Verfügbarkeit: Springer handbook of nanotechnology

Springer handbook of nanotechnology: with 109 tables

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Weitere Verfasser:	Bhushan, Bharat 1949- (HerausgeberIn)
Format:	Buch
Sprache:	English
Veröffentlicht:	Berlin [u.a.] Springer 2007
Ausgabe:	2. rev. and expanded ed.
Schriftenreihe:	Springer handbooks
Schlagworte:	Nanotechnology > Handbooks, manuals, etc. Nanotechnologie Aufsatzsammlung
Online-Zugang:	Beschreibung für Leser Inhaltstext Table of contents only Publisher description Contributor biographical information Inhaltsverzeichnis
Beschreibung:	XLIV, 1916 S. zahlr. Ill., graph. Darst. CD-ROM (12 cm)
ISBN:	354029855X 9783540298380 9783540298557

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Datensatz im Suchindex

_version_	1804135772786262016
adam_text	Contents List of Abbreviations ................................................................................. XU Introduction 1 Introduction to Nanotechnology Bharat Bhushan ...................................................................................... 1 1.1 Nanotechnology - Definition and Examples ................................... 1 1.2 Background and Research Expenditures ......................................... 4 1.3 Lessons from Nature (Biomimetics) ................................................. 6 1.4 Applications in Different Fields ...................................................... 7 1.5 Various Issues ............................................................................... 8 1.6 Research Training .......................................................................... 8 1.7 Organization of Handbook ............................................................. 9 References .............................................................................................. 9 Part A Nanostructures, Micro/Nanofabrication and Materials 2 Nanomaterials Synthesis and Applications: Molecule-Based Devices Francisco M. Raymo ................................................................................. 13 2.1 Chemical Approaches to Nanostructured Materials .......................... 13 2.2 Molecular Switches and Logic Gates ................................................ 18 2.3 Solid State Devices ......................................................................... 26 2.4 Conclusions and Outlook ................................................................ 38 References .............................................................................................. 39 3 Introduction to Carbon Nanotubes Marc Monthioux, Philippe Serp, Emmanuel Flahaut, Manitra Razafinimanana, Christophe Laurent, Alain Peigney, Wolfgang Bacsa, Jean-Marc Broto ............................................................ 43 3.1 Structure of Carbon Nanotubes ....................................................... 44 3.2 Synthesis of Carbon Nanotubes ...................................................... 49 3.3 Growth Mechanisms of Carbon Nanotubes ...................................... 65 ЗА Properties of Carbon Nanotubes ..................................................... 69 3.5 Carbon Nanotube-Based Nano-Objects .......................................... 74 3.6 Applications of Carbon Nanotubes .................................................. 80 3.7 Concluding Remarks ...................................................................... 95 References .............................................................................................. 95 Contents 4 Nanowires Mildred S. Dresselhaus, Yu-Ming Lin, Oded Rabin, Marcie R. Black, ling Kong, Gene Dresselhaus .................................................................... 113 4.1 Synthesis ...................................................................................... 115 4.2 Characterization and Physical Properties of Nanowires .................... 124 4.3 Applications .................................................................................. 145 4.4 Concluding Remarks ...................................................................... 152 References .............................................................................................. 153 5 Template-Based Synthesis of Nanorod or Nanowire Arrays Huamei (Mary) Shang, Guozhong Cao ....................................................... 161 5.1 Template-Based Approach ............................................................. 162 5.2 Electrochemical Deposition ............................................................ 163 5.3 Electrophoretic Deposition ............................................................. 167 5Л Template Filling ............................................................................ 172 5.5 Converting from Reactive Templates ............................................... 174 5.6 Summary and Concluding Remarks ................................................. 174 References .............................................................................................. 175 6 Three-Dimensional Nanostructure Fabrication by Focused Ion Beam Chemical Vapor Deposition Shinji Matsui ........................................................................................... 179 6.1 Three-Dimensional Nanostructure Fabrication ................................ 180 6.2 Nanoelectromechanics .................................................................. 183 6.3 Nanooptics: Brilliant Blue from a Morpho Butterfly Scale Quasi-Structure ............................................................................. 190 б A Nanobiology ................................................................................. 191 6.5 Summary ...................................................................................... 194 References .............................................................................................. 195 7 Introduction to Micro/Nanofabrication Babak Ziaie, Antonio Baldi, Massood 2. Atashbar ...................................... 197 7.1 Basic Microfabrication Techniques .................................................. 197 7.2 MEMS Fabrication Techniques ......................................................... 210 7.3 Nanofabrication Techniques .......................................................... 222 7A Summary and Conclusions ............................................................. 233 References .............................................................................................. 233 8 Nanoimprint Lithography Helmut Schift, Anders Kristensen .............................................................. 239 8.1 Emerging Nanopatterning Methods ................................................ 241 8.2 Nanoimprint Process ..................................................................... 244 8.3 Tools and Materials for Nanoimprint .............................................. 255 8.4 Applications .................................................................................. 262 8.5 Conclusion and Outlook ................................................................. 268 References .............................................................................................. 270 9 Stamping Techniques for Micro- and Nanofabrication Etienne Menard, John A. Rogers ............................................................... 279 9.1 High-Resolution Stamps ................................................................ 280 9.2 Microcontact Printing .................................................................... 282 9.3 Nanotransfer Printing .................................................................... 284 9.4 Applications .................................................................................. 288 9.5 Conclusions ................................................................................... 295 References .............................................................................................. 295 10 Material Aspects of Micro- and Nanoelectromechanical Systems Christian A. lotman, Mehran Mehregany .................................................. 299 10.1 Silicon .......................................................................................... 299 10.2 Germanium-Based Materials ......................................................... 306 10.3 Metals .......................................................................................... 307 10.4 Harsh-Environment Semiconductors .............................................. 309 10.5 GaAs, InP, and Related 111 — V Materials ............................................ 314 10.6 Ferroelectric Materials ................................................................... 316 10.7 Polymer Materials ......................................................................... 317 10.8 Future Trends ................................................................................ 318 References .............................................................................................. 