Microfabrication and nanomanufacturing:
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
New York
CRC
2006
London Taylor & Francis |
| Subjects: | |
| Item Description: | Includes bibliographical references and index |
| Physical Description: | 401 S. graph. Darst. |
| ISBN: | 0824724313 9780824724313 |
Staff View
MARC
| LEADER | 00000nam a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV020868230 | ||
| 003 | DE-604 | ||
| 005 | 20060519 | ||
| 007 | t | ||
| 008 | 051114s2006 xxud||| |||| 00||| eng d | ||
| 010 | |a 2005049275 | ||
| 020 | |a 0824724313 |9 0-8247-2431-3 | ||
| 020 | |a 9780824724313 |9 978-0-8247-2431-3 | ||
| 035 | |a (OCoLC)60664422 | ||
| 035 | |a (DE-599)BVBBV020868230 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 044 | |a xxu |c US | ||
| 049 | |a DE-703 |a DE-11 |a DE-29T | ||
| 050 | 0 | |a TK7836 | |
| 082 | 0 | |a 620/.5 |2 22 | |
| 084 | |a ZN 3750 |0 (DE-625)157334: |2 rvk | ||
| 084 | |a ZN 4100 |0 (DE-625)157351: |2 rvk | ||
| 245 | 1 | 0 | |a Microfabrication and nanomanufacturing |c ed. by Mark J. Jackson |
| 264 | 1 | |a New York |b CRC |c 2006 | |
| 264 | 1 | |a London |b Taylor & Francis | |
| 300 | |a 401 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Includes bibliographical references and index | ||
| 650 | 7 | |a Etsen |2 gtt | |
| 650 | 7 | |a Micro-elektronica |2 gtt | |
| 650 | 7 | |a Microstructuur |2 gtt | |
| 650 | 7 | |a Nanokristallijne materialen |2 gtt | |
| 650 | 7 | |a Nanotechnologie |2 gtt | |
| 650 | 7 | |a Polijsten |2 gtt | |
| 650 | 7 | |a Slijpen |2 gtt | |
| 650 | 4 | |a Microelectronics | |
| 650 | 4 | |a Integrated circuits |x Design and construction | |
| 650 | 4 | |a Microelectromechanical systems |x Design and construction | |
| 650 | 0 | 7 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Nanotechnologie |0 (DE-588)4327470-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikrobearbeitung |0 (DE-588)4582923-8 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4143413-4 |a Aufsatzsammlung |2 gnd-content | |
| 689 | 0 | 0 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |D s |
| 689 | 0 | 1 | |a Nanotechnologie |0 (DE-588)4327470-5 |D s |
| 689 | 0 | 2 | |a Mikrobearbeitung |0 (DE-588)4582923-8 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Jackson, Mark J. |e Sonstige |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-014190020 | ||
Record in the Search Index
| _version_ | 1804134592650674176 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| building | Verbundindex |
| bvnumber | BV020868230 |
| callnumber-first | T - Technology |
| callnumber-label | TK7836 |
| callnumber-raw | TK7836 |
| callnumber-search | TK7836 |
| callnumber-sort | TK 47836 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 3750 ZN 4100 |
| ctrlnum | (OCoLC)60664422 (DE-599)BVBBV020868230 |
| dewey-full | 620/.5 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620/.5 |
| dewey-search | 620/.5 |
| dewey-sort | 3620 15 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01929nam a2200577zc 4500</leader><controlfield tag="001">BV020868230</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20060519 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">051114s2006 xxud||| |||| 00||| eng d</controlfield><datafield tag="010" ind1=" " ind2=" "><subfield code="a">2005049275</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0824724313</subfield><subfield code="9">0-8247-2431-3</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780824724313</subfield><subfield code="9">978-0-8247-2431-3</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)60664422</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV020868230</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">xxu</subfield><subfield code="c">US</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield><subfield code="a">DE-11</subfield><subfield code="a">DE-29T</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7836</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">620/.5</subfield><subfield code="2">22</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 3750</subfield><subfield code="0">(DE-625)157334:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4100</subfield><subfield code="0">(DE-625)157351:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Microfabrication and nanomanufacturing</subfield><subfield code="c">ed. by Mark J. Jackson</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York</subfield><subfield code="b">CRC</subfield><subfield code="c">2006</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">London</subfield><subfield code="b">Taylor & Francis</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">401 S.