Verfügbarkeit: Handbook of ellipsometry

Handbook of ellipsometry:

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Bibliographische Detailangaben
Weitere Verfasser:	Tompkins, Harland G. 1938- (HerausgeberIn)
Format:	Buch
Sprache:	English
Veröffentlicht:	Heidelberg [u.a.] Springer [u.a.] 2005
Schlagworte:	Ellipsometrie
Online-Zugang:	Inhaltsverzeichnis
Beschreibung:	Literaturangaben, hier auch später erschienene, unveränderte Nachdrucke
Beschreibung:	XVI, 870 S. Ill., graph. Darst.
ISBN:	3540222936 9780815514992

Internformat

MARC


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Datensatz im Suchindex

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adam_text	Contents Parti: Theory of Ellipsometry. 1 Polarized Light and Ellipsometry. 1.1 A Quick Guide to Ellipsometry ................................................... 4 1.1.1 Light Waves and Photons .................................................. 4 1.1.2 Polarization of Light ......................................................... 6 1.1.3 Ellipsometric Configurations ............................................ 9 1.1.4 Null Ellipsometry .............................................................. 12 1.1.5 Photometric Ellipsometry and Polarimetry ....................... 13 1.2 Maxwell and Wave Equations .....................................................19 1.2.1 Linear Local Response ......................................................20 1.2.2 Linear Non-Local Response .............................................22 1.2.3 Dipole Moment, Susceptibility and Inductions .................23 1.2.4 Relationships Between Optical Constants .........................24 1.2.5 Wave Equation for Monochromatic Fields .......................26 1.2.6 Plane Waves in Isotropie Medium .....................................29 1.3 Representations of Polarization ...................................................31 1.3.1 Representation by Ellipsometric Angles ...........................32 1.3.2 Special Cases: Linear and Circular Polarization ...............35 1.3.3 Orthogonal Polarization States ..........................................37 1.3.4 Representation by Complex Numbers ...............................37 1.3.5 Light Intensity, Detection of Polarization State ................40 1.4 Propagation of Polarized Light ...................................................45 1.4.1 Jones Vectors .....................................................................45 1.4.2 Jones Matrices ...................................................................48 1.4.3 Quantum Mechanical Description, Partial Polarization.... 53 1.4.4 Stokes Vectors ....................................................................56 1.4.5 Mueller Matrices ...............................................................59 1.5 Reflection and Transmission of Polarized Light at Planar Interfaces ..........................................................................67 1.5.1 Matching Plane Waves at a Planar Interface .....................67 1.5.2 Fresnel Coefficients ...........................................................72 1.5.3 Special Values of the Angle of Incidence ..........................74 1.5.4 Ratio of Amplitude Reflectivities ......................................76 1.5.5 Propagation Matrices, Stratified Structures .......................80 1.5.6 Substrate-Film-Ambient System ......................................85 1.6 References ...................................................................................90 vi Contents 2 Optical Physics of Materials .......................................................... 93 2.1 Introduction ............................................................................... 93 2.2 Propagation of Light in Solids ..................................................102 2.2.1 Optically Isotropie Solids and the Complex Dielectric Function ........................................................................... 102 2.2.2 Optically Anisotropie Solids and the Dielectric Tensor.. 110 2.2.3 Dispersion Relationships ................................................. 124 2.3 Classical Theories of the Optical Properties of Solids .............. 125 2.3.1 Semiconductors and Insulators: the Lorentz Oscillator Model ..............................................................125 2.3.2 Metals: The Drude Free Electron Model ........................129 2.3.3 Plasmons ..........................................................................132 2.3.4 Optical Sum Rules ...........................................................136 2.4 Quantum Mechanical Theories of the Optical Properties of Solids .....................................................................................137 2.4.1 Quantum Theory of Absorption and Dispersion .............138 2.4.2 Direct Interband Transitions in Solids .............................146 2.4.3 Band Structure and Critical Points in Solids ...................150 2.4.4 Indirect Interband Transitions in Solids .......................... 153 2.4.5 Intraband Transitions in Metals .......................................157 2.5 Modeling the Optical Properties of Solids ................................ 159 2.5.1 Classical Lorentz Oscillator Models ............................... 159 2.5.2 Classical Drude Models ...................................................172 2.5.3 Generalized Quantum Mechanical Models .....................178 2.5.4 Specialized Quantum Mechanical Models ......................207 2.6 Overview and Concluding Remarks .........................................227 Acknowledgments .....................................................................230 2.7 References and Bibliography ....................................................230 2.7.1 Numbered References .....................................................230 2.7.2 Bibliography ....................................................................233 3 Data Analysis for Spectroscopie Ellipsometry ______________237 3.1 Introduction ...............................................................................237 3.2 Ellipsometry Parameters ............................................................239 3.2.1 Calculated Parameters: Jones Matrices ...........................240 3.2.2 Measured Parameters: Mueller Matrices .........................241 3.2.3 Mueller-Jones Matrices ...................................................242 3.3 Calculation of Complex Reflection Coefficients ......................246 3.3.1 Isotropie, Homogeneous Systems ...................................246 3.3.2 Anisotropie Systems ........................................................248 3.3.3 Inhomogeneous Layers ....................................................251 3.4 