Dielectric thin films for future ULSI devices: science and technology ; [...papers presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), which was held in Tokyo from May 26 through 28, 2004]
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Tokyo
IPAP
2004
|
| Schriftenreihe: | Japanese journal of applied physics : 1
43,11B : special issue |
| Schlagworte: | |
| Beschreibung: | Einzelaufnahme eines Zeitschr.-Heftes |
| Beschreibung: | S. 7807 - 7908, 27 S. Ill., graph. Darst. |
Internformat
MARC
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| 245 | 1 | 0 | |a Dielectric thin films for future ULSI devices |b science and technology ; [...papers presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), which was held in Tokyo from May 26 through 28, 2004] |c ed. by Kikuo Yamabe ... |
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| 490 | 0 | |a Japanese journal of applied physics : 1 |v 43,11B : special issue | |
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| 700 | 1 | |a Yamabe, Kikuo |e Sonstige |4 oth | |
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Datensatz im Suchindex
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| index_date | 2024-07-02T13:25:40Z |
| indexdate | 2024-07-09T20:27:06Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-014191358 |
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| physical | S. 7807 - 7908, 27 S. Ill., graph. Darst. |
| publishDate | 2004 |
| publishDateSearch | 2004 |
| publishDateSort | 2004 |
| publisher | IPAP |
| record_format | marc |
| series2 | Japanese journal of applied physics : 1 |
| spelling | Dielectric thin films for future ULSI devices science and technology ; [...papers presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), which was held in Tokyo from May 26 through 28, 2004] ed. by Kikuo Yamabe ... Tokyo IPAP 2004 S. 7807 - 7908, 27 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Japanese journal of applied physics : 1 43,11B : special issue Einzelaufnahme eines Zeitschr.-Heftes ULSI (DE-588)4226286-0 gnd rswk-swf Dielektrische Schicht (DE-588)4194257-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content ULSI (DE-588)4226286-0 s Dielektrische Schicht (DE-588)4194257-7 s DE-604 Yamabe, Kikuo Sonstige oth |
| spellingShingle | Dielectric thin films for future ULSI devices science and technology ; [...papers presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), which was held in Tokyo from May 26 through 28, 2004] ULSI (DE-588)4226286-0 gnd Dielektrische Schicht (DE-588)4194257-7 gnd |
| subject_GND | (DE-588)4226286-0 (DE-588)4194257-7 (DE-588)1071861417 |
| title | Dielectric thin films for future ULSI devices science and technology ; [...papers presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), which was held in Tokyo from May 26 through 28, 2004] |
| title_auth | Dielectric thin films for future ULSI devices science and technology ; [...papers presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), which was held in Tokyo from May 26 through 28, 2004] |
| title_exact_search | Dielectric thin films for future ULSI devices science and technology ; [...papers presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), which was held in Tokyo from May 26 through 28, 2004] |
| title_exact_search_txtP | Dielectric thin films for future ULSI devices science and technology ; [...papers presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), which was held in Tokyo from May 26 through 28, 2004] |
| title_full | Dielectric thin films for future ULSI devices science and technology ; [...papers presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), which was held in Tokyo from May 26 through 28, 2004] ed. by Kikuo Yamabe ... |
| title_fullStr | Dielectric thin films for future ULSI devices science and technology ; [...papers presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), which was held in Tokyo from May 26 through 28, 2004] ed. by Kikuo Yamabe ... |
| title_full_unstemmed | Dielectric thin films for future ULSI devices science and technology ; [...papers presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), which was held in Tokyo from May 26 through 28, 2004] ed. by Kikuo Yamabe ... |
| title_short | Dielectric thin films for future ULSI devices |
| title_sort | dielectric thin films for future ulsi devices science and technology papers presented at the 2004 international workshop on dielectric thin films for future ulsi devices science and technology iwdtf 4 which was held in tokyo from may 26 through 28 2004 |
| title_sub | science and technology ; [...papers presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), which was held in Tokyo from May 26 through 28, 2004] |
| topic | ULSI (DE-588)4226286-0 gnd Dielektrische Schicht (DE-588)4194257-7 gnd |
| topic_facet | ULSI Dielektrische Schicht Konferenzschrift |
| work_keys_str_mv | AT yamabekikuo dielectricthinfilmsforfutureulsidevicesscienceandtechnologypaperspresentedatthe2004internationalworkshopondielectricthinfilmsforfutureulsidevicesscienceandtechnologyiwdtf4whichwasheldintokyofrommay26through282004 |