Modellierung und Simulation orientierungsabhängiger Ätzprozesse in Silizium:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | German |
| Veröffentlicht: |
2005
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| Schlagworte: | |
| Online-Zugang: | Volltext https://nbn-resolving.org/urn:nbn:de:bvb:91-diss20050707-2154450098 |
| Beschreibung: | München, Techn. Univ., Diss., 2005 |
| Beschreibung: | 1 Online-Ressource |
Internformat
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Datensatz im Suchindex
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|---|---|
| any_adam_object | |
| author | Horn, Anton |
| author_facet | Horn, Anton |
| author_role | aut |
| author_sort | Horn, Anton |
| author_variant | a h ah |
| building | Verbundindex |
| bvnumber | BV019878201 |
| classification_tum | ELT 035d ELT 285d |
| collection | ebook |
| ctrlnum | (OCoLC)615148105 (DE-599)BVBBV019878201 |
| dewey-full | 621.381531 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381531 |
| dewey-search | 621.381531 |
| dewey-sort | 3621.381531 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| illustrated | Not Illustrated |
| indexdate | 2024-07-09T20:08:12Z |
| institution | BVB |
| language | German |
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| spelling | Horn, Anton Verfasser aut Modellierung und Simulation orientierungsabhängiger Ätzprozesse in Silizium Anton Horn 2005 1 Online-Ressource txt rdacontent c rdamedia cr rdacarrier München, Techn. Univ., Diss., 2005 CAD (DE-588)4069794-0 gnd rswk-swf Mikrostruktur (DE-588)4131028-7 gnd rswk-swf Numerisches Modell (DE-588)4338132-7 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf Dimension 3 (DE-588)4321722-9 gnd rswk-swf Nassätzen (DE-588)4332374-1 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Silicium (DE-588)4077445-4 s Nassätzen (DE-588)4332374-1 s Mikrostruktur (DE-588)4131028-7 s Dimension 3 (DE-588)4321722-9 s Numerisches Modell (DE-588)4338132-7 s CAD (DE-588)4069794-0 s DE-604 https://mediatum.ub.tum.de/doc/601618/601618.pdf Verlag kostenfrei Volltext https://nbn-resolving.org/urn:nbn:de:bvb:91-diss20050707-2154450098 Resolving-System |
| spellingShingle | Horn, Anton Modellierung und Simulation orientierungsabhängiger Ätzprozesse in Silizium CAD (DE-588)4069794-0 gnd Mikrostruktur (DE-588)4131028-7 gnd Numerisches Modell (DE-588)4338132-7 gnd Silicium (DE-588)4077445-4 gnd Dimension 3 (DE-588)4321722-9 gnd Nassätzen (DE-588)4332374-1 gnd |
| subject_GND | (DE-588)4069794-0 (DE-588)4131028-7 (DE-588)4338132-7 (DE-588)4077445-4 (DE-588)4321722-9 (DE-588)4332374-1 (DE-588)4113937-9 |
| title | Modellierung und Simulation orientierungsabhängiger Ätzprozesse in Silizium |
| title_auth | Modellierung und Simulation orientierungsabhängiger Ätzprozesse in Silizium |
| title_exact_search | Modellierung und Simulation orientierungsabhängiger Ätzprozesse in Silizium |
| title_full | Modellierung und Simulation orientierungsabhängiger Ätzprozesse in Silizium Anton Horn |
| title_fullStr | Modellierung und Simulation orientierungsabhängiger Ätzprozesse in Silizium Anton Horn |
| title_full_unstemmed | Modellierung und Simulation orientierungsabhängiger Ätzprozesse in Silizium Anton Horn |
| title_short | Modellierung und Simulation orientierungsabhängiger Ätzprozesse in Silizium |
| title_sort | modellierung und simulation orientierungsabhangiger atzprozesse in silizium |
| topic | CAD (DE-588)4069794-0 gnd Mikrostruktur (DE-588)4131028-7 gnd Numerisches Modell (DE-588)4338132-7 gnd Silicium (DE-588)4077445-4 gnd Dimension 3 (DE-588)4321722-9 gnd Nassätzen (DE-588)4332374-1 gnd |
| topic_facet | CAD Mikrostruktur Numerisches Modell Silicium Dimension 3 Nassätzen Hochschulschrift |
| url | https://mediatum.ub.tum.de/doc/601618/601618.pdf https://nbn-resolving.org/urn:nbn:de:bvb:91-diss20050707-2154450098 |
| work_keys_str_mv | AT hornanton modellierungundsimulationorientierungsabhangigeratzprozesseinsilizium |