Handbook of silicon semiconductor metrology:
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
New York [u.a.]
Dekker
2001
|
| Schlagworte: | |
| Beschreibung: | 1 Online-Ressource |
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| spelling | Handbook of silicon semiconductor metrology ed. by Alain C. Diebold New York [u.a.] Dekker 2001 1 Online-Ressource txt rdacontent c rdamedia cr rdacarrier Metrologie (DE-588)4169749-2 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf Silicium (DE-588)4077445-4 s Halbleitertechnologie (DE-588)4158814-9 s Metrologie (DE-588)4169749-2 s DE-604 Diebold, Alain C. Sonstige oth |
| spellingShingle | Handbook of silicon semiconductor metrology Metrologie (DE-588)4169749-2 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Silicium (DE-588)4077445-4 gnd |
| subject_GND | (DE-588)4169749-2 (DE-588)4158814-9 (DE-588)4077445-4 |
| title | Handbook of silicon semiconductor metrology |
| title_auth | Handbook of silicon semiconductor metrology |
| title_exact_search | Handbook of silicon semiconductor metrology |
| title_exact_search_txtP | Handbook of silicon semiconductor metrology |
| title_full | Handbook of silicon semiconductor metrology ed. by Alain C. Diebold |
| title_fullStr | Handbook of silicon semiconductor metrology ed. by Alain C. Diebold |
| title_full_unstemmed | Handbook of silicon semiconductor metrology ed. by Alain C. Diebold |
| title_short | Handbook of silicon semiconductor metrology |
| title_sort | handbook of silicon semiconductor metrology |
| topic | Metrologie (DE-588)4169749-2 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Silicium (DE-588)4077445-4 gnd |
| topic_facet | Metrologie Halbleitertechnologie Silicium |
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