High resolution focused ion beams: FIB and its applications ; the physics of liquid metal ion sources and ion optics and their application to focused beam technology
Gespeichert in:
Hauptverfasser: | , , |
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Format: | Buch |
Sprache: | English |
Veröffentlicht: |
New York [u.a.]
Kluwer Academic/Plenum Publ.
2003
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Schlagworte: | |
Online-Zugang: | Table of contents |
Beschreibung: | Includes bibliographical references and index |
Beschreibung: | X, 303 S. Ill., graph. Darst. |
ISBN: | 9780306473500 030647350X |
Internformat
MARC
LEADER | 00000nam a2200000zc 4500 | ||
---|---|---|---|
001 | BV021234267 | ||
003 | DE-604 | ||
005 | 20121001 | ||
007 | t | ||
008 | 051122s2003 xxuad|| |||| 00||| eng d | ||
010 | |a 2002028661 | ||
020 | |a 9780306473500 |9 978-0-306-47350-0 | ||
020 | |a 030647350X |9 0-306-47350-X | ||
035 | |a (OCoLC)633956099 | ||
035 | |a (DE-599)BVBBV021234267 | ||
040 | |a DE-604 |b ger |e aacr | ||
041 | 0 | |a eng | |
044 | |a xxu |c US | ||
049 | |a DE-703 |a DE-91 |a DE-526 |a DE-11 |a DE-91G |a DE-29T |a DE-83 | ||
050 | 0 | |a QC702.7.B65 | |
084 | |a UH 6200 |0 (DE-625)145743: |2 rvk | ||
084 | |a ZN 4176 |0 (DE-625)157369: |2 rvk | ||
084 | |a PHY 323f |2 stub | ||
084 | |a ELT 270f |2 stub | ||
100 | 1 | |a Orloff, Jon |e Verfasser |4 aut | |
245 | 1 | 0 | |a High resolution focused ion beams |b FIB and its applications ; the physics of liquid metal ion sources and ion optics and their application to focused beam technology |c Jon Orloff ; Mark Utlaut and Lynwood Swanson |
264 | 1 | |a New York [u.a.] |b Kluwer Academic/Plenum Publ. |c 2003 | |
300 | |a X, 303 S. |b Ill., graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
500 | |a Includes bibliographical references and index | ||
650 | 4 | |a aFocused ion beams |a xIndustrial applications | |
650 | 4 | |a aIon bombardment |a xIndustrial applications | |
650 | 0 | 7 | |a Fokussierung |0 (DE-588)4154950-8 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Ionenstrahl |0 (DE-588)4162347-2 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Anwendung |0 (DE-588)4196864-5 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Festkörperoberfläche |0 (DE-588)4127823-9 |2 gnd |9 rswk-swf |
689 | 0 | 0 | |a Ionenstrahl |0 (DE-588)4162347-2 |D s |
689 | 0 | 1 | |a Fokussierung |0 (DE-588)4154950-8 |D s |
689 | 0 | |5 DE-604 | |
689 | 1 | 0 | |a Ionenstrahl |0 (DE-588)4162347-2 |D s |
689 | 1 | 1 | |a Festkörperoberfläche |0 (DE-588)4127823-9 |D s |
689 | 1 | 2 | |a Anwendung |0 (DE-588)4196864-5 |D s |
689 | 1 | |5 DE-604 | |
700 | 1 | |a Utlaut, Mark |e Verfasser |4 aut | |
700 | 1 | |a Swanson, Lynwood W. |e Verfasser |4 aut | |
856 | 4 | |u http://www.loc.gov/catdir/toc/fy036/2002028661.html |3 Table of contents | |
999 | |a oai:aleph.bib-bvb.de:BVB01-014277054 |
Datensatz im Suchindex
_version_ | 1804134678094938112 |
---|---|
adam_txt | |
any_adam_object | |
any_adam_object_boolean | |
author | Orloff, Jon Utlaut, Mark Swanson, Lynwood W. |
author_facet | Orloff, Jon Utlaut, Mark Swanson, Lynwood W. |
author_role | aut aut aut |
author_sort | Orloff, Jon |
author_variant | j o jo m u mu l w s lw lws |
building | Verbundindex |
bvnumber | BV021234267 |
callnumber-first | Q - Science |
callnumber-label | QC702 |
callnumber-raw | QC702.7.B65 |
callnumber-search | QC702.7.B65 |
callnumber-sort | QC 3702.7 B65 |
callnumber-subject | QC - Physics |
classification_rvk | UH 6200 ZN 4176 |
classification_tum | PHY 323f ELT 270f |
ctrlnum | (OCoLC)633956099 (DE-599)BVBBV021234267 |
discipline | Physik Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
discipline_str_mv | Physik Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
