Infrared ellipsometry on semiconductor layer structures: phonons, plasmons, and polaritons
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Berlin [u.a.]
Springer
2004
|
| Schriftenreihe: | Springer tracts in modern physics
209 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XI, 193 S. Ill., graph. Darst. |
| ISBN: | 3540232494 |
Internformat
MARC
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| 100 | 1 | |a Schubert, Mathias |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Infrared ellipsometry on semiconductor layer structures |b phonons, plasmons, and polaritons |c Mathias Schubert |
| 264 | 1 | |a Berlin [u.a.] |b Springer |c 2004 | |
| 300 | |a XI, 193 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Springer tracts in modern physics |v 209 | |
| 650 | 7 | |a Física moderna |2 larpcal | |
| 650 | 4 | |a Ellipsometry | |
| 650 | 4 | |a Layer structure (Solids) | |
| 650 | 0 | 7 | |a Dielektrische Funktion |0 (DE-588)4241321-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ellipsometrie |0 (DE-588)4152025-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Infrarot |0 (DE-588)4161686-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mehrschichtsystem |0 (DE-588)4244347-7 |2 gnd |9 rswk-swf |
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| 689 | 0 | 4 | |a Infrarot |0 (DE-588)4161686-8 |D s |
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| 999 | |a oai:aleph.bib-bvb.de:BVB01-012946110 | ||
Datensatz im Suchindex
| _version_ | 1804132978583928832 |
|---|---|
| adam_text | Contents
1
Introduction
.............................................. 1
References
................................................. 4
2
Ellipsometry
.............................................. 7
2.1
Joncs
Matrix Presentation
............................... 8
2.2
Mueller Matrix Presentation
............................. 9
2.3
Standard Ellipsometry
.................................. 11
2.4
Generalized Ellipsometry
................................ 12
2.5
Brewster and Interface-Mode Conditions
.................. 13
2.5.1
Generalized Brewster Conditions
................... 13
2.5.2
Generalized Interface-Mode Conditions
..............
M
2.6 Anisotropie
Dielectric Function Tensor
.................... 14
2.6.1
General Description
.............................. 14
2.6.2
Orthogonal Rotations
............................. 15
2.6.3
Bond Polarizability Model
......................... 16
2.7
Light Propagation in Layered
Anisotropie
Media
........... 18
2.8
Ellipsometry Data Analysis
.............................. 20
2.8.1
Thickness and Dielectric Function
.................. 20
2.8.2
Wavelength-by-Wavelejigtb Fit
..................... 21
2.8.3
Parameterized Model Fit
.......................... 21
2.8.4
Ellipsometry Test Functions
....................... 22
2.8.5
Parameter Accessibility
........................... 23
2.9
Infrared Ellipsometry
................................... 23
References
................................................. 27
3
Infrared Model Dielectric Functions
...................... 31
3.1
Polar Lattice Resonance Contributions
.................... 31
3.2
Free-Charge-Carrier Contributions
........................ 35
3.3
Low-Polarity Mode Contributions
........................ 38
3.4
Free-Charge-Carrier Magneto-Optic Contributions
.......... 39
References
................................................. 42
X
Contents
4 Polaritons in Semiconductor
Layer Structures............
45
4.1
Bulk
Polaritons........................................ 45
4.1.1 Dispersion Relation............................... 45
4.1.2
Example: ¿-GaAs
................................. 47
4.2
Surface
Polaritons
and Surface Guided Waves
.............. 48
4.2.1
Dispersion Relation
............................... 50
4.2.2
Example:
ż-GaAs
Film on
n-GaAs Siibstrate
......... 52
4.2.3
The Berreman
Effect
............................. 62
References
................................................. 64
5 Anisotropie
Substrates
.................................... 67
5.1
Bands of Total Reflection
................................ 68
5.2
Sapphire (Hexagonal)
................................... 70
5.3
Stibnite (Orthorhombic)
................................. 76
References
................................................. 79
6
Zincblende-Structure Materials (III-V)
................... 81
6.1
Free Charge Carriers
(p
-Туре
GaAs)
...................... 81
6.2
Alloying (AlGalnP)
..................................... 85
6.3
Ordering (AlGalnP)
.................................... 90
6.4
Strain and Composition (GaNP, GalnAsN)
................ 96
6.4.1
GaNP/GaP
...................................... 96
6.4.2
InGaNAs/GaAs
..................................100
References
.................................................104
7
Wurtzite-Structure Materials (Group-III Nitrides, ZnO)
.. 109
7.1
Crystal Quality: Bulk and Epilayer (ZnO)
.................112
7.2
Total-Reflection-Bands and Dielectric Anisotropy (ZnO)
.....116
7.3
Epitaxial Relationship (ZnO)
............................117
7.4
Free Charge Carriers (p- and
η
-Type
GaN)
................123
7.5
Strain and Alloying (InAlN)
.............................128
7.6
Device Heterostructures (Group-III Nitrides)
...............133
References
.................................................143
8
Magneto-Optic Ellipsometry
..............................147
8.1
Experimental Setups
....................................149
8.1.1
Polar MO Setup: Example
.........................150
8.1.2
Oblique MO Setup: Example
......................152
8.2
Experiments
...........................................153
8.2.1
¿-GaAs(d)/n,-GaAs
...............................154
8.2.2
n-Bo.o3luo.o(>Gao.9iAH(d)/¿-GaAs
...................159
8.2.3
n-GaAs(rf)/n-Alo.H)Gao.33bio.48P(rf)/i-GaAs.........