319 11 Complexity and Emergence as Design Principles for Engineering Decentralized Nanoscale Systems David Wendell, Dean Ho, Carlo D. Montemagno ........................................ 323 11.1 Definitions .................................................................................... 324 11.2 Examples and Experimental Analysis of Decentralized Systems in Nature ................................................ 331 11.3 Engineering Emergent Behavior into Nanoscale Systems: Thematic Examples of Synthetic Decentralized Nanostructures ......... 334 11.4 Conclusion .................................................................................... 343 References .............................................................................................. 343 12 Nanometer-Scale Thermoelectric Materials Joseph P. Heremans ................................................................................. 345 12.1 The Promise of Thermoelectricity .................................................... 347 12.2 Theory of Thermoelectric Transport in Low-Dimensional Solids ........ 349 12.3 Two-Dimensional Thermoelectric Transport in Quantum Wells ......... 359 12.4 One-Dimensional Thermoelectric Transport in Quantum Wires ......... 360 12.5 Quasi-Zero-Dimensional Systems, Solids Containing Quantum Dots . 366 12.6 Conclusions ................................................................................... 370 References .............................................................................................. 370 13 Nano- and Microstructured Semiconductor Materials for Macroelectronics Yugang Sun, Seung-Hyun Hur, John A. Rogers .......................................... 375 13.1 Classes of Semiconductor Nanomaterials and their Preparation ....... 377 Contents 13.2 Generation of Thin Films of Ordered Nanostructures on Plastic Substrates ..................................................................................... 384 13.3 Applications for Macroelectronics ................................................... 389 13 A Outlook ......................................................................................... 395 References .............................................................................................. 395 Part В MEMS/NEMS and BioMEMS/NEMS 14 Next-Generation DNA Hybridization and Self-Assembly Nanofabrication Devices Michael J. Heller, Benjamin Sullivan, Dietrich Dehlinger, Paul Swanson, Dalibor Hodko ......................................................................................... 14.1 Electronic Microarray Technology .................................................... 403 14.2 Electric Field-Assisted Nanofabrication Processes ............................ 409 14.3 Conclusions ................................................................................... 411 References .............................................................................................. 411 15 MEMS/NEMS Devices and Applications Damn J. Young, Christian A. Zorman, Mehran Mehregany ......................... 415 15.1 MEMS Devices and Applications ...................................................... 417 15.2 Nanoelectromechanical Systems (NEMS) .......................................... 436 15.3 Current Challenges and Future Trends ............................................ 439 References .............................................................................................. 440 16 Nanomechanical Cantilever Array Sensors Hans Peter Lang, Martin Hegner, Christoph Gerber.................................... 443 16.1 Technique ..................................................................................... 443 16.2 Cantilever Array Sensors ................................................................. 445 16.3 Modes of Operation ....................................................................... 446 16.4 Microfabrication ............................................................................ 450 16.5 Measurement Set-Up ..................................................................... 450 16.6 Functionalization Techniques ........................................................ 453 16.7 Applications .................................................................................. 455 16.8 Conclusions and Outlook ................................................................ 455 References .............................................................................................. 456 17 Therapeutic Nanodevices Stephen С Lee, Mark Ruegsegger, Philip D. Barnes, Bryan R. Smith, Mauro Ferrari .......................................................................................... 461 17.1 Definitions and Scope of Discussion ............................................... 462 17.2 Synthetic Approaches: Top-Down Versus Bottom-Up Approaches for Nanotherapeutic Device Components ...................... 467 17.3 Technologiealand Biological Opportunities ..................................... 470 17.4 Applications of Nanotherapeutic Devices ........................................ 488 17.5 Concluding Remarks: Barriers to Practice and Prospects .................. 496 References .............................................................................................. 499 Contents 18 G-Protein Coupled Receptors: Surface Display and Biosensor Technology Edward J. McMurchie, Wayne R. Leifert ..................................................... 505 18.1 The GPCRiG-Protein Activation Cycle ............................................... 507 18.2 Preparation of GPCRs and G-proteins ............................................. 509 18.3 Measurement of GPCR Signaling ..................................................... 509 18 A GPCR Biosensing ............................................................................ 511 18.5 Protein Engineering in GPCR Signaling ............................................ 517 18.6 The Future of GPCRs in Nanobiotechnologies ................................... 520 References .............................................................................................. 520 19 Microfluidics and Their Applications to Lab-on-a-Chip Chong H. Ahn, Jin-Woo Choi .................................................................... 523 19.1 Materials for Microfluidic Devices and Micro/Nanofabrication Techniques ........................................... 524 19.2 Active Microfluidic Devices ............................................................. 527 19.3 Smart Passive Microfluidic Devices .................................................. 532 19.4 Lab-on-a-Chip for Biochemical Analysis ........................................ 540 References .............................................................................................. 545 20 Centrifuge-Based Fluidic Platforms Jim Zoval, Guangyao Jia, Horacio Kido, Jitae Kim, Nahui Kim, Marci. Madou ......................................................................................... 549 20.1 Why Centripetal Force for Fluid Propulsion? .................................... 550 20.2 Compact Disc or Micro-Centrifuge Fluidics ....................................... 552 20.3 CD Applications ............................................................................. 556 20.4 Conclusion .................................................................................... 567 References .............................................................................................. 568 21 Micro/Nanodroplets in Microfluidic Devices Mike Yung-Chieh Tan, Abraham Abe Lee ............................................ 571 21.1 Active or Programmable Droplet System ......................................... 572 21.2 Passive Droplet Control Techniques ................................................ 575 21.3 Applications .................................................................................. 582 21.4 Conclusion .................................................................................... 584 References .............................................................................................. 584 Part С Scanning Probe Microscopy 22 Scanning Probe Microscopy - Principle of Operation, Instrumentation, and Probes Bharat Bhushan, Othmar Marti ................................................................ 591 22.1 Scanning Tunneling Microscope ..................................................... 593 22.2 Atomic Force Microscope ................................................................ 597 22.3 AFM Instrumentation and Analyses ................................................ 613 References .............................................................................................. 630 Contents 23 Probes ¡η Scanning Microscopies Jason Η. Hafner....................................................................................... 637 23.1 Atomic Force Microscopy ................................................................ 