Electroceramic based MEMS: fabrication-technology and applications
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
New York
Springer
2005
|
| Schriftenreihe: | Electronic materials: science and technology
9 |
| Schlagworte: | |
| Online-Zugang: | Inhaltstext |
| Beschreibung: | XII, 414 S. Ill., graph. Darst. |
| ISBN: | 0387233105 0387233199 |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV021523473 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | t | ||
| 008 | 060323s2005 gw ad|| |||| 00||| eng d | ||
| 015 | |a 06,N02,1137 |2 dnb | ||
| 016 | 7 | |a 977549410 |2 DE-101 | |
| 020 | |a 0387233105 |c Gb. : EUR 117.65, sfr 186.00 |9 0-387-23310-5 | ||
| 020 | |a 0387233199 |9 0-387-23319-9 | ||
| 024 | 3 | |a 9780387233109 | |
| 035 | |a (OCoLC)254857757 | ||
| 035 | |a (DE-599)BVBBV021523473 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 044 | |a gw |c XA-DE-BE | ||
| 050 | 0 | |a TK7875 | |
| 082 | 0 | |a 621.381 | |
| 084 | |a ZN 3750 |0 (DE-625)157334: |2 rvk | ||
| 084 | |a 600 |2 sdnb | ||
| 245 | 1 | 0 | |a Electroceramic based MEMS |b fabrication-technology and applications |c ed. by Nava Setter |
| 246 | 1 | 3 | |a Electroceramic-based MEMS |
| 264 | 1 | |a New York |b Springer |c 2005 | |
| 300 | |a XII, 414 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Electronic materials: science and technology |v 9 | |
| 650 | 4 | |a Elektrokeramik | |
| 650 | 4 | |a Elektromechanisches Bauelement | |
| 650 | 4 | |a MEMS | |
| 650 | 4 | |a Mikrosystemtechnik | |
| 650 | 4 | |a Microelectromechanical systems | |
| 650 | 0 | 7 | |a MEMS |0 (DE-588)4824724-8 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a MEMS |0 (DE-588)4824724-8 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Setter, Nava |e Sonstige |4 oth | |
| 830 | 0 | |a Electronic materials: science and technology |v 9 |w (DE-604)BV011602035 |9 9 | |
| 856 | 4 | 2 | |q text/html |u http://deposit.dnb.de/cgi-bin/dokserv?id=2738281&prov=M&dok_var=1&dok_ext=htm |3 Inhaltstext |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-014739943 | ||
Datensatz im Suchindex
| _version_ | 1804135266004238336 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| building | Verbundindex |
| bvnumber | BV021523473 |
| callnumber-first | T - Technology |
| callnumber-label | TK7875 |
| callnumber-raw | TK7875 |
| callnumber-search | TK7875 |
| callnumber-sort | TK 47875 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 3750 |
| ctrlnum | (OCoLC)254857757 (DE-599)BVBBV021523473 |
| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Technik allgemein Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Technik allgemein Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01647nam a2200493 cb4500</leader><controlfield tag="001">BV021523473</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">060323s2005 gw ad|| |||| 00||| eng d</controlfield><datafield tag="015" ind1=" " ind2=" "><subfield code="a">06,N02,1137</subfield><subfield code="2">dnb</subfield></datafield><datafield tag="016" ind1="7" ind2=" "><subfield code="a">977549410</subfield><subfield code="2">DE-101</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0387233105</subfield><subfield code="c">Gb. : EUR 117.65, sfr 186.00</subfield><subfield code="9">0-387-23310-5</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0387233199</subfield><subfield code="9">0-387-23319-9</subfield></datafield><datafield tag="024" ind1="3" ind2=" "><subfield code="a">9780387233109</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)254857757</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV021523473</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">gw</subfield><subfield code="c">XA-DE-BE</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7875</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 3750</subfield><subfield code="0">(DE-625)157334:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">600</subfield><subfield code="2">sdnb</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Electroceramic based MEMS</subfield><subfield code="b">fabrication-technology and applications</subfield><subfield code="c">ed. by Nava Setter</subfield></datafield><datafield tag="246" ind1="1" ind2="3"><subfield