Introduction to microfabrication:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Chichester [u.a.]
Wiley
2005
|
| Ausgabe: | Reprinted |
| Schlagworte: | |
| Online-Zugang: | Publisher description Table of contents |
| Beschreibung: | XVII, 401 S. Ill., graph. Darst. |
| ISBN: | 0470851058 0470851066 |
Internformat
MARC
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| 100 | 1 | |a Franssila, Sami |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Introduction to microfabrication |c Sami Franssila |
| 250 | |a Reprinted | ||
| 264 | 1 | |a Chichester [u.a.] |b Wiley |c 2005 | |
| 300 | |a XVII, 401 S. |b Ill., graph. Darst. | ||
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Datensatz im Suchindex
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|---|---|
| any_adam_object | |
| author | Franssila, Sami |
| author_facet | Franssila, Sami |
| author_role | aut |
| author_sort | Franssila, Sami |
| author_variant | s f sf |
| building | Verbundindex |
| bvnumber | BV019814919 |
| callnumber-first | T - Technology |
| callnumber-label | TK7875 |
| callnumber-raw | TK7875 |
| callnumber-search | TK7875 |
| callnumber-sort | TK 47875 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 3750 ZN 4100 |
| classification_tum | FER 792f ELT 008f |
| ctrlnum | (OCoLC)254931243 (DE-599)BVBBV019814919 |
| dewey-full | 670 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 670 - Manufacturing |
| dewey-raw | 670 |
| dewey-search | 670 |
| dewey-sort | 3670 |
| dewey-tens | 670 - Manufacturing |
| discipline | Elektrotechnik Fertigungstechnik Werkstoffwissenschaften / Fertigungstechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | Reprinted |
| format | Book |
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| id | DE-604.BV019814919 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T20:06:45Z |
| institution | BVB |
| isbn | 0470851058 0470851066 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-013140283 |
| oclc_num | 254931243 |
| open_access_boolean | |
| owner | DE-703 DE-91 DE-BY-TUM DE-11 |
| owner_facet | DE-703 DE-91 DE-BY-TUM DE-11 |
| physical | XVII, 401 S. Ill., graph. Darst. |
| publishDate | 2005 |
| publishDateSearch | 2005 |
| publishDateSort | 2005 |
| publisher | Wiley |
| record_format | marc |
| spelling | Franssila, Sami Verfasser aut Introduction to microfabrication Sami Franssila Reprinted Chichester [u.a.] Wiley 2005 XVII, 401 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Mikrostruktur (DE-588)4131028-7 gnd rswk-swf Wafer (DE-588)4294605-0 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf Mikrobearbeitung (DE-588)4582923-8 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 s Wafer (DE-588)4294605-0 s Mikrostruktur (DE-588)4131028-7 s DE-604 Mikroelektronik (DE-588)4039207-7 s Mikromechanik (DE-588)4205811-9 s Mikrobearbeitung (DE-588)4582923-8 s Dünnschichttechnik (DE-588)4136339-5 s 1\p DE-604 http://www.loc.gov/catdir/description/wiley041/2004004940.html Publisher description http://www.loc.gov/catdir/toc/wiley041/2004004940.html Table of contents 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Franssila, Sami Introduction to microfabrication Dünnschichttechnik (DE-588)4136339-5 gnd Mikrostruktur (DE-588)4131028-7 gnd Wafer (DE-588)4294605-0 gnd Mikroelektronik (DE-588)4039207-7 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Mikromechanik (DE-588)4205811-9 gnd Mikrobearbeitung (DE-588)4582923-8 gnd |
| subject_GND | (DE-588)4136339-5 (DE-588)4131028-7 (DE-588)4294605-0 (DE-588)4039207-7 (DE-588)4221617-5 (DE-588)4205811-9 (DE-588)4582923-8 |
| title | Introduction to microfabrication |
| title_auth | Introduction to microfabrication |
| title_exact_search | Introduction to microfabrication |
| title_full | Introduction to microfabrication Sami Franssila |
| title_fullStr | Introduction to microfabrication Sami Franssila |
| title_full_unstemmed | Introduction to microfabrication Sami Franssila |
| title_short | Introduction to microfabrication |
| title_sort | introduction to microfabrication |
| topic | Dünnschichttechnik (DE-588)4136339-5 gnd Mikrostruktur (DE-588)4131028-7 gnd Wafer (DE-588)4294605-0 gnd Mikroelektronik (DE-588)4039207-7 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Mikromechanik (DE-588)4205811-9 gnd Mikrobearbeitung (DE-588)4582923-8 gnd |
| topic_facet | Dünnschichttechnik Mikrostruktur Wafer Mikroelektronik Mikrosystemtechnik Mikromechanik Mikrobearbeitung |
| url | http://www.loc.gov/catdir/description/wiley041/2004004940.html http://www.loc.gov/catdir/toc/wiley041/2004004940.html |
| work_keys_str_mv | AT franssilasami introductiontomicrofabrication |