638 23.2 Scanning Tunneling Microscopy ...................................................... 648 References .............................................................................................. 649 24 Noncontact Atomic Force Microscopy and Related Topics Franz J. Giessibl, Yasuhiro Sugawara, Seizo Monta, Hirotaka Hosoi, Kazuhisa Sueoka, Koichi Mukasa, Akira Sasahara, Hiroshi Onishi ............... 651 24.1 Atomic Force Microscopy (AFM) ....................................................... 652 24.2 Applications to Semiconductors ..................................................... 657 24.3 Applications to Insulators .............................................................. 663 24 A Applications to Molecules .............................................................. 670 References .............................................................................................. 673 25 Low-Temperature Scanning Probe Microscopy Markus Morgenstern, Alexander Schwarz, Udo D. Schwarz......................... 679 25.1 Microscope Operation at Low Temperatures .................................... 680 25.2 Instrumentation ............................................................................ 681 25.3 Scanning Tunneling Microscopy and Spectroscopy ........................... 685 25.4 Scanning Force Microscopy and Spectroscopy .................................. 698 References .............................................................................................. 710 26 Higher-Harmonic Force Detection in Dynamic Force Microscopy OzgurSahin, Calvin F. Quote, Olav Solgaard, Franz J. Giessibl .................... 717 26.1 Modeling of Tip-Sample Interaction Forces in Tapping-Mode AFM ................................................................... 718 26.2 Enhancing a Specific Harmonic of the Interaction Force Using a Flexural Resonance ............................................................ 721 26.3 Recovering the Time-Resolved Tip-Sample Forces with Torsionai Vibrations ............................................................... 724 26.4 Application Examples .................................................................... 727 26.5 Higher Harmonic/Atomic Force Microscopy with Small Amplitudes .................................................................. 731 References .............................................................................................. 735 27 Dynamic Modes of Atomic Force Microscopy A. Schirmeisen, В. Anczykowski, Harald Fuchs........................................... 737 27.1 Motivation: Measurement of a Single Atomic Bond ......................... 737 27.2 Harmonic Oscillator: A Model System for Dynamic AFM .................... 741 27.3 Dynamic AFM Operational Modes .................................................... 743 27.4 (J-Control ...................................................................................... 754 27.5 Dissipation Processes Measured with Dynamic AFM ......................... 758 27.6 Conclusion .................................................................................... 762 References .............................................................................................. 762 Contents 28 Molecular Recognition Force Microscopy: From Simple Bonds to Complex Energy Landscapes Peter Hinterdorfer, ľ/V Reich ..................................................................... 767 28.1 Ugand Tip Chemistry ..................................................................... 768 28.2 Immobilization of Receptors onto Probe Surfaces ............................ 770 28.3 Single-Molecule Recognition Force Detection .................................. 771 28Л Principles of Molecular Recognition Force Spectroscopy ................... 773 28.5 Recognition Force Spectroscopy: From Isolated Molecules to Biological Membranes ........................... 775 28.6 Recognition Imaging ..................................................................... 782 28.7 Concluding Remarks ...................................................................... 784 References .............................................................................................. 784 Part D Nanotribology and Nanomechanics 29 Nanotribology, Nanomechanics and Materials Characterization Bharat Bhushan ...................................................................................... 791 29.1 Description of AFM/FFM and Various Measurement Techniques ........ 793 29.2 Surface Imaging, Friction and Adhesion ......................................... 804 29.3 Wear, Scratching, Local Deformation, and Fabrication/Machining.... 829 29.4 Indentation .................................................................................. 837 29.5 Boundary Lubrication .................................................................... 841 29.6 Closure ......................................................................................... 852 References .............................................................................................. 853 30 Surface Forces and Nanorheology of Molecularly Thin Films Marina Ruths, Jacob N. Israelachvili ......................................................... 859 30.1 Introduction: Types of Surface Forces .............................................. 860 30.2 Methods Used to Study Surface Forces ............................................ 862 30.3 Normal Forces Between Dry (Unlubricated) Surfaces ........................ 866 30.4 Normal Forces Between Surfaces in Liquids ..................................... 870 30.5 Adhesion and Capillary Forces ........................................................ 880 30.6 Introduction: Different Modes of Friction and the Limits of Continuum Models .................................................................... 886 30.7 Relationship Between Adhesion and Friction Between Dry (Unlubricated and Solid Boundary Lubricated) Surfaces ................... 887 30.8 Liquid Lubricated Surfaces ............................................................. 898 30.9 Effects of Nanoscale Texture on Friction .......................................... 909 References .............................................................................................. 913 31 Interfacial Forces and Spectroscopie Study of Confined Fluids V. Elaine Zhu, Ashis Mukhopadhyay, Steve Granick .................................... 925 31.1 Hydrodynamic Force of Fluids Flowing in Micro- to Nanofluidics: A Question About No-Slip Boundary Condition ................................ 926 31.2 Hydrophobie Interaction and Water at a Hydrophobicity Interface ... 932 31.3 Ultrafast Spectroscopie Study of Confined Fluids: Combining Ultra-Fast Spectroscopy with Force Apparatus ................ 938 Contents 31Л Contrasting Friction with Diffusion in Molecularly Thin Films ........... 31.5 Diffusion of Confined Molecules During Shear ................................. 945 31.6 Summary ...................................................................................... 946 References .............................................................................................. 946 32 Scanning Probe Studies of Nanoscale Adhesion Between Solids in the Presence of Liquids and Monolayer Films Robert W. Carpick, James Batteas, Maarten P. de Boer ............................... 951 32.1 The Importance of Adhesion at the Nanoscale ................................ 951 32.2 Techniques for Measuring Adhesion ............................................... 952 32.3 Calibration of Forces, Displacements, and Tips ................................ 957 32.4 The Effect of Liquid Capillaries on Adhesion .................................... 959 32.5 Self-Assembled Monolayers ........................................................... 968 32.6 Concluding Remarks ...................................................................... 973 References .............................................................................................. 974 33 Friction and Wear on the Atomic Scale Enrico Gnecco, Roland Bennewitz, Oliver Pfeiffer, Anisoara Socoliuc, Ernst Meyer. ............................................................................................. 981 33.1 Friction Force Microscopy in Ultrahigh Vacuum ............................... 982 33.2 The Tomlinson Model ..................................................................... 986 33.3 Friction Experiments on the Atomic Scale ....................................... 988 33.4 Thermal Effects on Atomic Friction ................................................. 992 33.5 Geometry Effects in Nanocontacts .................................................. 996 33.6 Wear on the Atomic Scale .............................................................. 999 33.7 Molecular Dynamics Simulations of Atomic Friction and Wear ........................................................... 1001 33.8 Energy Dissipation in Noncontact Atomic Force Microscopy .............. 1004 33.9 Conclusion .................................................................................... 