Models for Dielectric Functions ................................................252 Contents vii 3.4.1 Tabulated Data Sets .........................................................253 3.4.2 Lorentz Oscillator Model ................................................254 3.4.3 Optical Functions of Amorphous Materials ....................255 3.4.4 Models for Crystalline Materials .....................................258 3.4.5 Effective Medium Theories .............................................260 3.5 Fitting Models to Data ...............................................................262 3.5.1 Figures of Merit ...............................................................263 3.5.2 Errors in Spectroscopie Ellipsometry ..............................265 3.5.3 Convergence Routines .....................................................268 3.5.4 An Example: (a-SixNy:H) ................................................271 3.6 Determination of Optical Functions from Spectroscopie Ellipsometry Data ......................................................................276 3.6.1 Optical Functions from Parameterization ........................278 3.6.2 Newton-Raphson Algorithm ............................................280 3.6.3 Optical Functions of Bulk Isotropie Semiconductors and Insulators ...................................................................282 3.6.4 Optical Functions of Anisotropie Materials ....................285 3.6.5 Optical Functions of Thin Films .....................................286 3.7 Depolarization ...........................................................................289 Acknowledgements ...................................................................293 3.8 Further Reading and References ...............................................293 Optics and Ellipsometry ............................................................293 Data Reduction ..........................................................................294 Numbered References ...............................................................294 Part 2: Instrumentation ....................................................................297 4 Optical Components and the Simple PCSA (Polarizer, Compensator, Sample, Analyzer) Ellipsometer ...........................299 4.1 General .......................................................................................299 4.2 The Components ........................................................................301 4.2.1 Methods of Obtaining Polarized Light ............................301 4.2.2 Double Refraction ...........................................................302 4.2.3 Calcite Crystals ................................................................303 4.2.4 Polarizers and Analyzers .................................................305 4.2.5 Wollaston Prisms .............................................................307 4.2.6 Compensators, Quarter-Wave Plates, and Retarders .......308 4.2.7 Photoelastic Modulators ..................................................316 4.2.8 Monochromators ..............................................................317 4.2.9 Goniometers .....................................................................321 4.3 Ellipsometer Component Configurations ..................................322 4.3.1 Early Null EHipsometer Configurations ..........................322 4.3.2 Photometric EHipsometer Configurations .......................323 viu Contents 4.3.3 Spectroscopie Ellipsometers ............................................324 4.3.4 Other Configurations .......................................................326 4.4 References .................................................................................327 5 Rotating Polarizer and Analyzer Ellipsometry ...........................329 5.1 Introduction ...............................................................................329 5.2 Comparison of Ellipsometers ....................................................333 5.3 Instrumentation Issues ...............................................................343 5.3.1 Optical Configuration ......................................................343 5.3.2 Optical Components and Spectral Range ........................345 5.3.3 Alignment ........................................................................351 5.3.4 Electronic Design and Components ................................356 5.4 Data Reduction for the Rotating Polarizer and Analyzer Ellipsometers .............................................................364 5.4.1 Ideal PXSAr Configuration ..............................................364 5.4.2 Errors in the PXSAr Configuration .................................371 5.4.3 PrXSA Configuration .......................................................378 5.5 Precision Considerations ...........................................................386 5.6 Calibration Procedures ..............................................................392 5.6.1 Ideal Rotating Polarizer and Analyzer Ellipsometers .....394 5.6.2 Detecting and Correcting Errors in Calibration ..............407 5.6.3 Detecting and Correcting Compensator Errors ...............423 5.7 Summary: Recent and Future Directions ..................................425 5.8 References .................................................................................429 6 Polarization Modulation Ellipsometry ________________........433 6.1 Introduction ...............................................................................433 6.2 The Photoelastic Modulator (РЕМ) ..........................................436 6.2.1 General Description and Historical Perspective ..............436 6.2.2 Mathematical Description of a PEM ...............................440 6.2.3 Stokes Vector Descriptions of the PSG and PSA ............442 6.3 Experimental Configurations of Polarization Modulation Ellipsometers .............................................................................446 6.3.1 Polarization Modulation Ellipsometry (PME) with Analog Data Acquisition .........................................446 6.3.2 Phase Modulated Ellipsometry (PME) with Digital Data Acquisition ..............................................................447 6.3.3 Two-Channel Spectroscopie Polarization Modulation Ellipsometer (2-C SPME) ...............................................449 6.3.4 Two-Modulator Generalized Ellipsometer (2-MGE) ......450 6.4 Light Intensity Through a Polarization Modulation Ellipsometer ...............................................................................452 6.4.1 Mueller Matrices for Various Samples ............................452 Contents ix 6.4.2 Intensity for a Standard PME ..........................................455 6.4.3 Intensity for the 2-Modulator Generalized Ellipsometer (2-MGE) .....................................................457 6.5 Waveform Analysis ....................................................................461 6.5.1 Basis Function .................................................................463 6.5.2 Phase-Sensitive Detection ...............................................465 6.5.3 Digital Waveform Analysis .............................................466 6.5.4 Two-Modulator Systems ..................................................467 6.6 Calibration Procedures ..............................................................469 6.6.1 One-Modulator PMEs .....................................................470 6.6.2 Two-Modulator PMEs .....................................................472 6.7 Errors .........................................................................................474 6.7.1 General Discussion ..........................................................474 6.7.2 Systematic Errors of PMEs .............................................475 6.8 Further Reading and References ...............................................479 6.8.1 Further Reading ...............................................................479 6.8.2 Numbered References .....................................................479 7 Multichannel Ellipsometry ............................................................481 7.1 Introduction ...............................................................................481 7.2 Overview of Instrumentation .....................................................483 7.2.1 Self-Compensating Designs ............................................483 7.2.2 Rotating-Element Designs ...............................................487 7.2.3 Phase-Modulation Designs ..............................................491 7.2.4 Design Comparisons ........................................................493 7.2.5 Errors Unique to Multichannel Detection Systems .........497 7.3 Rotating-Element Designs .........................................................502 7.3.1 Rotating Polarizer ............................................................502 7.3.2 Single Rotating Compensator ..........................................523 7.3.3 Dual Rotating Compensator ............................................546 7.4 Concluding Remarks .................................................................562 Acknowledgements ...................................................................564 7.5 References .................................................................................564 Part 3: Critical Reviews of Some Applications ...............................567 8 SiO2 Films ........................................................................................569 8.1 Introduction ...............................................................................569 8.1.1 Preeminence of SiO2 in Microelectronics: the Ellipsometry Connection .................................................569 8.1.2 Electronic Passivation .....................................................570 8.1.3 Properties of SiO2 Films ..................................................571 8.2 Historical Perspective - Prior to 1970......................................578 Contents 8.3 Modern Studies - Since 1970...................................................585 8.3.1 Thick SiO2 Films .............................................................585 8.3.2 Thin SiO2 Films ...............................................................599 8.3.3 Recent Results on Ultra Thin SiO, Films and the Si-SiO2 Interface .....................*...................................619 8.4 Conclusions ...............................................................................632 Acknowledgements ...................................................................633 8.5 References .................................................................................633 9 Theory and Application of Generalized Ellipsometry ................637 9.1 Introduction ...............................................................................637 9.2 The Generalized Ellipsometry Concept ....................................638 9.2.1 Comments on Notations in GE .......................................638 9.2.2 The Optical Jones Matrix ................................................640 9.2.3 The Generalized Ellipsometry Parameters ......................643 9.2.4 Generalized Ellipsometry Acquisition Techniques .........647 9.3 Theory of Generalized Ellipsometry .........................................650 9.3.1 Birefringence in Stratified Media ....................................650 9.3.2 4X4 Maxwell s Equations in Matrix Form ...................652 9.3.3 Transmission and Reflection GE .....................................656 9.4 Special Generalized Ellipsometry Solutions .............................657 9.4.1 Biaxial Films (Symmetrically Dielectric Materials) .......657 9.4.2 Bi-Biaxial or Magneto-Optical Films (Non-Symmetrically Dielectric Materials) ......................661 9.4.3 Chiral Biaxial Films (Axially Twisted Symmetrically Dielectric Materials) ........................................................663 9.4.4 Isotropie Dielectric Films ................................................669 9.4.5 Further Solutions: [1 1 1 ] Superlattice Ordering in III-V Compounds (CuPt-Ordering) .............................671 9.5 Strategies in Generalized Ellipsometry .....................................675 9.5.1 Data Acquisition Strategies for Anisotropie Samples ............................................................................676 9.5.2 Strategies for Treatment of Sample Backside Effects ..............................................................................679 9.5.3 Model Strategies ..............................................................682 9.6 Generalized Ellipsometry Applications .....................................683 9.6.1 Anisotropie Bulk Materials .............................................684 9.6.2 Anisotropie Films ............................................................693 9.7 Conclusions ...............................................................................710 Acknowledgements ...................................................................710 9.8 Further Reading and References ...............................................711 9.8.1 General Reading ..............................................................711 9.8.2 Numbered References .....................................................712 Contents xi Part 4: Emerging Areas in Ellipsometry .........................................719 10 VUV