(2004). Dielectric thin films for future ULSI devices: Science and technology ; [...papers presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), which was held in Tokyo from May 26 through 28, 2004]. IPAP.
Chicago-Zitierstil (17. Ausg.)Dielectric Thin Films for Future ULSI Devices: Science and Technology ; [...papers Presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), Which Was Held in Tokyo from May 26 Through 28, 2004]. Tokyo: IPAP, 2004.
MLA-Zitierstil (9. Ausg.)Dielectric Thin Films for Future ULSI Devices: Science and Technology ; [...papers Presented at the 2004 International Workshop on "Dielectric Thin Films for Future ULSI Devices: Science and Technology" (IWDTF-4), Which Was Held in Tokyo from May 26 Through 28, 2004]. IPAP, 2004.