format | Book |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02144nam a2200553zc 4500</leader><controlfield tag="001">BV021234267</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20121001 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">051122s2003 xxuad|| |||| 00||| eng d</controlfield><datafield tag="010" ind1=" " ind2=" "><subfield code="a">2002028661</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780306473500</subfield><subfield code="9">978-0-306-47350-0</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">030647350X</subfield><subfield code="9">0-306-47350-X</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)633956099</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV021234267</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">xxu</subfield><subfield code="c">US</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield><subfield code="a">DE-91</subfield><subfield code="a">DE-526</subfield><subfield code="a">DE-11</subfield><subfield code="a">DE-91G</subfield><subfield code="a">DE-29T</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">QC702.7.B65</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UH 6200</subfield><subfield code="0">(DE-625)145743:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4176</subfield><subfield code="0">(DE-625)157369:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">PHY 323f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 270f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Orloff, Jon</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">High resolution focused ion beams</subfield><subfield code="b">FIB and its applications ; the physics of liquid metal ion sources and ion optics and their application to focused beam technology</subfield><subfield code="c">Jon Orloff ; Mark Utlaut and Lynwood Swanson</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York [u.a.]</subfield><subfield code="b">Kluwer Academic/Plenum Publ.</subfield><subfield code="c">2003</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">X, 303 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">aFocused ion beams</subfield><subfield code="a">xIndustrial applications</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">aIon bombardment</subfield><subfield code="a">xIndustrial applications</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Fokussierung</subfield><subfield code="0">(DE-588)4154950-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ionenstrahl</subfield><subfield code="0">(DE-588)4162347-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Anwendung</subfield><subfield code="0">(DE-588)4196864-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Festkörperoberfläche</subfield><subfield code="0">(DE-588)4127823-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Ionenstrahl</subfield><subfield code="0">(DE-588)4162347-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Fokussierung</subfield><subfield code="0">(DE-588)4154950-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Ionenstrahl</subfield><subfield code="0">(DE-588)4162347-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="1"><subfield code="a">Festkörperoberfläche</subfield><subfield code="0">(DE-588)4127823-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="2"><subfield code="a">Anwendung</subfield><subfield code="0">(DE-588)4196864-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Utlaut, Mark</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Swanson, Lynwood W.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="856" ind1="4" ind2=" "><subfield code="u">http://www.loc.gov/catdir/toc/fy036/2002028661.html</subfield><subfield code="3">Table of contents</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-014277054</subfield></datafield></record></collection> |
id | DE-604.BV021234267 |
illustrated | Illustrated |
index_date | 2024-07-02T13:29:17Z |
indexdate | 2024-07-09T20:28:25Z |
institution | BVB |
isbn | 9780306473500 030647350X |
language | English |
lccn | 2002028661 |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-014277054 |
oclc_num | 633956099 |
open_access_boolean | |
owner | DE-703 DE-91 DE-BY-TUM DE-526 DE-11 DE-91G DE-BY-TUM DE-29T DE-83 |
owner_facet | DE-703 DE-91 DE-BY-TUM DE-526 DE-11 DE-91G DE-BY-TUM DE-29T DE-83 |
physical | X, 303 S. Ill., graph. Darst. |
publishDate | 2003 |
publishDateSearch | 2003 |
publishDateSort | 2003 |
publisher | Kluwer Academic/Plenum Publ. |
record_format | marc |