Ellipsometry ........................................................................721 10.1 Introduction ..........................................................................721 10.2 Historical Review of Short Wavelength Ellipsometry ..........722 10.2.1 BESSY Ellipsometer .................................................722 10.2.2 EUV Ellipsometer .....................................................724 10.3 VUV Ellipsometry Today ......................................................726 10.3.1 Current VUV Instrumentation ...................................726 10.4 Importance of VUV Ellipsometry .........................................732 10.5 Survey of Applications ..........................................................737 10.5.1 Lithography ...............................................................740 10.5.2 Gate Dielectrics .........................................................748 10.5.3 High-energy Optical Constants .................................749 10.6 Future of VUV Ellipsometry .................................................757 10.7 Acknowledgments .................................................................757 10.8 References .............................................................................757 11 Spectroscopic Infrared Ellipsometry ..........................................763 11.1 Experimental Tools ................................................................763 11.1.1 Two Kinds of Instruments .........................................763 11.1.2 Optical Equipment for the Infrared-Ellipsometry .....768 11.1.3 The Degree of Polarization ........................................771 11.1.4 Linearity of the Detection System .............................775 11.1.5 Infrared Synchrotron Radiation .................................775 11.2 Applications ...........................................................................776 11.2.1 Optics of Absorbing Media .......................................776 11.2.2 Vibration Modes - the Concept of Weak and Strong Oscillators ......................................................778 11.2.3 Inversion of Infrared Ellipsometric Measurements .. 781 11.2.4 Anisotropy Features in the Infrared Ellipsometric Spectra .......................................................................786 11.3 References ............................................................................797 12 Ellipsometry in Life Sciences ......................................................799 Poem and Dedication .............................................................799 12.1 Introduction ...........................................................................800 12.2 Historical Background ...........................................................802 12.3 The Interfaces Under Study ...................................................802 12.4 From Optics to Biology .........................................................804 12.4.1 The Unique Possibilities ............................................804 12.4.2 Verification of Eilipsometric Results ........................805 xii Contents 12.5 Methodology for Data Evaluation - from ^and Δ to Biologically Related Parameters ...........................................806 12.5.1 A Thin Biolayer on a Rat Ideal Substrate .................806 12.5.2 A Thick Biolayer on a Flat Ideal Substrate ...............817 12.5.3 Adsorption of Biomolecules into Porous Structures ...................................................................817 12.5.4 Surface Roughness ....................................................819 12.5.5 Use of Dispersion Models .........................................820 12.5.6 Anisotropy .................................................................820 12.6 Methodology - Experimental ................................................821 12.6.1 Instrumentation ..........................................................821 12.6.2 Cell Designs ...............................................................822 12.6.3 In situ Considerations for Biological Interfaces .......824 12.6.4 Some Model Surfaces ................................................825 12.6.5 Studies on Real Biological Surfaces .........................827 12.6.6 Complementary and Independent Information .........828 12.6.7 Experimental Design .................................................828 12.7 Applications ...........................................................................829 12.7.1 Introduction ...............................................................829 12.7.2 Adsorption of Biomolecules to Model Surfaces .......830 12.7.3 Spectroscopy ..............................................................839 12.7.4 Imaging ......................................................................841 12.7.5 Biological Surfaces ....................................................843 12.7.6 Biosensors Based on Ellipsometric Readout .............844 12.7.7 Engineering Applications ..........................................845 12.8 Outlook ..................................................................................846 Acknowledgements ...............................................................847 12.9 References .............................................................................847
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spelling	Handbook of ellipsometry ed. by Harland G. Tompkins ... Heidelberg [u.a.] Springer [u.a.] 2005 XVI, 870 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben, hier auch später erschienene, unveränderte Nachdrucke Ellipsometrie (DE-588)4152025-7 gnd rswk-swf Ellipsometrie (DE-588)4152025-7 s DE-604 Tompkins, Harland G. 1938- (DE-588)129994987 edt Digitalisierung UB Regensburg application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=013196605&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis
spellingShingle	Handbook of ellipsometry Ellipsometrie (DE-588)4152025-7 gnd
subject_GND	(DE-588)4152025-7
title	Handbook of ellipsometry
title_auth	Handbook of ellipsometry
title_exact_search	Handbook of ellipsometry
title_full	Handbook of ellipsometry ed. by Harland G. Tompkins ...
title_fullStr	Handbook of ellipsometry ed. by Harland G. Tompkins ...
title_full_unstemmed	Handbook of ellipsometry ed. by Harland G. Tompkins ...
title_short	Handbook of ellipsometry
title_sort	handbook of ellipsometry
topic	Ellipsometrie (DE-588)4152025-7 gnd
topic_facet	Ellipsometrie
url	http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=013196605&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
work_keys_str_mv	AT tompkinsharlandg handbookofellipsometry

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MARC

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