</subfield><subfield code="b">graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Etsen</subfield><subfield code="2">gtt</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Micro-elektronica</subfield><subfield code="2">gtt</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Microstructuur</subfield><subfield code="2">gtt</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Nanokristallijne materialen</subfield><subfield code="2">gtt</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Nanotechnologie</subfield><subfield code="2">gtt</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Polijsten</subfield><subfield code="2">gtt</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Slijpen</subfield><subfield code="2">gtt</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectronics</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Integrated circuits</subfield><subfield code="x">Design and construction</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectromechanical systems</subfield><subfield code="x">Design and construction</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikrosystemtechnik</subfield><subfield code="0">(DE-588)4221617-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Nanotechnologie</subfield><subfield code="0">(DE-588)4327470-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikrobearbeitung</subfield><subfield code="0">(DE-588)4582923-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4143413-4</subfield><subfield code="a">Aufsatzsammlung</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Mikrosystemtechnik</subfield><subfield code="0">(DE-588)4221617-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Nanotechnologie</subfield><subfield code="0">(DE-588)4327470-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Mikrobearbeitung</subfield><subfield code="0">(DE-588)4582923-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Jackson, Mark J.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-014190020</subfield></datafield></record></collection> |
| genre | (DE-588)4143413-4 Aufsatzsammlung gnd-content |
| genre_facet | Aufsatzsammlung |
| id | DE-604.BV020868230 |
| illustrated | Illustrated |
| index_date | 2024-07-02T13:25:10Z |
| indexdate | 2024-07-09T20:27:04Z |
| institution | BVB |
| isbn | 0824724313 9780824724313 |
| language | English |
| lccn | 2005049275 |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-014190020 |
| oclc_num | 60664422 |
| open_access_boolean | |
| owner | DE-703 DE-11 DE-29T |
| owner_facet | DE-703 DE-11 DE-29T |
| physical | 401 S. graph. Darst. |
| publishDate | 2006 |
| publishDateSearch | 2006 |
| publishDateSort | 2006 |
| publisher | CRC Taylor & Francis |
| record_format | marc |
| spelling | Microfabrication and nanomanufacturing ed. by Mark J. Jackson New York CRC 2006 London Taylor & Francis 401 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Includes bibliographical references and index Etsen gtt Micro-elektronica gtt Microstructuur gtt Nanokristallijne materialen gtt Nanotechnologie gtt Polijsten gtt Slijpen gtt Microelectronics Integrated circuits Design and construction Microelectromechanical systems Design and construction Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Mikrobearbeitung (DE-588)4582923-8 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Mikrosystemtechnik (DE-588)4221617-5 s Nanotechnologie (DE-588)4327470-5 s Mikrobearbeitung (DE-588)4582923-8 s DE-604 Jackson, Mark J. Sonstige oth |
| spellingShingle | Microfabrication and nanomanufacturing Etsen gtt Micro-elektronica gtt Microstructuur gtt Nanokristallijne materialen gtt Nanotechnologie gtt Polijsten gtt Slijpen gtt Microelectronics Integrated circuits Design and construction Microelectromechanical systems Design and construction Mikrosystemtechnik (DE-588)4221617-5 gnd Nanotechnologie (DE-588)4327470-5 gnd Mikrobearbeitung (DE-588)4582923-8 gnd |
| subject_GND | (DE-588)4221617-5 (DE-588)4327470-5 (DE-588)4582923-8 (DE-588)4143413-4 |
| title | Microfabrication and nanomanufacturing |
| title_auth | Microfabrication and nanomanufacturing |
| title_exact_search | Microfabrication and nanomanufacturing |
| title_exact_search_txtP | Microfabrication and nanomanufacturing |
| title_full | Microfabrication and nanomanufacturing ed. by Mark J. Jackson |
| title_fullStr | Microfabrication and nanomanufacturing ed. by Mark J. Jackson |
| title_full_unstemmed | Microfabrication and nanomanufacturing ed. by Mark J. Jackson |
| title_short | Microfabrication and nanomanufacturing |
| title_sort | microfabrication and nanomanufacturing |
| topic | Etsen gtt Micro-elektronica gtt Microstructuur gtt Nanokristallijne materialen gtt Nanotechnologie gtt Polijsten gtt Slijpen gtt Microelectronics Integrated circuits Design and construction Microelectromechanical systems Design and construction Mikrosystemtechnik (DE-588)4221617-5 gnd Nanotechnologie (DE-588)4327470-5 gnd Mikrobearbeitung (DE-588)4582923-8 gnd |
| topic_facet | Etsen Micro-elektronica Microstructuur Nanokristallijne materialen Nanotechnologie Polijsten Slijpen Microelectronics Integrated circuits Design and construction Microelectromechanical systems Design and construction Mikrosystemtechnik Mikrobearbeitung Aufsatzsammlung |
| work_keys_str_mv | AT jacksonmarkj microfabricationandnanomanufacturing |