Tribology in chemical mechanical planarization:
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Boca Raton [u.a.]
Taylor & Francis
2005
|
| Schlagworte: | |
| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | 185 S. Ill., graph. Darst. |
| ISBN: | 0824725670 |
Internformat
MARC
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|---|---|---|---|
| 001 | BV019992818 | ||
| 003 | DE-604 | ||
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| 008 | 050809s2005 xxuad|| |||| 00||| eng d | ||
| 010 | |a 2004058221 | ||
| 020 | |a 0824725670 |c alk. paper |9 0-8247-2567-0 | ||
| 035 | |a (OCoLC)56419342 | ||
| 035 | |a (DE-599)BVBBV019992818 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 044 | |a xxu |c US | ||
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| 050 | 0 | |a TJ1075 | |
| 082 | 0 | |a 621.9/2 |2 22 | |
| 084 | |a ZL 3750 |0 (DE-625)159830: |2 rvk | ||
| 100 | 1 | |a Liang, Hong |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Tribology in chemical mechanical planarization |c Hong Liang, David Craven |
| 264 | 1 | |a Boca Raton [u.a.] |b Taylor & Francis |c 2005 | |
| 300 | |a 185 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Includes bibliographical references and index | ||
| 650 | 4 | |a Tribology | |
| 650 | 4 | |a Grinding and polishing | |
| 650 | 0 | 7 | |a Tribologie |0 (DE-588)4060847-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Schleifen |0 (DE-588)4128669-8 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Tribologie |0 (DE-588)4060847-5 |D s |
| 689 | 0 | 1 | |a Schleifen |0 (DE-588)4128669-8 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Craven, David |e Verfasser |4 aut | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-013314679 | ||
Datensatz im Suchindex
| _version_ | 1804133539791241216 |
|---|---|
| any_adam_object | |
| author | Liang, Hong Craven, David |
| author_facet | Liang, Hong Craven, David |
| author_role | aut aut |
| author_sort | Liang, Hong |
| author_variant | h l hl d c dc |
| building | Verbundindex |
| bvnumber | BV019992818 |
| callnumber-first | T - Technology |
| callnumber-label | TJ1075 |
| callnumber-raw | TJ1075 |
| callnumber-search | TJ1075 |
| callnumber-sort | TJ 41075 |
| callnumber-subject | TJ - Mechanical Engineering and Machinery |
| classification_rvk | ZL 3750 |
| ctrlnum | (OCoLC)56419342 (DE-599)BVBBV019992818 |
| dewey-full | 621.9/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.9/2 |
| dewey-search | 621.9/2 |
| dewey-sort | 3621.9 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Maschinenbau / Maschinenwesen Werkstoffwissenschaften / Fertigungstechnik |
| format | Book |
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| id | DE-604.BV019992818 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T20:10:20Z |
| institution | BVB |
| isbn | 0824725670 |
| language | English |
| lccn | 2004058221 |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-013314679 |
| oclc_num | 56419342 |
| open_access_boolean | |
| owner | DE-703 |
| owner_facet | DE-703 |
| physical | 185 S. Ill., graph. Darst. |
| publishDate | 2005 |
| publishDateSearch | 2005 |
| publishDateSort | 2005 |
| publisher | Taylor & Francis |
| record_format | marc |
| spelling | Liang, Hong Verfasser aut Tribology in chemical mechanical planarization Hong Liang, David Craven Boca Raton [u.a.] Taylor & Francis 2005 185 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Includes bibliographical references and index Tribology Grinding and polishing Tribologie (DE-588)4060847-5 gnd rswk-swf Schleifen (DE-588)4128669-8 gnd rswk-swf Tribologie (DE-588)4060847-5 s Schleifen (DE-588)4128669-8 s DE-604 Craven, David Verfasser aut |
| spellingShingle | Liang, Hong Craven, David Tribology in chemical mechanical planarization Tribology Grinding and polishing Tribologie (DE-588)4060847-5 gnd Schleifen (DE-588)4128669-8 gnd |
| subject_GND | (DE-588)4060847-5 (DE-588)4128669-8 |
| title | Tribology in chemical mechanical planarization |
| title_auth | Tribology in chemical mechanical planarization |
| title_exact_search | Tribology in chemical mechanical planarization |
| title_full | Tribology in chemical mechanical planarization Hong Liang, David Craven |
| title_fullStr | Tribology in chemical mechanical planarization Hong Liang, David Craven |
| title_full_unstemmed | Tribology in chemical mechanical planarization Hong Liang, David Craven |
| title_short | Tribology in chemical mechanical planarization |
| title_sort | tribology in chemical mechanical planarization |
| topic | Tribology Grinding and polishing Tribologie (DE-588)4060847-5 gnd Schleifen (DE-588)4128669-8 gnd |
| topic_facet | Tribology Grinding and polishing Tribologie Schleifen |
| work_keys_str_mv | AT lianghong tribologyinchemicalmechanicalplanarization AT cravendavid tribologyinchemicalmechanicalplanarization |