Dielectric thin films for future ULSI devices: science and technology ; [...papers presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), which was held in Tokyo from May 26 through 28, 2004]
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Tokyo
IPAP
2004
|
| Series: | Japanese journal of applied physics : 1
43,11B : special issue |
| Subjects: | |
| Item Description: | Einzelaufnahme eines Zeitschr.-Heftes |
| Physical Description: | S. 7807 - 7908, 27 S. Ill., graph. Darst. |
Staff View
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV020869593 | ||
| 003 | DE-604 | ||
| 005 | 20051117 | ||
| 007 | t | ||
| 008 | 051115s2004 ad|| |||| 10||| eng d | ||
| 035 | |a (OCoLC)633836097 | ||
| 035 | |a (DE-599)BVBBV020869593 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-384 | ||
| 245 | 1 | 0 | |a Dielectric thin films for future ULSI devices |b science and technology ; [...papers presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), which was held in Tokyo from May 26 through 28, 2004] |c ed. by Kikuo Yamabe ... |
| 264 | 1 | |a Tokyo |b IPAP |c 2004 | |
| 300 | |a S. 7807 - 7908, 27 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Japanese journal of applied physics : 1 |v 43,11B : special issue | |
| 500 | |a Einzelaufnahme eines Zeitschr.-Heftes | ||
| 650 | 0 | 7 | |a ULSI |0 (DE-588)4226286-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Dielektrische Schicht |0 (DE-588)4194257-7 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 689 | 0 | 0 | |a ULSI |0 (DE-588)4226286-0 |D s |
| 689 | 0 | 1 | |a Dielektrische Schicht |0 (DE-588)4194257-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Yamabe, Kikuo |e Sonstige |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-014191358 | ||
Record in the Search Index
| _version_ | 1804134594958589953 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| building | Verbundindex |
| bvnumber | BV020869593 |
| ctrlnum | (OCoLC)633836097 (DE-599)BVBBV020869593 |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01359nam a2200337 cb4500</leader><controlfield tag="001">BV020869593</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20051117 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">051115s2004 ad|| |||| 10||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)633836097</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV020869593</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-384</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Dielectric thin films for future ULSI devices</subfield><subfield code="b">science and technology ; [...papers presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), which was held in Tokyo from May 26 through 28, 2004]</subfield><subfield code="c">ed. by Kikuo Yamabe ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Tokyo</subfield><subfield code="b">IPAP</subfield><subfield code="c">2004</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">S. 7807 - 7908, 27 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Japanese journal of applied physics : 1</subfield><subfield code="v">43,11B : special issue</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Einzelaufnahme eines Zeitschr.-Heftes</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">ULSI</subfield><subfield code="0">(DE-588)4226286-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dielektrische Schicht</subfield><subfield code="0">(DE-588)4194257-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">ULSI</subfield><subfield code="0">(DE-588)4226286-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Dielektrische Schicht</subfield><subfield code="0">(DE-588)4194257-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Yamabe, Kikuo</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-014191358</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV020869593 |
| illustrated | Illustrated |
| index_date | 2024-07-02T13:25:40Z |
| indexdate | 2024-07-09T20:27:06Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-014191358 |
| oclc_num | 633836097 |
| open_access_boolean | |
| owner | DE-384 |
| owner_facet | DE-384 |
| physical | S. 7807 - 7908, 27 S. Ill., graph. Darst. |
| publishDate | 2004 |
| publishDateSearch | 2004 |
| publishDateSort | 2004 |
| publisher | IPAP |
| record_format | marc |
| series2 | Japanese journal of applied physics : 1 |
| spelling | Dielectric thin films for future ULSI devices science and technology ; [...papers presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), which was held in Tokyo from May 26 through 28, 2004] ed. by Kikuo Yamabe ... Tokyo IPAP 2004 S. 7807 - 7908, 27 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Japanese journal of applied physics : 1 43,11B : special issue Einzelaufnahme eines Zeitschr.-Heftes ULSI (DE-588)4226286-0 gnd rswk-swf Dielektrische Schicht (DE-588)4194257-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content ULSI (DE-588)4226286-0 s Dielektrische Schicht (DE-588)4194257-7 s DE-604 Yamabe, Kikuo Sonstige oth |
| spellingShingle | Dielectric thin films for future ULSI devices science and technology ; [...papers presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), which was held in Tokyo from May 26 through 28, 2004] ULSI (DE-588)4226286-0 gnd Dielektrische Schicht (DE-588)4194257-7 gnd |
| subject_GND | (DE-588)4226286-0 (DE-588)4194257-7 (DE-588)1071861417 |
| title | Dielectric thin films for future ULSI devices science and technology ; [...papers presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), which was held in Tokyo from May 26 through 28, 2004] |
| title_auth | Dielectric thin films for future ULSI devices science and technology ; [...papers presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), which was held in Tokyo from May 26 through 28, 2004] |
| title_exact_search | Dielectric thin films for future ULSI devices science and technology ; [...papers presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), which was held in Tokyo from May 26 through 28, 2004] |
| title_exact_search_txtP | Dielectric thin films for future ULSI devices science and technology ; [...papers presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), which was held in Tokyo from May 26 through 28, 2004] |
| title_full | Dielectric thin films for future ULSI devices science and technology ; [...papers presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), which was held in Tokyo from May 26 through 28, 2004] ed. by Kikuo Yamabe ... |
| title_fullStr | Dielectric thin films for future ULSI devices science and technology ; [...papers presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), which was held in Tokyo from May 26 through 28, 2004] ed. by Kikuo Yamabe ... |
| title_full_unstemmed | Dielectric thin films for future ULSI devices science and technology ; [...papers presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), which was held in Tokyo from May 26 through 28, 2004] ed. by Kikuo Yamabe ... |
| title_short | Dielectric thin films for future ULSI devices |
| title_sort | dielectric thin films for future ulsi devices science and technology papers presented at the 2004 international workshop on dielectric thin films for future ulsi devices science and technology iwdtf 4 which was held in tokyo from may 26 through 28 2004 |
| title_sub | science and technology ; [...papers presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), which was held in Tokyo from May 26 through 28, 2004] |
| topic | ULSI (DE-588)4226286-0 gnd Dielektrische Schicht (DE-588)4194257-7 gnd |
| topic_facet | ULSI Dielektrische Schicht Konferenzschrift |
| work_keys_str_mv | AT yamabekikuo dielectricthinfilmsforfutureulsidevicesscienceandtechnologypaperspresentedatthe2004internationalworkshopondielectricthinfilmsforfutureulsidevicesscienceandtechnologyiwdtf4whichwasheldintokyofrommay26through282004 |