Holdings: Introduction to microfabrication

Introduction to microfabrication:

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Bibliographic Details
Main Author:	Franssila, Sami (Author)
Format:	Book
Language:	English
Published:	Chichester [u.a.] Wiley 2005
Edition:	Reprinted
Subjects:	Dünnschichttechnik Mikrostruktur Wafer Mikroelektronik Mikrosystemtechnik Mikromechanik Mikrobearbeitung
Online Access:	Publisher description Table of contents
Physical Description:	XVII, 401 S. Ill., graph. Darst.
ISBN:	0470851058 0470851066

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MARC


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Record in the Search Index

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discipline	Elektrotechnik Fertigungstechnik Werkstoffwissenschaften / Fertigungstechnik Elektrotechnik / Elektronik / Nachrichtentechnik
edition	Reprinted
format	Book
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isbn	0470851058 0470851066
language	English
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spelling	Franssila, Sami Verfasser aut Introduction to microfabrication Sami Franssila Reprinted Chichester [u.a.] Wiley 2005 XVII, 401 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Mikrostruktur (DE-588)4131028-7 gnd rswk-swf Wafer (DE-588)4294605-0 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf Mikrobearbeitung (DE-588)4582923-8 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 s Wafer (DE-588)4294605-0 s Mikrostruktur (DE-588)4131028-7 s DE-604 Mikroelektronik (DE-588)4039207-7 s Mikromechanik (DE-588)4205811-9 s Mikrobearbeitung (DE-588)4582923-8 s Dünnschichttechnik (DE-588)4136339-5 s 1\p DE-604 http://www.loc.gov/catdir/description/wiley041/2004004940.html Publisher description http://www.loc.gov/catdir/toc/wiley041/2004004940.html Table of contents 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk
spellingShingle	Franssila, Sami Introduction to microfabrication Dünnschichttechnik (DE-588)4136339-5 gnd Mikrostruktur (DE-588)4131028-7 gnd Wafer (DE-588)4294605-0 gnd Mikroelektronik (DE-588)4039207-7 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Mikromechanik (DE-588)4205811-9 gnd Mikrobearbeitung (DE-588)4582923-8 gnd
subject_GND	(DE-588)4136339-5 (DE-588)4131028-7 (DE-588)4294605-0 (DE-588)4039207-7 (DE-588)4221617-5 (DE-588)4205811-9 (DE-588)4582923-8
title	Introduction to microfabrication
title_auth	Introduction to microfabrication
title_exact_search	Introduction to microfabrication
title_full	Introduction to microfabrication Sami Franssila
title_fullStr	Introduction to microfabrication Sami Franssila
title_full_unstemmed	Introduction to microfabrication Sami Franssila
title_short	Introduction to microfabrication
title_sort	introduction to microfabrication
topic	Dünnschichttechnik (DE-588)4136339-5 gnd Mikrostruktur (DE-588)4131028-7 gnd Wafer (DE-588)4294605-0 gnd Mikroelektronik (DE-588)4039207-7 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Mikromechanik (DE-588)4205811-9 gnd Mikrobearbeitung (DE-588)4582923-8 gnd
topic_facet	Dünnschichttechnik Mikrostruktur Wafer Mikroelektronik Mikrosystemtechnik Mikromechanik Mikrobearbeitung
url	http://www.loc.gov/catdir/description/wiley041/2004004940.html http://www.loc.gov/catdir/toc/wiley041/2004004940.html
work_keys_str_mv	AT franssilasami introductiontomicrofabrication

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