Semiconductor industry: wafer fab exhaust management
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Boca Raton
CRC/Taylor & Francis
2005
|
| Schlagworte: | |
| Online-Zugang: | Publisher description |
| Beschreibung: | 1 Online-Ressource |
Internformat
MARC
| LEADER | 00000nmm a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV021774164 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 061019s2005 xxu|||| o||u| ||||||eng d | ||
| 010 | |a 2005050566 | ||
| 035 | |a (OCoLC)71714848 | ||
| 035 | |a (DE-599)BVBBV021774164 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 044 | |a xxu |c US | ||
| 050 | 0 | |a TK7871.85 | |
| 082 | 0 | |a 621.3815/2/0286 | |
| 245 | 1 | 0 | |a Semiconductor industry |b wafer fab exhaust management |c J. Michael Sherer |
| 264 | 1 | |a Boca Raton |b CRC/Taylor & Francis |c 2005 | |
| 300 | |a 1 Online-Ressource | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 650 | 4 | |a Umwelt | |
| 650 | 4 | |a Semiconductor wafers |x Design and construction | |
| 650 | 4 | |a Semiconductor industry |x Environmental aspects | |
| 650 | 4 | |a Volatile organic compounds |x Environmental aspects | |
| 650 | 4 | |a Air |x Purification |x Technological innovations | |
| 700 | 1 | |a Sherer, J. Michael |e Sonstige |4 oth | |
| 856 | 4 | |u http://www.loc.gov/catdir/enhancements/fy0648/2005050566-d.html |3 Publisher description | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-014987048 | ||
Datensatz im Suchindex
| _version_ | 1804135643511521280 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| building | Verbundindex |
| bvnumber | BV021774164 |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.85 |
| callnumber-search | TK7871.85 |
| callnumber-sort | TK 47871.85 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| ctrlnum | (OCoLC)71714848 (DE-599)BVBBV021774164 |
| dewey-full | 621.3815/2/0286 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2/0286 |
| dewey-search | 621.3815/2/0286 |
| dewey-sort | 3621.3815 12 3286 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01161nmm a2200349zc 4500</leader><controlfield tag="001">BV021774164</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">061019s2005 xxu|||| o||u| ||||||eng d</controlfield><datafield tag="010" ind1=" " ind2=" "><subfield code="a">2005050566</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)71714848</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV021774164</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">xxu</subfield><subfield code="c">US</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7871.85</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815/2/0286</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Semiconductor industry</subfield><subfield code="b">wafer fab exhaust management</subfield><subfield code="c">J. Michael Sherer</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Boca Raton</subfield><subfield code="b">CRC/Taylor & Francis</subfield><subfield code="c">2005</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Umwelt</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductor wafers</subfield><subfield code="x">Design and construction</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductor industry</subfield><subfield code="x">Environmental aspects</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Volatile organic compounds</subfield><subfield code="x">Environmental aspects</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Air</subfield><subfield code="x">Purification</subfield><subfield code="x">Technological innovations</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Sherer, J. Michael</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="856" ind1="4" ind2=" "><subfield code="u">http://www.loc.gov/catdir/enhancements/fy0648/2005050566-d.html</subfield><subfield code="3">Publisher description</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-014987048</subfield></datafield></record></collection> |
| id | DE-604.BV021774164 |
| illustrated | Not Illustrated |
| index_date | 2024-07-02T15:39:29Z |
| indexdate | 2024-07-09T20:43:46Z |
| institution | BVB |
| language | English |
| lccn | 2005050566 |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-014987048 |
| oclc_num | 71714848 |
| open_access_boolean | |
| physical | 1 Online-Ressource |
| publishDate | 2005 |
| publishDateSearch | 2005 |
| publishDateSort | 2005 |
| publisher | CRC/Taylor & Francis |
| record_format | marc |
| spelling | Semiconductor industry wafer fab exhaust management J. Michael Sherer Boca Raton CRC/Taylor & Francis 2005 1 Online-Ressource txt rdacontent c rdamedia cr rdacarrier Umwelt Semiconductor wafers Design and construction Semiconductor industry Environmental aspects Volatile organic compounds Environmental aspects Air Purification Technological innovations Sherer, J. Michael Sonstige oth http://www.loc.gov/catdir/enhancements/fy0648/2005050566-d.html Publisher description |
| spellingShingle | Semiconductor industry wafer fab exhaust management Umwelt Semiconductor wafers Design and construction Semiconductor industry Environmental aspects Volatile organic compounds Environmental aspects Air Purification Technological innovations |
| title | Semiconductor industry wafer fab exhaust management |
| title_auth | Semiconductor industry wafer fab exhaust management |
| title_exact_search | Semiconductor industry wafer fab exhaust management |
| title_exact_search_txtP | Semiconductor industry wafer fab exhaust management |
| title_full | Semiconductor industry wafer fab exhaust management J. Michael Sherer |
| title_fullStr | Semiconductor industry wafer fab exhaust management J. Michael Sherer |
| title_full_unstemmed | Semiconductor industry wafer fab exhaust management J. Michael Sherer |
| title_short | Semiconductor industry |
| title_sort | semiconductor industry wafer fab exhaust management |
| title_sub | wafer fab exhaust management |
| topic | Umwelt Semiconductor wafers Design and construction Semiconductor industry Environmental aspects Volatile organic compounds Environmental aspects Air Purification Technological innovations |
| topic_facet | Umwelt Semiconductor wafers Design and construction Semiconductor industry Environmental aspects Volatile organic compounds Environmental aspects Air Purification Technological innovations |
| url | http://www.loc.gov/catdir/enhancements/fy0648/2005050566-d.html |
| work_keys_str_mv | AT shererjmichael semiconductorindustrywaferfabexhaustmanagement |