code="a">Electroceramic-based MEMS</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York</subfield><subfield code="b">Springer</subfield><subfield code="c">2005</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XII, 414 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Electronic materials: science and technology</subfield><subfield code="v">9</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Elektrokeramik</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Elektromechanisches Bauelement</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">MEMS</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Mikrosystemtechnik</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectromechanical systems</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Setter, Nava</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Electronic materials: science and technology</subfield><subfield code="v">9</subfield><subfield code="w">(DE-604)BV011602035</subfield><subfield code="9">9</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="q">text/html</subfield><subfield code="u">http://deposit.dnb.de/cgi-bin/dokserv?id=2738281&prov=M&dok_var=1&dok_ext=htm</subfield><subfield code="3">Inhaltstext</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-014739943</subfield></datafield></record></collection> |
| id | DE-604.BV021523473 |
| illustrated | Illustrated |
| index_date | 2024-07-02T14:23:11Z |
| indexdate | 2024-07-09T20:37:46Z |
| institution | BVB |
| isbn | 0387233105 0387233199 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-014739943 |
| oclc_num | 254857757 |
| open_access_boolean | |
| physical | XII, 414 S. Ill., graph. Darst. |
| publishDate | 2005 |
| publishDateSearch | 2005 |
| publishDateSort | 2005 |
| publisher | Springer |
| record_format | marc |
| series | Electronic materials: science and technology |
| series2 | Electronic materials: science and technology |
| spelling | Electroceramic based MEMS fabrication-technology and applications ed. by Nava Setter Electroceramic-based MEMS New York Springer 2005 XII, 414 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Electronic materials: science and technology 9 Elektrokeramik Elektromechanisches Bauelement MEMS Mikrosystemtechnik Microelectromechanical systems MEMS (DE-588)4824724-8 gnd rswk-swf MEMS (DE-588)4824724-8 s DE-604 Setter, Nava Sonstige oth Electronic materials: science and technology 9 (DE-604)BV011602035 9 text/html http://deposit.dnb.de/cgi-bin/dokserv?id=2738281&prov=M&dok_var=1&dok_ext=htm Inhaltstext |
| spellingShingle | Electroceramic based MEMS fabrication-technology and applications Electronic materials: science and technology Elektrokeramik Elektromechanisches Bauelement MEMS Mikrosystemtechnik Microelectromechanical systems MEMS (DE-588)4824724-8 gnd |
| subject_GND | (DE-588)4824724-8 |
| title | Electroceramic based MEMS fabrication-technology and applications |
| title_alt | Electroceramic-based MEMS |
| title_auth | Electroceramic based MEMS fabrication-technology and applications |
| title_exact_search | Electroceramic based MEMS fabrication-technology and applications |
| title_exact_search_txtP | Electroceramic based MEMS fabrication-technology and applications |
| title_full | Electroceramic based MEMS fabrication-technology and applications ed. by Nava Setter |
| title_fullStr | Electroceramic based MEMS fabrication-technology and applications ed. by Nava Setter |
| title_full_unstemmed | Electroceramic based MEMS fabrication-technology and applications ed. by Nava Setter |
| title_short | Electroceramic based MEMS |
| title_sort | electroceramic based mems fabrication technology and applications |
| title_sub | fabrication-technology and applications |
| topic | Elektrokeramik Elektromechanisches Bauelement MEMS Mikrosystemtechnik Microelectromechanical systems MEMS (DE-588)4824724-8 gnd |
| topic_facet | Elektrokeramik Elektromechanisches Bauelement MEMS Mikrosystemtechnik Microelectromechanical systems |
| url | http://deposit.dnb.de/cgi-bin/dokserv?id=2738281&prov=M&dok_var=1&dok_ext=htm |
| volume_link | (DE-604)BV011602035 |
| work_keys_str_mv | AT setternava electroceramicbasedmemsfabricationtechnologyandapplications AT setternava electroceramicbasedmems |