1006 References .............................................................................................. 1007 34 Velocity Dependence of Nanoscale Friction, Adhesion and Wear Nikhil S. Tambe, Bharat Bhushan ............................................................. 1011 34.1 Bridging Science and Engineering for Nanotribological Investigations ............................................................................... 1012 34.2 Instrumentation ............................................................................ 1014 34.3 Velocity Dependence of Nanoscale Friction and Adhesion ................ 1017 34.4 Dominant Friction Regimes and Mechanisms .................................. 1020 34.5 Nanoscale Friction Mapping ........................................................... 1035 34.6 Wear Studies at High Sliding Velocities ........................................... 1037 34.7 Identifying Materials with Low Friction and Adhesion for Nanotechnological Applications ................................................ 1043 34.8 Closure ......................................................................................... 1045 References .............................................................................................. 1046 Contents 35 Computer Simulations of Nanometer-Scale Indentation and Friction Susan B. Sinnott, Seong-Jun Heo, Donald W. Brenner, Judith A. Harrison .. 1051 35.1 Computational Details ................................................................... 1052 35.2 Indentation .................................................................................. 1057 35.3 Friction and Lubrication ................................................................ 1072 35Л Conclusions ................................................................................... 1096 References .............................................................................................. 1097 36 Nanoscale Mechanical Properties - Measuring Techniques and Applications Andrzej J. Kulik, Andras Kis, Gérard Gremaud, Stefan Hengsberger, Gustavo S. Luengo, Philippe К. Zysset, László Forró .................................... 1107 36.1 Local Mechanical Spectroscopy via Dynamic Contact AFM ................. 1108 36.2 Static Methods - Mesoscopic Samples, Shear and Young s Modulus . 1113 36.3 Scanning Nanoindentation as a Tool to Determine Nanomechanical Properties of Biological Tissue Under Dry and Wet Conditions .......... 1121 36Л General Summary and Perspectives ................................................ 1132 References .............................................................................................. 1133 37 Nanomechanical Properties of Solid Surfaces and Thin Films Adrian B. Mann ....................................................................................... 1137 37.1 Instrumentation ............................................................................ 1138 37.2 Data Analysis ................................................................................ llMf 37.3 Modes of Deformation ................................................................... 1152 37Л Thin Films and Multilayers ............................................................. 1156 37.5 Developing Areas ........................................................................... 1161 References .............................................................................................. 1161 38 Scale Effect in Mechanical Properties and Tribology Bharat Bhushan, Michael Nosonovsky ...................................................... 1167 38.1 Nomenclature ............................................................................... 1167 38.2 Introduction ................................................................................. 1169 38.3 Scale Effect in Mechanical Properties .............................................. 1171 38Л Scale Effect in Surface Roughness and Contact Parameters ............... 1175 38.5 Scale Effect in Friction ................................................................... 1178 38.6 Scale Effect in Wear ....................................................................... 1190 38.7 Scale Effect in Interface Temperature .............................................. 1190 38.8 Closure ......................................................................................... 1191 38.A Statistics of Particle Size Distribution .............................................. 1192 References .............................................................................................. 1196 39 Mechanics of Biological Nanotechnology Rob Phillips, Prashant K. Purohit, Jané Kondev ......................................... 1199 39.1 Science at the Biology-Nanotechnology Interface ........................... 1200 39.2 Scales at the Bio-Nano Interface ................................................... 1206 39.3 Modeling at the Nano-Bio Interface .............................................. 1212 Contents 39.4 Nature s Nanotechnology Revealed: Viruses as a Case Study ............ 1215 39.5 Concluding Remarks ...................................................................... 1220 References .............................................................................................. 1220 40 Structural, Nanomechanical and Nanotribological Characterization of Human Hair Using Atomic Force Microscopy and Nanoindentation Bharat Bhushan, Carmen LaTorre, Guohua Wei ......................................... 1223 40.1 Human Hair, Skin and Hair Care Products ....................................... 1226 40.2 Experimental Techniques ............................................................... 1235 40.3 Structural Characterization Using an AFM ........................................ 1246 40.4 Nanomechanical Characterization Using Nanoindentation and Nanoscratch .................................................................................. 1252 40.5 Macroscale Tribological Characterization ......................................... 1266 40.6 Nanotribological Characterization Using an AFM .............................. 1269 40.7 Closure ......................................................................................... 1300 40.A Conditioner Thickness Approximation ............................................. 1302 References .............................................................................................. 1302 41 Mechanical Properties of Na nostru ctu res Bharat Bhushan ...................................................................................... 1305 41.1 Experimental Techniques for Measurement of Mechanical Properties of N a nostru ctu res .......................................................... 1307 41.2 Experimental Results and Discussion .............................................. 1312 41.3 Finite Element Analysis of Nanostructures with Roughness and Scratches ...................................................................................... 1326 41.4 Closure ......................................................................................... 1332 References .............................................................................................. 1333 Part E Molecularly Thick Films for Lubrication 42 Nanotribology of Ultrathin and Hard Amorphous Carbon Films Bharat Bhushan ...................................................................................... 1339 42.1 Description of Common Deposition Techniques ............................... 1343 42.2 Chemical and Physical Coating Characterization .............................. 1347 42.3 Micromechanical and Tribological Coating Characterization ............. 1353 42.4 Closure ......................................................................................... 1374 References .............................................................................................. 1375 43 Self-Assembled Monolayers (SAMs) for Controlling Adhesion, Friction, and Wear Bharat Bhushan ...................................................................................... 1379 43.1 A Brief Organic Chemistry Primer .................................................... 1382 43.2 Self-Assembled Monolayers: Substrates, Spacer Chains; and End Groups in the Molecular Chains ...................................................... 1386 43.3 Tribological Properties of SAMs ....................................................... 1389 Contents 43.4 Closure ......................................................................................... 1410 References .............................................................................................. 44 Nanoscale Boundary Lubrication Studies Bharat Bhushan, Huiwen Liu ................................................................... 1417 44.1 Lubricants Details .......................................................................... 