Micro electro mechanical systems: proceedings ; an investigation of micro structures, sensors, actuators, machines and robots
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
New York, NY
Inst. of Electrical and Electronics Engineers
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| Schlagworte: | |
| Beschreibung: | 9 (1996) und 10 (1997) mit dem Urheber: International Workshop on Micro Electro Mechanical Systems. -Teilw. u.d.T.: International Conference on Micro Electro Mechanical Systems: Technical digest. -Teilw. u.d.T.: International Conference on Micro Electro Mechanical Systems: Proceedings |
Internformat
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Datensatz im Suchindex
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| spelling | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots New York, NY Inst. of Electrical and Electronics Engineers txt rdacontent n rdamedia nc rdacarrier 9 (1996) und 10 (1997) mit dem Urheber: International Workshop on Micro Electro Mechanical Systems. -Teilw. u.d.T.: International Conference on Micro Electro Mechanical Systems: Technical digest. -Teilw. u.d.T.: International Conference on Micro Electro Mechanical Systems: Proceedings Mikromechanik (DE-588)4205811-9 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Mikromechanik (DE-588)4205811-9 s Mikroelektronik (DE-588)4039207-7 s DE-604 Institute of Electrical and Electronics Engineers Sonstige (DE-588)1692-5 oth International Workshop on Micro Electro Mechanical Systems Sonstige (DE-588)16147460-3 oth International Conference on Micro Electro Mechanical Systems Sonstige (DE-588)16147461-5 oth |
| spellingShingle | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots Mikromechanik (DE-588)4205811-9 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| subject_GND | (DE-588)4205811-9 (DE-588)4039207-7 (DE-588)1071861417 |
| title | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots |
| title_auth | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots |
| title_exact_search | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots |
| title_exact_search_txtP | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots |
| title_full | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots |
| title_fullStr | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots |
| title_full_unstemmed | Micro electro mechanical systems proceedings ; an investigation of micro structures, sensors, actuators, machines and robots |
| title_short | Micro electro mechanical systems |
| title_sort | micro electro mechanical systems proceedings an investigation of micro structures sensors actuators machines and robots |
| title_sub | proceedings ; an investigation of micro structures, sensors, actuators, machines and robots |
| topic | Mikromechanik (DE-588)4205811-9 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| topic_facet | Mikromechanik Mikroelektronik Konferenzschrift |
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