Microfabrication and nanomanufacturing:
Gespeichert in:
Format: | Buch |
---|---|
Sprache: | English |
Veröffentlicht: |
New York
CRC
2006
London Taylor & Francis |
Schlagworte: | |
Beschreibung: | Includes bibliographical references and index |
Beschreibung: | 401 S. graph. Darst. |
ISBN: | 0824724313 9780824724313 |
Internformat
MARC
LEADER | 00000nam a2200000zc 4500 | ||
---|---|---|---|
001 | BV020868230 | ||
003 | DE-604 | ||
005 | 20060519 | ||
007 | t | ||
008 | 051114s2006 xxud||| |||| 00||| eng d | ||
010 | |a 2005049275 | ||
020 | |a 0824724313 |9 0-8247-2431-3 | ||
020 | |a 9780824724313 |9 978-0-8247-2431-3 | ||
035 | |a (OCoLC)60664422 | ||
035 | |a (DE-599)BVBBV020868230 | ||
040 | |a DE-604 |b ger |e aacr | ||
041 | 0 | |a eng | |
044 | |a xxu |c US | ||
049 | |a DE-703 |a DE-11 |a DE-29T | ||
050 | 0 | |a TK7836 | |
082 | 0 | |a 620/.5 |2 22 | |
084 | |a ZN 3750 |0 (DE-625)157334: |2 rvk | ||
084 | |a ZN 4100 |0 (DE-625)157351: |2 rvk | ||
245 | 1 | 0 | |a Microfabrication and nanomanufacturing |c ed. by Mark J. Jackson |
264 | 1 | |a New York |b CRC |c 2006 | |
264 | 1 | |a London |b Taylor & Francis | |
300 | |a 401 S. |b graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
500 | |a Includes bibliographical references and index | ||
650 | 7 | |a Etsen |2 gtt | |
650 | 7 | |a Micro-elektronica |2 gtt | |
650 | 7 | |a Microstructuur |2 gtt | |
650 | 7 | |a Nanokristallijne materialen |2 gtt | |
650 | 7 | |a Nanotechnologie |2 gtt | |
650 | 7 | |a Polijsten |2 gtt | |
650 | 7 | |a Slijpen |2 gtt | |
650 | 4 | |a Microelectronics | |
650 | 4 | |a Integrated circuits |x Design and construction | |
650 | 4 | |a Microelectromechanical systems |x Design and construction | |
650 | 0 | 7 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Nanotechnologie |0 (DE-588)4327470-5 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Mikrobearbeitung |0 (DE-588)4582923-8 |2 gnd |9 rswk-swf |
655 | 7 | |0 (DE-588)4143413-4 |a Aufsatzsammlung |2 gnd-content | |
689 | 0 | 0 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |D s |
689 | 0 | 1 | |a Nanotechnologie |0 (DE-588)4327470-5 |D s |
689 | 0 | 2 | |a Mikrobearbeitung |0 (DE-588)4582923-8 |D s |
689 | 0 | |5 DE-604 | |
700 | 1 | |a Jackson, Mark J. |e Sonstige |4 oth | |
999 | |a oai:aleph.bib-bvb.de:BVB01-014190020 |
Datensatz im Suchindex
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---|---|
adam_txt | |
any_adam_object | |
any_adam_object_boolean | |
building | Verbundindex |
bvnumber | BV020868230 |
callnumber-first | T - Technology |
callnumber-label | TK7836 |
callnumber-raw | TK7836 |
callnumber-search | TK7836 |
callnumber-sort | TK 47836 |
callnumber-subject | TK - Electrical and Nuclear Engineering |
classification_rvk | ZN 3750 ZN 4100 |
ctrlnum | (OCoLC)60664422 (DE-599)BVBBV020868230 |
dewey-full | 620/.5 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 620 - Engineering and allied operations |
dewey-raw | 620/.5 |
dewey-search | 620/.5 |
dewey-sort | 3620 15 |
dewey-tens | 620 - Engineering and allied operations |
discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
discipline_str_mv | Elektrotechnik / Elektronik / Nachrichtentechnik |
format | Book |
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genre_facet | Aufsatzsammlung |
id | DE-604.BV020868230 |
illustrated | Illustrated |
index_date | 2024-07-02T13:25:10Z |
indexdate | 2024-07-09T20:27:04Z |
institution | BVB |
isbn | 0824724313 9780824724313 |
language | English |
lccn | 2005049275 |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-014190020 |
oclc_num | 60664422 |
open_access_boolean | |
owner | DE-703 DE-11 DE-29T |
owner_facet | DE-703 DE-11 DE-29T |
physical | 401 S. graph. Darst. |
publishDate | 2006 |
publishDateSearch | 2006 |
publishDateSort | 2006 |
publisher | CRC Taylor & Francis |
record_format | marc |
spelling | Microfabrication and nanomanufacturing ed. by Mark J. Jackson New York CRC 2006 London Taylor & Francis 401 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Includes bibliographical references and index Etsen gtt Micro-elektronica gtt Microstructuur gtt Nanokristallijne materialen gtt Nanotechnologie gtt Polijsten gtt Slijpen gtt Microelectronics Integrated circuits Design and construction Microelectromechanical systems Design and construction Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Mikrobearbeitung (DE-588)4582923-8 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Mikrosystemtechnik (DE-588)4221617-5 s Nanotechnologie (DE-588)4327470-5 s Mikrobearbeitung (DE-588)4582923-8 s DE-604 Jackson, Mark J. Sonstige oth |
spellingShingle | Microfabrication and nanomanufacturing Etsen gtt Micro-elektronica gtt Microstructuur gtt Nanokristallijne materialen gtt Nanotechnologie gtt Polijsten gtt Slijpen gtt Microelectronics Integrated circuits Design and construction Microelectromechanical systems Design and construction Mikrosystemtechnik (DE-588)4221617-5 gnd Nanotechnologie (DE-588)4327470-5 gnd Mikrobearbeitung (DE-588)4582923-8 gnd |
subject_GND | (DE-588)4221617-5 (DE-588)4327470-5 (DE-588)4582923-8 (DE-588)4143413-4 |
title | Microfabrication and nanomanufacturing |
title_auth | Microfabrication and nanomanufacturing |
title_exact_search | Microfabrication and nanomanufacturing |
title_exact_search_txtP | Microfabrication and nanomanufacturing |
title_full | Microfabrication and nanomanufacturing ed. by Mark J. Jackson |
title_fullStr | Microfabrication and nanomanufacturing ed. by Mark J. Jackson |
title_full_unstemmed | Microfabrication and nanomanufacturing ed. by Mark J. Jackson |
title_short | Microfabrication and nanomanufacturing |
title_sort | microfabrication and nanomanufacturing |
topic | Etsen gtt Micro-elektronica gtt Microstructuur gtt Nanokristallijne materialen gtt Nanotechnologie gtt Polijsten gtt Slijpen gtt Microelectronics Integrated circuits Design and construction Microelectromechanical systems Design and construction Mikrosystemtechnik (DE-588)4221617-5 gnd Nanotechnologie (DE-588)4327470-5 gnd Mikrobearbeitung (DE-588)4582923-8 gnd |
topic_facet | Etsen Micro-elektronica Microstructuur Nanokristallijne materialen Nanotechnologie Polijsten Slijpen Microelectronics Integrated circuits Design and construction Microelectromechanical systems Design and construction Mikrosystemtechnik Mikrobearbeitung Aufsatzsammlung |
work_keys_str_mv | AT jacksonmarkj microfabricationandnanomanufacturing |