1418 44.2 Nanodeformation, Molecular Conformation, and Lubricant Spreading ............................................................... 1420 44.3 Boundary Lubrication Studies ........................................................ 1422 44.4 Closure ......................................................................................... 1436 References .............................................................................................. 1436 45 Kinetics and Energetics in Nanolubrication Rene M. Overney, George I/I/. Tyndall, Jane Frommer.................................. 1439 45.1 Background: From Bulk to Molecular Lubrication ............................ 1441 45.2 Thermal Activation Model of Lubricated Friction .............................. 1443 45.3 Functional Behavior of Lubricated Friction ...................................... 1444 45.4 Thermodynamical Models Based on Small and Nonconforming Contacts ......................................................... 1446 45.5 Limitation of the Gaussian Statistics - The Fractal Space ................. 1447 45.6 Fractal Mobility in Reactive Lubrication .......................................... 1448 45.7 Metastable Lubricant Systems in Large Conforming Contacts ............ 1450 45.8 Conclusion .................................................................................... 1451 References .............................................................................................. 1451 Part F Industrial Applications 46 The Millipede - A Nanotechnology-Based AFM Data-Storage System Gerd К. Binnig, G. Cherubini, M. Despont, Urs T. Dürig, Evangelos Eleftheriou, H. Pozidis, Peter Vettiger ........................................ 1457 46.1 The Millipede Concept................................................................... 1459 46.2 Thermomechanical AFM Data Storage ............................................. 1460 46.3 Array Design, Technology, and Fabrication ..................................... 1462 46.4 Array Characterization ................................................................... 1463 46.5 x/y/z Medium Microscanner........................................................... 1465 46.6 First Write/Read Results with the 32><32 Array Chip ........................... 1467 46.7 Polymer Medium ........................................................................... 1469 46.8 Read Channel Model ...................................................................... 1475 46.9 System Aspects .............................................................................. 1479 46.10 Conclusions ................................................................................... 1484 References .............................................................................................. 1484 47 Nanotechnology for Data Storage Applications DrorSarid, Brendan McCarthy, Ghassan E. Jabbour ................................... 1487 47.1 Current Status of Commercial Data Storage Devices .......................... 1489 Contents 1+7.2 Opportunities Offered by Nanotechnology for Data Storage .............. 1495 47.3 Conclusion .................................................................................... 1506 References .............................................................................................. 1507 48 Microactuators for Dual-Stage Servo Systems in Magnetic Disk Files Roberto Horowitz, Tsung-Lin (Tony) Chen, Kenn Oldham, Yunfeng Li, Xinghui Huang, Shin-Chung Kon, Ryozo Nagamune ................................. 1509 ι*8.1 Design of the Electrostatic Microactuator ........................................ 1511 48.2 Fabrication ................................................................................... 1520 48.3 Servo Control Design of MEMS Microactuator Dual-Stage Servo Systems ........................... 1528 48.4 Conclusions and Outlook ................................................................ 1541 References .............................................................................................. 1542 49 Nanorobotics Bradley J. Nelson, Lixln Dong ................................................................... 1545 49.1 Overview of Nanorobotics .............................................................. 1546 49.2 Actuation at Nanoscales ................................................................ 1547 49.3 Nanorobotic Manipulation Systems ................................................ 1549 49.4 Nanorobotic Assembly ................................................................... 1555 49.5 Applications .................................................................................. 1563 References .............................................................................................. 1566 Part G Micro/Nanodevice Reliability 50 Nanotribology and Materials Characterization of MEMS/NEMS and BioMEMS/BioNEMS Materials and Devices Bharat Bhushan ...................................................................................... 1575 50.1 Introduction ................................................................................. 1576 50.2 Tribological Studies of Silicon and Related Materials ....................... 1593 50.3 Lubrication Studies for MEMS/NEMS ................................................ 1600 50.4 Tribological Studies of Biological Molecules on Silicon-Based Surfaces and of Coated Polymer Surfaces ........................................ 1606 50.5 Nanopattemed Surfaces ................................................................ 1611 50.6 Component-Level Studies .............................................................. 1616 50.7 Conclusion .................................................................................... 1627 50. A Appendix Micro/Nanofabrication Methods ...................................... 1628 References .............................................................................................. 1631 51 Experimental Characterization Techniques for Micro/Nanoscale Devices Kimberly L. Turner, Peter G . Hartwell......................................................... 1639 51.1 Motivation .................................................................................... 1639 51.2 Applications Utilizing Dynamic MEMS/NEMS ..................................... 1640 51.3 Test/Characterization Techniques .................................................... 1640 Contents 51.4 Example: Characterizing an In-Plane MEMS Actuator ....................... 1654 51.5 Design for Test .............................................................................. 1659 References .............................................................................................. 1659 52 Failure Mechanisms in MEMS/NEMS Devices W. Merlijn van Spengen, Robert Modlinski, Robert Puers, Anne Jourdain.... 1663 52.1 Failure Modes and Failure Mechanisms .......................................... 1663 52.2 Stiction and Charge-Related Failure Mechanisms ............................ 1665 52.3 Creep, Fatigue, Wear, and Packaging-Related Failures .................... 1671 52 A Conclusions ................................................................................... 1681 References .............................................................................................. 1681 53 Mechanical Properties of Micromachined Structures Harold Kahn............................................................................................ 1685 53.1 Measuring Mechanical Properties of Films on Substrates ................. 1685 53.2 Micromachined Structures for Measuring Mechanical Properties ...... 1686 53.3 Measurements of Mechanical Properties ......................................... 1696 References .............................................................................................. 1699 54 Thermo- and Electromechanical Behavior of Thin-Film Micro and Na nostru et u res Martin L. Dunn, Shawn J. Cunningham ..................................................... 1703 54·.1 Thermomechanics of Multilayer Thin-Film Structures ...................... 1705 54.2 Electromechanics of Thin-Film Structures ....................................... 1726 54.3 Summary and Topics not Covered ................................................... 1744 References .............................................................................................. 1745 55 High Volume Manufacturing and Field Stability of MEMS Products Jack Martin ............................................................................................. 1749 55.1 Manufacturing Strategy ................................................................. 1752 55.2 Robust Manufacturing ................................................................... 1754 55.3 Stable Field Performance ............................................................... 1769 References .............................................................................................. 1772 56 Packaging and Reliability Issues in Micro/Nano Systems Jongbaeg Kim, Yu-Ting Cheng, Mu Chião, Liwei Lin ................................... 