Electroceramic based MEMS: fabrication-technology and applications
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
New York
Springer
2005
|
| Series: | Electronic materials: science and technology
9 |
| Subjects: | |
| Online Access: | Inhaltstext |
| Physical Description: | XII, 414 S. Ill., graph. Darst. |
| ISBN: | 0387233105 0387233199 |
Staff View
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| discipline | Technik allgemein Elektrotechnik / Elektronik / Nachrichtentechnik |
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| illustrated | Illustrated |
| index_date | 2024-07-02T14:23:11Z |
| indexdate | 2024-07-09T20:37:46Z |
| institution | BVB |
| isbn | 0387233105 0387233199 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-014739943 |
| oclc_num | 254857757 |
| open_access_boolean | |
| physical | XII, 414 S. Ill., graph. Darst. |
| publishDate | 2005 |
| publishDateSearch | 2005 |
| publishDateSort | 2005 |
| publisher | Springer |
| record_format | marc |
| series | Electronic materials: science and technology |
| series2 | Electronic materials: science and technology |
| spelling | Electroceramic based MEMS fabrication-technology and applications ed. by Nava Setter Electroceramic-based MEMS New York Springer 2005 XII, 414 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Electronic materials: science and technology 9 Elektrokeramik Elektromechanisches Bauelement MEMS Mikrosystemtechnik Microelectromechanical systems MEMS (DE-588)4824724-8 gnd rswk-swf MEMS (DE-588)4824724-8 s DE-604 Setter, Nava Sonstige oth Electronic materials: science and technology 9 (DE-604)BV011602035 9 text/html http://deposit.dnb.de/cgi-bin/dokserv?id=2738281&prov=M&dok_var=1&dok_ext=htm Inhaltstext |
| spellingShingle | Electroceramic based MEMS fabrication-technology and applications Electronic materials: science and technology Elektrokeramik Elektromechanisches Bauelement MEMS Mikrosystemtechnik Microelectromechanical systems MEMS (DE-588)4824724-8 gnd |
| subject_GND | (DE-588)4824724-8 |
| title | Electroceramic based MEMS fabrication-technology and applications |
| title_alt | Electroceramic-based MEMS |
| title_auth | Electroceramic based MEMS fabrication-technology and applications |
| title_exact_search | Electroceramic based MEMS fabrication-technology and applications |
| title_exact_search_txtP | Electroceramic based MEMS fabrication-technology and applications |
| title_full | Electroceramic based MEMS fabrication-technology and applications ed. by Nava Setter |
| title_fullStr | Electroceramic based MEMS fabrication-technology and applications ed. by Nava Setter |
| title_full_unstemmed | Electroceramic based MEMS fabrication-technology and applications ed. by Nava Setter |
| title_short | Electroceramic based MEMS |
| title_sort | electroceramic based mems fabrication technology and applications |
| title_sub | fabrication-technology and applications |
| topic | Elektrokeramik Elektromechanisches Bauelement MEMS Mikrosystemtechnik Microelectromechanical systems MEMS (DE-588)4824724-8 gnd |
| topic_facet | Elektrokeramik Elektromechanisches Bauelement MEMS Mikrosystemtechnik Microelectromechanical systems |
| url | http://deposit.dnb.de/cgi-bin/dokserv?id=2738281&prov=M&dok_var=1&dok_ext=htm |
| volume_link | (DE-604)BV011602035 |
| work_keys_str_mv | AT setternava electroceramicbasedmemsfabricationtechnologyandapplications AT setternava electroceramicbasedmems |