spelling | Orloff, Jon Verfasser aut High resolution focused ion beams FIB and its applications ; the physics of liquid metal ion sources and ion optics and their application to focused beam technology Jon Orloff ; Mark Utlaut and Lynwood Swanson New York [u.a.] Kluwer Academic/Plenum Publ. 2003 X, 303 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Includes bibliographical references and index aFocused ion beams xIndustrial applications aIon bombardment xIndustrial applications Fokussierung (DE-588)4154950-8 gnd rswk-swf Ionenstrahl (DE-588)4162347-2 gnd rswk-swf Anwendung (DE-588)4196864-5 gnd rswk-swf Festkörperoberfläche (DE-588)4127823-9 gnd rswk-swf Ionenstrahl (DE-588)4162347-2 s Fokussierung (DE-588)4154950-8 s DE-604 Festkörperoberfläche (DE-588)4127823-9 s Anwendung (DE-588)4196864-5 s Utlaut, Mark Verfasser aut Swanson, Lynwood W. Verfasser aut http://www.loc.gov/catdir/toc/fy036/2002028661.html Table of contents |
spellingShingle | Orloff, Jon Utlaut, Mark Swanson, Lynwood W. High resolution focused ion beams FIB and its applications ; the physics of liquid metal ion sources and ion optics and their application to focused beam technology aFocused ion beams xIndustrial applications aIon bombardment xIndustrial applications Fokussierung (DE-588)4154950-8 gnd Ionenstrahl (DE-588)4162347-2 gnd Anwendung (DE-588)4196864-5 gnd Festkörperoberfläche (DE-588)4127823-9 gnd |
subject_GND | (DE-588)4154950-8 (DE-588)4162347-2 (DE-588)4196864-5 (DE-588)4127823-9 |
title | High resolution focused ion beams FIB and its applications ; the physics of liquid metal ion sources and ion optics and their application to focused beam technology |
title_auth | High resolution focused ion beams FIB and its applications ; the physics of liquid metal ion sources and ion optics and their application to focused beam technology |
title_exact_search | High resolution focused ion beams FIB and its applications ; the physics of liquid metal ion sources and ion optics and their application to focused beam technology |
title_exact_search_txtP | High resolution focused ion beams FIB and its applications ; the physics of liquid metal ion sources and ion optics and their application to focused beam technology |
title_full | High resolution focused ion beams FIB and its applications ; the physics of liquid metal ion sources and ion optics and their application to focused beam technology Jon Orloff ; Mark Utlaut and Lynwood Swanson |
title_fullStr | High resolution focused ion beams FIB and its applications ; the physics of liquid metal ion sources and ion optics and their application to focused beam technology Jon Orloff ; Mark Utlaut and Lynwood Swanson |
title_full_unstemmed | High resolution focused ion beams FIB and its applications ; the physics of liquid metal ion sources and ion optics and their application to focused beam technology Jon Orloff ; Mark Utlaut and Lynwood Swanson |
title_short | High resolution focused ion beams |
title_sort | high resolution focused ion beams fib and its applications the physics of liquid metal ion sources and ion optics and their application to focused beam technology |
title_sub | FIB and its applications ; the physics of liquid metal ion sources and ion optics and their application to focused beam technology |
topic | aFocused ion beams xIndustrial applications aIon bombardment xIndustrial applications Fokussierung (DE-588)4154950-8 gnd Ionenstrahl (DE-588)4162347-2 gnd Anwendung (DE-588)4196864-5 gnd Festkörperoberfläche (DE-588)4127823-9 gnd |
topic_facet | aFocused ion beams xIndustrial applications aIon bombardment xIndustrial applications Fokussierung Ionenstrahl Anwendung Festkörperoberfläche |
url | http://www.loc.gov/catdir/toc/fy036/2002028661.html |
work_keys_str_mv | AT orloffjon highresolutionfocusedionbeamsfibanditsapplicationsthephysicsofliquidmetalionsourcesandionopticsandtheirapplicationtofocusedbeamtechnology AT utlautmark highresolutionfocusedionbeamsfibanditsapplicationsthephysicsofliquidmetalionsourcesandionopticsandtheirapplicationtofocusedbeamtechnology AT swansonlynwoodw highresolutionfocusedionbeamsfibanditsapplicationsthephysicsofliquidmetalionsourcesandionopticsandtheirapplicationtofocusedbeamtechnology |