1777 56.1 Introduction to Micro-ÍNano-Electromechanical (MEMS)/ (NEMS) Packaging .......................................................................... 1777 56.2 Hermetic and Vacuum Packaging and Applications ......................... 1783 56.3 Thermal Issues and Packaging Reliability ........................................ 1791 56.4 Future Trends and Summary .......................................................... 1798 References .............................................................................................. 1799 Contents Part H Technological Convergence and Governing Nanotechnology 57 Technological Convergence from the Nanoscale William Sims Bainbridge .......................................................................... 1807 57.1 Nanoscience Synergy ..................................................................... 1807 57.2 Dynamics of Convergence from the Nanoscale ................................ 1810 57.3 Ethical, Legal and Social Implications ............................................. 1811 57Л Transformative Synthesis ............................................................... 181^ 57.5 Cultural Implications of Convergence .............................................. 1816 57.6 Conclusion .................................................................................... 1819 References .............................................................................................. 1819 58 Governing Nanotechnology: Social, Ethical and Human Issues William Sims Bainbridge .......................................................................... 1823 58.1 Social Science Background ............................................................. 1823 58.2 Human Impacts of Nanotechnology ................................................ 1827 58.3 Regulating Nanotechnology ........................................................... 1830 58Л The Cultural Context for Nanotechnology ........................................ 1832 58.5 Conclusions ................................................................................... 1835 References .............................................................................................. 1835 Acknowledgements ................................................................................... About the Authors ..................................................................................... Subject Index ............................................................................................. 1877
adam_txt	Contents List of Abbreviations . XU Introduction 1 Introduction to Nanotechnology Bharat Bhushan . 1 1.1 Nanotechnology - Definition and Examples . 1 1.2 Background and Research Expenditures . 4 1.3 Lessons from Nature (Biomimetics) . 6 1.4 Applications in Different Fields . 7 1.5 Various Issues . 8 1.6 Research Training . 8 1.7 Organization of Handbook . 9 References . 9 Part A Nanostructures, Micro/Nanofabrication and Materials 2 Nanomaterials Synthesis and Applications: Molecule-Based Devices Francisco M. Raymo . 13 2.1 Chemical Approaches to Nanostructured Materials . 13 2.2 Molecular Switches and Logic Gates . 18 2.3 Solid State Devices . 26 2.4 Conclusions and Outlook . 38 References . 39 3 Introduction to Carbon Nanotubes Marc Monthioux, Philippe Serp, Emmanuel Flahaut, Manitra Razafinimanana, Christophe Laurent, Alain Peigney, Wolfgang Bacsa, Jean-Marc Broto . 43 3.1 Structure of Carbon Nanotubes . 44 3.2 Synthesis of Carbon Nanotubes . 49 3.3 Growth Mechanisms of Carbon Nanotubes . 65 ЗА Properties of Carbon Nanotubes . 69 3.5 Carbon Nanotube-Based Nano-Objects . 74 3.6 Applications of Carbon Nanotubes . 80 3.7 Concluding Remarks . 95 References . 95 Contents 4 Nanowires Mildred S. Dresselhaus, Yu-Ming Lin, Oded Rabin, Marcie R. Black, ling Kong, Gene Dresselhaus . 113 4.1 Synthesis . 115 4.2 Characterization and Physical Properties of Nanowires . 124 4.3 Applications . 145 4.4 Concluding Remarks . 152 References . 153 5 Template-Based Synthesis of Nanorod or Nanowire Arrays Huamei (Mary) Shang, Guozhong Cao . 161 5.1 Template-Based Approach . 162 5.2 Electrochemical Deposition . 163 5.3 Electrophoretic Deposition . 167 5Л Template Filling . 172 5.5 Converting from Reactive Templates . 174 5.6 Summary and Concluding Remarks . 174 References . 175 6 Three-Dimensional Nanostructure Fabrication by Focused Ion Beam Chemical Vapor Deposition Shinji Matsui . 179 6.1 Three-Dimensional Nanostructure Fabrication . 180 6.2 Nanoelectromechanics . 183 6.3 Nanooptics: Brilliant Blue from a Morpho Butterfly Scale Quasi-Structure . 190 б A Nanobiology . 191 6.5 Summary . 194 References . 195 7 Introduction to Micro/Nanofabrication Babak Ziaie, Antonio Baldi, Massood 2. Atashbar . 197 7.1 Basic Microfabrication Techniques . 197 7.2 MEMS Fabrication Techniques . 210 7.3 Nanofabrication Techniques . 222 7A Summary and Conclusions . 233 References . 233 8 Nanoimprint Lithography Helmut Schift, Anders Kristensen . 239 8.1 Emerging Nanopatterning Methods . 241 8.2 Nanoimprint Process . 244 8.3 Tools and Materials for Nanoimprint . 255 8.4 Applications . 262 8.5 Conclusion and Outlook . 268 References . 270 9 Stamping Techniques for Micro- and Nanofabrication Etienne Menard, John A. Rogers . 279 9.1 High-Resolution Stamps . 280 9.2 Microcontact Printing . 282 9.3 Nanotransfer Printing . 284 9.4 Applications . 288 9.5 Conclusions . 295 References . 295 10 Material Aspects of Micro- and Nanoelectromechanical Systems Christian A. lotman, Mehran Mehregany . 299 10.1 Silicon . 299 10.2 Germanium-Based Materials . 306 10.3 Metals . 307 10.4 Harsh-Environment Semiconductors . 309 10.5 GaAs, InP, and Related 111 — V Materials . 314 10.6 Ferroelectric Materials . 316 10.7 Polymer Materials . 317 10.8 Future Trends . 318 References . 319 11 Complexity and Emergence as Design Principles for Engineering Decentralized Nanoscale Systems David Wendell, Dean Ho, Carlo D. Montemagno . 323 11.1 Definitions . 324 11.2 Examples and Experimental Analysis of Decentralized Systems in Nature . 331 11.3 Engineering Emergent Behavior into Nanoscale Systems: Thematic Examples of Synthetic Decentralized Nanostructures . 334 11.4 Conclusion . 343 References . 343 12 Nanometer-Scale Thermoelectric Materials Joseph P. Heremans . 345 12.1 The Promise of Thermoelectricity . 347 12.2 Theory of Thermoelectric Transport in Low-Dimensional Solids . 349 12.3 Two-Dimensional Thermoelectric Transport in Quantum Wells . 359 12.4 One-Dimensional Thermoelectric Transport in Quantum Wires . 360 12.5 Quasi-Zero-Dimensional Systems, Solids Containing Quantum Dots . 366 12.6 Conclusions . 370 References . 370 13 Nano- and Microstructured Semiconductor Materials for Macroelectronics Yugang Sun, Seung-Hyun Hur, John A. Rogers . 375 13.1 Classes of Semiconductor Nanomaterials and their Preparation . 377 Contents 13.2 Generation of Thin Films of Ordered Nanostructures on Plastic Substrates . 384 13.3 Applications for Macroelectronics . 389 13 A Outlook . 395 References . 395 Part В MEMS/NEMS and BioMEMS/NEMS 14 Next-Generation DNA Hybridization and Self-Assembly Nanofabrication Devices Michael J. Heller, Benjamin Sullivan, Dietrich Dehlinger, Paul Swanson, Dalibor Hodko . 14.1 Electronic Microarray Technology . 403 14.2 Electric Field-Assisted Nanofabrication Processes . 409 14.3 Conclusions . 411 References . 411 15 MEMS/NEMS Devices and Applications Damn J. Young, Christian A. Zorman, Mehran Mehregany . 415 15.1 MEMS Devices and Applications . 417 15.2 Nanoelectromechanical Systems (NEMS) . 436 15.3 Current Challenges and Future Trends . 439 References . 440 16 Nanomechanical Cantilever Array Sensors Hans Peter Lang, Martin Hegner, Christoph Gerber. 443 16.1 Technique . 443 16.2 Cantilever Array Sensors . 445 16.3 Modes of Operation . 446 16.4 Microfabrication . 450 16.5 Measurement Set-Up . 450 16.6 Functionalization Techniques . 453 16.7 Applications . 455 16.8 Conclusions and Outlook . 455 References . 456 17 Therapeutic Nanodevices Stephen С Lee, Mark Ruegsegger, Philip D. Barnes, Bryan R. Smith, Mauro Ferrari . 461 17.1 Definitions and Scope of Discussion . 462 17.2 Synthetic Approaches: "Top-Down" Versus "Bottom-Up" Approaches for Nanotherapeutic Device Components . 467 17.3 Technologiealand Biological Opportunities . 470 17.4 Applications of Nanotherapeutic Devices . 488 17.5 Concluding Remarks: Barriers to Practice and Prospects . 496 References . 499 Contents 18 G-Protein Coupled Receptors: Surface Display and Biosensor Technology Edward J. McMurchie, Wayne R. Leifert . 505 18.1 The GPCRiG-Protein Activation Cycle . 507 18.2 Preparation of GPCRs and G-proteins . 509 18.3 Measurement of GPCR Signaling . 509 18 A GPCR Biosensing . 511 18.5 Protein Engineering in GPCR Signaling . 517 18.6 The Future of GPCRs in Nanobiotechnologies . 520 References . 520 19 Microfluidics and Their Applications to Lab-on-a-Chip Chong H. Ahn, Jin-Woo Choi . 523 19.1 Materials for Microfluidic Devices and Micro/Nanofabrication Techniques . 