Enabling technology for MEMS and nanodevices:
Saved in:
| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Weinheim [u.a.]
Wiley-VCH
2005
|
| Edition: | [Nachdr.] |
| Series: | Advanced micro & nanosystems
1 |
| Subjects: | |
| Physical Description: | XII, 427 S. Ill., graph. Darst. |
| ISBN: | 352730746X |
Staff View
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Record in the Search Index
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| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620.5 |
| dewey-search | 620.5 |
| dewey-sort | 3620.5 |
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | [Nachdr.] |
| format | Book |
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| id | DE-604.BV020820260 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T20:14:02Z |
| institution | BVB |
| isbn | 352730746X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-013525640 |
| oclc_num | 255756270 |
| open_access_boolean | |
| owner | DE-573 |
| owner_facet | DE-573 |
| physical | XII, 427 S. Ill., graph. Darst. |
| publishDate | 2005 |
| publishDateSearch | 2005 |
| publishDateSort | 2005 |
| publisher | Wiley-VCH |
| record_format | marc |
| series | Advanced micro & nanosystems |
| series2 | Advanced micro & nanosystems |
| spelling | Enabling technology for MEMS and nanodevices ed. by H. Baltes ... [Nachdr.] Weinheim [u.a.] Wiley-VCH 2005 XII, 427 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Advanced micro & nanosystems 1 Mikromechanik - Aufsatzsammlung Nanotechnologie - Aufsatzsammlung Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 s DE-604 Mikrosystemtechnik (DE-588)4221617-5 s Baltes, Henry edt Advanced micro & nanosystems 1 (DE-604)BV019371555 1 |
| spellingShingle | Enabling technology for MEMS and nanodevices Advanced micro & nanosystems Mikromechanik - Aufsatzsammlung Nanotechnologie - Aufsatzsammlung Mikrosystemtechnik (DE-588)4221617-5 gnd Nanotechnologie (DE-588)4327470-5 gnd |
| subject_GND | (DE-588)4221617-5 (DE-588)4327470-5 |
| title | Enabling technology for MEMS and nanodevices |
| title_auth | Enabling technology for MEMS and nanodevices |
| title_exact_search | Enabling technology for MEMS and nanodevices |
| title_full | Enabling technology for MEMS and nanodevices ed. by H. Baltes ... |
| title_fullStr | Enabling technology for MEMS and nanodevices ed. by H. Baltes ... |
| title_full_unstemmed | Enabling technology for MEMS and nanodevices ed. by H. Baltes ... |
| title_short | Enabling technology for MEMS and nanodevices |
| title_sort | enabling technology for mems and nanodevices |
| topic | Mikromechanik - Aufsatzsammlung Nanotechnologie - Aufsatzsammlung Mikrosystemtechnik (DE-588)4221617-5 gnd Nanotechnologie (DE-588)4327470-5 gnd |
| topic_facet | Mikromechanik - Aufsatzsammlung Nanotechnologie - Aufsatzsammlung Mikrosystemtechnik Nanotechnologie |
| volume_link | (DE-604)BV019371555 |
| work_keys_str_mv | AT balteshenry enablingtechnologyformemsandnanodevices |