Kurapov, D. (2005). Structure evolution, properties, and application of alumina films deposited by PECVD. Shaker.
Chicago Style (17th ed.) CitationKurapov, Denis. Structure Evolution, Properties, and Application of Alumina Films Deposited by PECVD. Aachen: Shaker, 2005.
MLA (9th ed.) CitationKurapov, Denis. Structure Evolution, Properties, and Application of Alumina Films Deposited by PECVD. Shaker, 2005.
Warning: These citations may not always be 100% accurate.