524 19.2 Active Microfluidic Devices . 527 19.3 Smart Passive Microfluidic Devices . 532 19.4 Lab-on-a-Chip for Biochemical Analysis . 540 References . 545 20 Centrifuge-Based Fluidic Platforms Jim Zoval, Guangyao Jia, Horacio Kido, Jitae Kim, Nahui Kim, Marci. Madou . 549 20.1 Why Centripetal Force for Fluid Propulsion? . 550 20.2 Compact Disc or Micro-Centrifuge Fluidics . 552 20.3 CD Applications . 556 20.4 Conclusion . 567 References . 568 21 Micro/Nanodroplets in Microfluidic Devices "Mike" Yung-Chieh Tan, Abraham "Abe" Lee . 571 21.1 Active or Programmable Droplet System . 572 21.2 Passive Droplet Control Techniques . 575 21.3 Applications . 582 21.4 Conclusion . 584 References . 584 Part С Scanning Probe Microscopy 22 Scanning Probe Microscopy - Principle of Operation, Instrumentation, and Probes Bharat Bhushan, Othmar Marti . 591 22.1 Scanning Tunneling Microscope . 593 22.2 Atomic Force Microscope . 597 22.3 AFM Instrumentation and Analyses . 613 References . 630 Contents 23 Probes ¡η Scanning Microscopies Jason Η. Hafner. 637 23.1 Atomic Force Microscopy . 638 23.2 Scanning Tunneling Microscopy . 648 References . 649 24 Noncontact Atomic Force Microscopy and Related Topics Franz J. Giessibl, Yasuhiro Sugawara, Seizo Monta, Hirotaka Hosoi, Kazuhisa Sueoka, Koichi Mukasa, Akira Sasahara, Hiroshi Onishi . 651 24.1 Atomic Force Microscopy (AFM) . 652 24.2 Applications to Semiconductors . 657 24.3 Applications to Insulators . 663 24 A Applications to Molecules . 670 References . 673 25 Low-Temperature Scanning Probe Microscopy Markus Morgenstern, Alexander Schwarz, Udo D. Schwarz. 679 25.1 Microscope Operation at Low Temperatures . 680 25.2 Instrumentation . 681 25.3 Scanning Tunneling Microscopy and Spectroscopy . 685 25.4 Scanning Force Microscopy and Spectroscopy . 698 References . 710 26 Higher-Harmonic Force Detection in Dynamic Force Microscopy OzgurSahin, Calvin F. Quote, Olav Solgaard, Franz J. Giessibl . 717 26.1 Modeling of Tip-Sample Interaction Forces in Tapping-Mode AFM . 718 26.2 Enhancing a Specific Harmonic of the Interaction Force Using a Flexural Resonance . 721 26.3 Recovering the Time-Resolved Tip-Sample Forces with Torsionai Vibrations . 724 26.4 Application Examples . 727 26.5 Higher Harmonic/Atomic Force Microscopy with Small Amplitudes . 731 References . 735 27 Dynamic Modes of Atomic Force Microscopy A. Schirmeisen, В. Anczykowski, Harald Fuchs. 737 27.1 Motivation: Measurement of a Single Atomic Bond . 737 27.2 Harmonic Oscillator: A Model System for Dynamic AFM . 741 27.3 Dynamic AFM Operational Modes . 743 27.4 (J-Control . 754 27.5 Dissipation Processes Measured with Dynamic AFM . 758 27.6 Conclusion . 762 References . 762 Contents 28 Molecular Recognition Force Microscopy: From Simple Bonds to Complex Energy Landscapes Peter Hinterdorfer, ľ/V Reich . 767 28.1 Ugand Tip Chemistry . 768 28.2 Immobilization of Receptors onto Probe Surfaces . 770 28.3 Single-Molecule Recognition Force Detection . 771 28Л Principles of Molecular Recognition Force Spectroscopy . 773 28.5 Recognition Force Spectroscopy: From Isolated Molecules to Biological Membranes . 775 28.6 Recognition Imaging . 782 28.7 Concluding Remarks . 784 References . 784 Part D Nanotribology and Nanomechanics 29 Nanotribology, Nanomechanics and Materials Characterization Bharat Bhushan . 791 29.1 Description of AFM/FFM and Various Measurement Techniques . 793 29.2 Surface Imaging, Friction and Adhesion . 804 29.3 Wear, Scratching, Local Deformation, and Fabrication/Machining. 829 29.4 Indentation . 837 29.5 Boundary Lubrication . 841 29.6 Closure . 852 References . 853 30 Surface Forces and Nanorheology of Molecularly Thin Films Marina Ruths, Jacob N. Israelachvili . 859 30.1 Introduction: Types of Surface Forces . 860 30.2 Methods Used to Study Surface Forces . 862 30.3 Normal Forces Between Dry (Unlubricated) Surfaces . 866 30.4 Normal Forces Between Surfaces in Liquids . 870 30.5 Adhesion and Capillary Forces . 880 30.6 Introduction: Different Modes of Friction and the Limits of Continuum Models . 886 30.7 Relationship Between Adhesion and Friction Between Dry (Unlubricated and Solid Boundary Lubricated) Surfaces . 887 30.8 Liquid Lubricated Surfaces . 898 30.9 Effects of Nanoscale Texture on Friction . 909 References . 913 31 Interfacial Forces and Spectroscopie Study of Confined Fluids V. Elaine Zhu, Ashis Mukhopadhyay, Steve Granick . 925 31.1 Hydrodynamic Force of Fluids Flowing in Micro- to Nanofluidics: A Question About No-Slip Boundary Condition . 926 31.2 Hydrophobie Interaction and Water at a Hydrophobicity Interface . 932 31.3 Ultrafast Spectroscopie Study of Confined Fluids: Combining Ultra-Fast Spectroscopy with Force Apparatus . 938 Contents 31Л Contrasting Friction with Diffusion in Molecularly Thin Films . 31.5 Diffusion of Confined Molecules During Shear . 945 31.6 Summary . 946 References . 946 32 Scanning Probe Studies of Nanoscale Adhesion Between Solids in the Presence of Liquids and Monolayer Films Robert W. Carpick, James Batteas, Maarten P. de Boer . 951 32.1 The Importance of Adhesion at the Nanoscale . 951 32.2 Techniques for Measuring Adhesion . 952 32.3 Calibration of Forces, Displacements, and Tips . 957 32.4 The Effect of Liquid Capillaries on Adhesion . 959 32.5 Self-Assembled Monolayers . 968 32.6 Concluding Remarks . 973 References . 974 33 Friction and Wear on the Atomic Scale Enrico Gnecco, Roland Bennewitz, Oliver Pfeiffer, Anisoara Socoliuc, Ernst Meyer. . 981 33.1 Friction Force Microscopy in Ultrahigh Vacuum . 982 33.2 The Tomlinson Model . 986 33.3 Friction Experiments on the Atomic Scale . 988 33.4 Thermal Effects on Atomic Friction . 992 33.5 Geometry Effects in Nanocontacts . 996 33.6 Wear on the Atomic Scale . 999 33.7 Molecular Dynamics Simulations of Atomic Friction and Wear . 1001 33.8 Energy Dissipation in Noncontact Atomic Force Microscopy . 1004 33.9 Conclusion . 1006 References . 1007 34 Velocity Dependence of Nanoscale Friction, Adhesion and Wear Nikhil S. Tambe, Bharat Bhushan . 1011 34.1 Bridging Science and Engineering for Nanotribological Investigations . 1012 34.2 Instrumentation . 1014 34.3 Velocity Dependence of Nanoscale Friction and Adhesion . 1017 34.4 Dominant Friction Regimes and Mechanisms . 1020 34.5 Nanoscale Friction Mapping . 1035 34.6 Wear Studies at High Sliding Velocities . 1037 34.7 Identifying Materials with Low Friction and Adhesion for Nanotechnological Applications . 1043 34.8 Closure . 1045 References . 1046 Contents 35 Computer Simulations of Nanometer-Scale Indentation and Friction Susan B. Sinnott, Seong-Jun Heo, Donald W. Brenner, Judith A. Harrison . 1051 35.1 Computational Details . 1052 35.2 Indentation . 1057 35.3 Friction and Lubrication . 1072 35Л Conclusions . 1096 References . 1097 36 Nanoscale Mechanical Properties - Measuring Techniques and Applications Andrzej J. Kulik, Andras Kis, Gérard Gremaud, Stefan Hengsberger, Gustavo S. Luengo, Philippe К. Zysset, László Forró . 1107 36.1 Local Mechanical Spectroscopy via Dynamic Contact AFM . 1108 36.2 Static Methods - Mesoscopic Samples, Shear and Young's Modulus . 1113 36.3 Scanning Nanoindentation as a Tool to Determine Nanomechanical Properties of Biological Tissue Under Dry and Wet Conditions . 1121 36Л General Summary and Perspectives . 1132 References . 1133 37 Nanomechanical Properties of Solid Surfaces and Thin Films Adrian B. Mann . 1137 37.1 Instrumentation . 1138 37.2 Data Analysis . llMf 37.3 Modes of Deformation . 1152 37Л Thin Films and Multilayers . 1156 37.5 Developing Areas . 1161 References . 1161 38 Scale Effect in Mechanical Properties and Tribology Bharat Bhushan, Michael Nosonovsky . 1167 38.1 Nomenclature . 1167 38.2 Introduction . 1169 38.3 Scale Effect in Mechanical Properties . 1171 38Л Scale Effect in Surface Roughness and Contact Parameters . 1175 38.5 Scale Effect in Friction . 1178 38.6 Scale Effect in Wear . 1190 38.7 Scale Effect in Interface Temperature . 1190 38.8 Closure . 1191 38.A Statistics of Particle Size Distribution . 1192 References . 1196 39 Mechanics of Biological Nanotechnology Rob Phillips, Prashant K. Purohit, Jané Kondev . 1199 39.1 Science at the Biology-Nanotechnology Interface . 1200 39.2 Scales at the Bio-Nano Interface . 1206 39.3 Modeling at the Nano-Bio Interface . 1212 Contents 39.4 Nature's Nanotechnology Revealed: Viruses as a Case Study . 1215 39.5 Concluding Remarks . 1220 References . 1220 40 Structural, Nanomechanical and Nanotribological Characterization of Human Hair Using Atomic Force Microscopy and Nanoindentation Bharat Bhushan, Carmen LaTorre, Guohua Wei . 1223 40.1 Human Hair, Skin and Hair Care Products . 1226 40.2 Experimental Techniques . 1235 40.3 Structural Characterization Using an AFM . 1246 40.4 Nanomechanical Characterization Using Nanoindentation and Nanoscratch . 1252 40.5 Macroscale Tribological Characterization . 1266 40.6 Nanotribological Characterization Using an AFM . 1269 40.7 Closure . 1300 40.A Conditioner Thickness Approximation . 1302 References . 