE-588)4039207-7 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Mikroelektronik |0 (DE-588)4039207-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Schaltung |0 (DE-588)4052056-0 |D s |
| 689 | 1 | |5 DE-604 | |
| 700 | 1 | |a Ahmed, Haroon |e Sonstige |4 oth | |
| 711 | 2 | |a International Conference on Microlithography |j Sonstige |0 (DE-588)244903-1 |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-015066033 | ||
Datensatz im Suchindex
| _version_ | 1804135790818623488 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| building | Verbundindex |
| bvnumber | BV021850262 |
| ctrlnum | (OCoLC)633663478 (DE-599)BVBBV021850262 |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00996nam a2200313zca4500</leader><controlfield tag="001">BV021850262</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20150807 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">901031nuuuuuuuu |||| 10||| und d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)633663478</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV021850262</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">und</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Microcircuit engineering ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Amsterdam [u.a.]</subfield><subfield code="b">Elsevier</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Schaltung</subfield><subfield code="0">(DE-588)4052056-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikroelektronik</subfield><subfield code="0">(DE-588)4039207-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Mikroelektronik</subfield><subfield code="0">(DE-588)4039207-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Schaltung</subfield><subfield code="0">(DE-588)4052056-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Ahmed, Haroon</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="711" ind1="2" ind2=" "><subfield code="a">International Conference on Microlithography</subfield><subfield code="j">Sonstige</subfield><subfield code="0">(DE-588)244903-1</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-015066033</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV021850262 |
| illustrated | Not Illustrated |
| index_date | 2024-07-02T16:02:46Z |
| indexdate | 2024-07-09T20:46:06Z |
| institution | BVB |
| institution_GND | (DE-588)244903-1 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015066033 |
| oclc_num | 633663478 |
| open_access_boolean | |
| publishDateSort | 0000 |
| publisher | Elsevier |
| record_format | marc |
| spelling | Microcircuit engineering ... Amsterdam [u.a.] Elsevier txt rdacontent n rdamedia nc rdacarrier Schaltung (DE-588)4052056-0 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Mikroelektronik (DE-588)4039207-7 s DE-604 Schaltung (DE-588)4052056-0 s Ahmed, Haroon Sonstige oth International Conference on Microlithography Sonstige (DE-588)244903-1 oth |
| spellingShingle | Microcircuit engineering ... Schaltung (DE-588)4052056-0 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| subject_GND | (DE-588)4052056-0 (DE-588)4039207-7 (DE-588)1071861417 |
| title | Microcircuit engineering ... |
| title_auth | Microcircuit engineering ... |
| title_exact_search | Microcircuit engineering ... |
| title_exact_search_txtP | Microcircuit engineering ... |
| title_full | Microcircuit engineering ... |
| title_fullStr | Microcircuit engineering ... |
| title_full_unstemmed | Microcircuit engineering ... |
| title_short | Microcircuit engineering ... |
| title_sort | microcircuit engineering |
| topic | Schaltung (DE-588)4052056-0 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| topic_facet | Schaltung Mikroelektronik Konferenzschrift |
| work_keys_str_mv | AT ahmedharoon microcircuitengineering AT internationalconferenceonmicrolithography microcircuitengineering |