Silver metal organic chemical vapor deposition for microelectronic metallization:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
Aachen
Shaker
2005
|
| Schriftenreihe: | Selected topics of electronics and micromechatronics
15 |
| Schlagworte: | |
| Beschreibung: | V, 173 S. Ill., graph. Darst. 21 cm, 284 gr. |
| ISBN: | 3832238956 |
Internformat
MARC
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| 264 | 1 | |a Aachen |b Shaker |c 2005 | |
| 300 | |a V, 173 S. |b Ill., graph. Darst. |c 21 cm, 284 gr. | ||
| 336 | |b txt |2 rdacontent | ||
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| 490 | 1 | |a Selected topics of electronics and micromechatronics |v 15 | |
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Datensatz im Suchindex
| _version_ | 1804133360093626368 |
|---|---|
| any_adam_object | |
| author | Gao, Liming |
| author_facet | Gao, Liming |
| author_role | aut |
| author_sort | Gao, Liming |
| author_variant | l g lg |
| building | Verbundindex |
| bvnumber | BV019846693 |
| ctrlnum | (OCoLC)76741603 (DE-599)BVBBV019846693 |
| discipline | Maschinenbau / Maschinenwesen |
| format | Thesis Book |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV019846693 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T20:07:28Z |
| institution | BVB |
| isbn | 3832238956 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-013171482 |
| oclc_num | 76741603 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-12 |
| owner_facet | DE-91 DE-BY-TUM DE-12 |
| physical | V, 173 S. Ill., graph. Darst. 21 cm, 284 gr. |
| publishDate | 2005 |
| publishDateSearch | 2005 |
| publishDateSort | 2005 |
| publisher | Shaker |
| record_format | marc |
| series | Selected topics of electronics and micromechatronics |
| series2 | Selected topics of electronics and micromechatronics |
| spelling | Gao, Liming Verfasser aut Silver metal organic chemical vapor deposition for microelectronic metallization Liming Gao Aachen Shaker 2005 V, 173 S. Ill., graph. Darst. 21 cm, 284 gr. txt rdacontent n rdamedia nc rdacarrier Selected topics of electronics and micromechatronics 15 Zugl.: München, Techn. Univ., Diss., 2005 Silber (DE-588)4133759-1 gnd rswk-swf MOCVD-Verfahren (DE-588)4314628-4 gnd rswk-swf Diffusionsbarriere (DE-588)4289693-9 gnd rswk-swf Metallisieren (DE-588)4169599-9 gnd rswk-swf ULSI (DE-588)4226286-0 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content ULSI (DE-588)4226286-0 s Metallisieren (DE-588)4169599-9 s Silber (DE-588)4133759-1 s MOCVD-Verfahren (DE-588)4314628-4 s Diffusionsbarriere (DE-588)4289693-9 s DE-604 Selected topics of electronics and micromechatronics 15 (DE-604)BV014231990 15 |
| spellingShingle | Gao, Liming Silver metal organic chemical vapor deposition for microelectronic metallization Selected topics of electronics and micromechatronics Silber (DE-588)4133759-1 gnd MOCVD-Verfahren (DE-588)4314628-4 gnd Diffusionsbarriere (DE-588)4289693-9 gnd Metallisieren (DE-588)4169599-9 gnd ULSI (DE-588)4226286-0 gnd |
| subject_GND | (DE-588)4133759-1 (DE-588)4314628-4 (DE-588)4289693-9 (DE-588)4169599-9 (DE-588)4226286-0 (DE-588)4113937-9 |
| title | Silver metal organic chemical vapor deposition for microelectronic metallization |
| title_auth | Silver metal organic chemical vapor deposition for microelectronic metallization |
| title_exact_search | Silver metal organic chemical vapor deposition for microelectronic metallization |
| title_full | Silver metal organic chemical vapor deposition for microelectronic metallization Liming Gao |
| title_fullStr | Silver metal organic chemical vapor deposition for microelectronic metallization Liming Gao |
| title_full_unstemmed | Silver metal organic chemical vapor deposition for microelectronic metallization Liming Gao |
| title_short | Silver metal organic chemical vapor deposition for microelectronic metallization |
| title_sort | silver metal organic chemical vapor deposition for microelectronic metallization |
| topic | Silber (DE-588)4133759-1 gnd MOCVD-Verfahren (DE-588)4314628-4 gnd Diffusionsbarriere (DE-588)4289693-9 gnd Metallisieren (DE-588)4169599-9 gnd ULSI (DE-588)4226286-0 gnd |
| topic_facet | Silber MOCVD-Verfahren Diffusionsbarriere Metallisieren ULSI Hochschulschrift |
| volume_link | (DE-604)BV014231990 |
| work_keys_str_mv | AT gaoliming silvermetalorganicchemicalvapordepositionformicroelectronicmetallization |