1302 41 Mechanical Properties of Na nostru ctu res Bharat Bhushan . 1305 41.1 Experimental Techniques for Measurement of Mechanical Properties of N a nostru ctu res . 1307 41.2 Experimental Results and Discussion . 1312 41.3 Finite Element Analysis of Nanostructures with Roughness and Scratches . 1326 41.4 Closure . 1332 References . 1333 Part E Molecularly Thick Films for Lubrication 42 Nanotribology of Ultrathin and Hard Amorphous Carbon Films Bharat Bhushan . 1339 42.1 Description of Common Deposition Techniques . 1343 42.2 Chemical and Physical Coating Characterization . 1347 42.3 Micromechanical and Tribological Coating Characterization . 1353 42.4 Closure . 1374 References . 1375 43 Self-Assembled Monolayers (SAMs) for Controlling Adhesion, Friction, and Wear Bharat Bhushan . 1379 43.1 A Brief Organic Chemistry Primer . 1382 43.2 Self-Assembled Monolayers: Substrates, Spacer Chains; and End Groups in the Molecular Chains . 1386 43.3 Tribological Properties of SAMs . 1389 Contents 43.4 Closure . 1410 References . 44 Nanoscale Boundary Lubrication Studies Bharat Bhushan, Huiwen Liu . 1417 44.1 Lubricants Details . 1418 44.2 Nanodeformation, Molecular Conformation, and Lubricant Spreading . 1420 44.3 Boundary Lubrication Studies . 1422 44.4 Closure . 1436 References . 1436 45 Kinetics and Energetics in Nanolubrication Rene M. Overney, George I/I/. Tyndall, Jane Frommer. 1439 45.1 Background: From Bulk to Molecular Lubrication . 1441 45.2 Thermal Activation Model of Lubricated Friction . 1443 45.3 Functional Behavior of Lubricated Friction . 1444 45.4 Thermodynamical Models Based on Small and Nonconforming Contacts . 1446 45.5 Limitation of the Gaussian Statistics - The Fractal Space . 1447 45.6 Fractal Mobility in Reactive Lubrication . 1448 45.7 Metastable Lubricant Systems in Large Conforming Contacts . 1450 45.8 Conclusion . 1451 References . 1451 Part F Industrial Applications 46 The "Millipede" - A Nanotechnology-Based AFM Data-Storage System Gerd К. Binnig, G. Cherubini, M. Despont, Urs T. Dürig, Evangelos Eleftheriou, H. Pozidis, Peter Vettiger . 1457 46.1 The Millipede Concept. 1459 46.2 Thermomechanical AFM Data Storage . 1460 46.3 Array Design, Technology, and Fabrication . 1462 46.4 Array Characterization . 1463 46.5 x/y/z Medium Microscanner. 1465 46.6 First Write/Read Results with the 32><32 Array Chip . 1467 46.7 Polymer Medium . 1469 46.8 Read Channel Model . 1475 46.9 System Aspects . 1479 46.10 Conclusions . 1484 References . 1484 47 Nanotechnology for Data Storage Applications DrorSarid, Brendan McCarthy, Ghassan E. Jabbour . 1487 47.1 Current Status of Commercial Data Storage Devices . 1489 Contents 1+7.2 Opportunities Offered by Nanotechnology for Data Storage . 1495 47.3 Conclusion . 1506 References . 1507 48 Microactuators for Dual-Stage Servo Systems in Magnetic Disk Files Roberto Horowitz, Tsung-Lin (Tony) Chen, Kenn Oldham, Yunfeng Li, Xinghui Huang, Shin-Chung Kon, Ryozo Nagamune . 1509 ι*8.1 Design of the Electrostatic Microactuator . 1511 48.2 Fabrication . 1520 48.3 Servo Control Design of MEMS Microactuator Dual-Stage Servo Systems . 1528 48.4 Conclusions and Outlook . 1541 References . 1542 49 Nanorobotics Bradley J. Nelson, Lixln Dong . 1545 49.1 Overview of Nanorobotics . 1546 49.2 Actuation at Nanoscales . 1547 49.3 Nanorobotic Manipulation Systems . 1549 49.4 Nanorobotic Assembly . 1555 49.5 Applications . 1563 References . 1566 Part G Micro/Nanodevice Reliability 50 Nanotribology and Materials Characterization of MEMS/NEMS and BioMEMS/BioNEMS Materials and Devices Bharat Bhushan . 1575 50.1 Introduction . 1576 50.2 Tribological Studies of Silicon and Related Materials . 1593 50.3 Lubrication Studies for MEMS/NEMS . 1600 50.4 Tribological Studies of Biological Molecules on Silicon-Based Surfaces and of Coated Polymer Surfaces . 1606 50.5 Nanopattemed Surfaces . 1611 50.6 Component-Level Studies . 1616 50.7 Conclusion . 1627 50. A Appendix Micro/Nanofabrication Methods . 1628 References . 1631 51 Experimental Characterization Techniques for Micro/Nanoscale Devices Kimberly L. Turner, Peter G . Hartwell. 1639 51.1 Motivation . 1639 51.2 Applications Utilizing Dynamic MEMS/NEMS . 1640 51.3 Test/Characterization Techniques . 1640 Contents 51.4 Example: Characterizing an In-Plane MEMS Actuator . 1654 51.5 Design for Test . 1659 References . 1659 52 Failure Mechanisms in MEMS/NEMS Devices W. Merlijn van Spengen, Robert Modlinski, Robert Puers, Anne Jourdain. 1663 52.1 Failure Modes and Failure Mechanisms . 1663 52.2 Stiction and Charge-Related Failure Mechanisms . 1665 52.3 Creep, Fatigue, Wear, and Packaging-Related Failures . 1671 52 A Conclusions . 1681 References . 1681 53 Mechanical Properties of Micromachined Structures Harold Kahn. 1685 53.1 Measuring Mechanical Properties of Films on Substrates . 1685 53.2 Micromachined Structures for Measuring Mechanical Properties . 1686 53.3 Measurements of Mechanical Properties . 1696 References . 1699 54 Thermo- and Electromechanical Behavior of Thin-Film Micro and Na nostru et u res Martin L. Dunn, Shawn J. Cunningham . 1703 54·.1 Thermomechanics of Multilayer Thin-Film Structures . 1705 54.2 Electromechanics of Thin-Film Structures . 1726 54.3 Summary and Topics not Covered . 1744 References . 1745 55 High Volume Manufacturing and Field Stability of MEMS Products Jack Martin . 1749 55.1 Manufacturing Strategy . 1752 55.2 Robust Manufacturing . 1754 55.3 Stable Field Performance . 1769 References . 1772 56 Packaging and Reliability Issues in Micro/Nano Systems Jongbaeg Kim, Yu-Ting Cheng, Mu Chião, Liwei Lin . 1777 56.1 Introduction to Micro-ÍNano-Electromechanical (MEMS)/ (NEMS) Packaging . 1777 56.2 Hermetic and Vacuum Packaging and Applications . 1783 56.3 Thermal Issues and Packaging Reliability . 1791 56.4 Future Trends and Summary . 1798 References . 1799 Contents Part H Technological Convergence and Governing Nanotechnology 57 Technological Convergence from the Nanoscale William Sims Bainbridge . 1807 57.1 Nanoscience Synergy . 1807 57.2 Dynamics of Convergence from the Nanoscale . 1810 57.3 Ethical, Legal and Social Implications . 1811 57Л Transformative Synthesis . 181^ 57.5 Cultural Implications of Convergence . 1816 57.6 Conclusion . 1819 References . 1819 58 Governing Nanotechnology: Social, Ethical and Human Issues William Sims Bainbridge . 1823 58.1 Social Science Background . 1823 58.2 Human Impacts of Nanotechnology . 1827 58.3 Regulating Nanotechnology . 1830 58Л The Cultural Context for Nanotechnology . 1832 58.5 Conclusions . 1835 References . 1835 Acknowledgements . About the Authors . Subject Index . 1877
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spelling	Springer handbook of nanotechnology with 109 tables Bharat Bhushan (ed.) Handbook of nanotechnology Nanotechnology 2. rev. and expanded ed. Berlin [u.a.] Springer 2007 XLIV, 1916 S. zahlr. Ill., graph. Darst. CD-ROM (12 cm) txt rdacontent n rdamedia nc rdacarrier Springer handbooks Nanotechnology Handbooks, manuals, etc. Nanotechnologie (DE-588)4327470-5 gnd rswk-swf 1\p (DE-588)4143413-4 Aufsatzsammlung gnd-content Nanotechnologie (DE-588)4327470-5 s DE-604 Bhushan, Bharat 1949- (DE-588)122258762 edt Erscheint auch als Online-Ausgabe 3-540-29857-6 text/html http://deposit.dnb.de/cgi-bin/dokserv?id=2774779&prov=M&dok_var=1&dok_ext=htm Beschreibung für Leser text/html http://deposit.dnb.de/cgi-bin/dokserv?id=2774779&prov=M&dok_var=1&dok_ext=htm Inhaltstext text/html http://www.loc.gov/catdir/enhancements/fy0825/2005934668-t.html Table of contents only text/html http://www.loc.gov/catdir/enhancements/fy0825/2005934668-d.html Publisher description text/html http://www.loc.gov/catdir/enhancements/fy0825/2005934668-b.html Contributor biographical information Digitalisierung UB Bayreuth application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=015050985&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk
spellingShingle	Springer handbook of nanotechnology with 109 tables Nanotechnology Handbooks, manuals, etc. Nanotechnologie (DE-588)4327470-5 gnd
subject_GND	(DE-588)4327470-5 (DE-588)4143413-4
title	Springer handbook of nanotechnology with 109 tables
title_alt	Handbook of nanotechnology Nanotechnology
title_auth	Springer handbook of nanotechnology with 109 tables
title_exact_search	Springer handbook of nanotechnology with 109 tables
title_exact_search_txtP	Springer handbook of nanotechnology with 109 tables
title_full	Springer handbook of nanotechnology with 109 tables Bharat Bhushan (ed.)
title_fullStr	Springer handbook of nanotechnology with 109 tables Bharat Bhushan (ed.)
title_full_unstemmed	Springer handbook of nanotechnology with 109 tables Bharat Bhushan (ed.)
title_short	Springer handbook of nanotechnology
title_sort	springer handbook of nanotechnology with 109 tables
title_sub	with 109 tables
topic	Nanotechnology Handbooks, manuals, etc. Nanotechnologie (DE-588)4327470-5 gnd
topic_facet	Nanotechnology Handbooks, manuals, etc. Nanotechnologie Aufsatzsammlung
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