160
References
.................................................163
Contents
XI
A
4x4 Transfer Matrix Tp
for
Isotropie Films..............1G5
References
.................................................167
В
4x4 Transfer Matrix Tp
for Dielectric Homogeneous
Films ........................169
References
.................................................170
С
4x4
Transfer Matrix Tp
for Magneto-optic Films
..................................171
References
.................................................172
D
4x4
Transfer Matrix Tp
for Dielectric Helical Films
...............................173
References
.................................................178
E TM
Waves at the Interface
Between Two Half-Infinite Media
.........................181
References
.................................................183
F TM
Waves at Two Stratified Interfaces
...................185
References
.................................................190
Index
.........................................................191
|
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| indexdate | 2024-07-09T20:01:25Z |
| institution | BVB |
| isbn | 3540232494 |
| language | English |
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| physical | XI, 193 S. Ill., graph. Darst. |
| publishDate | 2004 |
| publishDateSearch | 2004 |
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| publisher | Springer |
| record_format | marc |
| series | Springer tracts in modern physics |
| series2 | Springer tracts in modern physics |
| spelling | Schubert, Mathias Verfasser aut Infrared ellipsometry on semiconductor layer structures phonons, plasmons, and polaritons Mathias Schubert Berlin [u.a.] Springer 2004 XI, 193 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Springer tracts in modern physics 209 Física moderna larpcal Ellipsometry Layer structure (Solids) Dielektrische Funktion (DE-588)4241321-7 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Ellipsometrie (DE-588)4152025-7 gnd rswk-swf Infrarot (DE-588)4161686-8 gnd rswk-swf Mehrschichtsystem (DE-588)4244347-7 gnd rswk-swf Halbleiter (DE-588)4022993-2 s Mehrschichtsystem (DE-588)4244347-7 s Dielektrische Funktion (DE-588)4241321-7 s Ellipsometrie (DE-588)4152025-7 s Infrarot (DE-588)4161686-8 s DE-604 Springer tracts in modern physics 209 (DE-604)BV000000153 209 Digitalisierung UB Regensburg application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=012946110&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Schubert, Mathias Infrared ellipsometry on semiconductor layer structures phonons, plasmons, and polaritons Springer tracts in modern physics Física moderna larpcal Ellipsometry Layer structure (Solids) Dielektrische Funktion (DE-588)4241321-7 gnd Halbleiter (DE-588)4022993-2 gnd Ellipsometrie (DE-588)4152025-7 gnd Infrarot (DE-588)4161686-8 gnd Mehrschichtsystem (DE-588)4244347-7 gnd |
| subject_GND | (DE-588)4241321-7 (DE-588)4022993-2 (DE-588)4152025-7 (DE-588)4161686-8 (DE-588)4244347-7 |
| title | Infrared ellipsometry on semiconductor layer structures phonons, plasmons, and polaritons |
| title_auth | Infrared ellipsometry on semiconductor layer structures phonons, plasmons, and polaritons |
| title_exact_search | Infrared ellipsometry on semiconductor layer structures phonons, plasmons, and polaritons |
| title_full | Infrared ellipsometry on semiconductor layer structures phonons, plasmons, and polaritons Mathias Schubert |
| title_fullStr | Infrared ellipsometry on semiconductor layer structures phonons, plasmons, and polaritons Mathias Schubert |
| title_full_unstemmed | Infrared ellipsometry on semiconductor layer structures phonons, plasmons, and polaritons Mathias Schubert |
| title_short | Infrared ellipsometry on semiconductor layer structures |
| title_sort | infrared ellipsometry on semiconductor layer structures phonons plasmons and polaritons |
| title_sub | phonons, plasmons, and polaritons |
| topic | Física moderna larpcal Ellipsometry Layer structure (Solids) Dielektrische Funktion (DE-588)4241321-7 gnd Halbleiter (DE-588)4022993-2 gnd Ellipsometrie (DE-588)4152025-7 gnd Infrarot (DE-588)4161686-8 gnd Mehrschichtsystem (DE-588)4244347-7 gnd |
| topic_facet | Física moderna Ellipsometry Layer structure (Solids) Dielektrische Funktion Halbleiter Ellipsometrie Infrarot Mehrschichtsystem |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=012946110&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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