Enabling technology for MEMS and nanodevices:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Weinheim
Wiley-VCH
2004
|
| Schriftenreihe: | Advanced micro & nanosystems
1 |
| Schlagworte: | |
| Beschreibung: | hier auch unveränderte Nachdrucke |
| Beschreibung: | XII, 427 S. Ill., graph. Darst. |
| ISBN: | 9783527334988 9783527675043 352730746x |
Internformat
MARC
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| 020 | |a 9783527675043 |9 978-3-527-67504-3 | ||
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| 336 | |b txt |2 rdacontent | ||
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Datensatz im Suchindex
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| dewey-full | 620.5 |
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| dewey-raw | 620.5 |
| dewey-search | 620.5 |
| dewey-sort | 3620.5 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
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| id | DE-604.BV019371644 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T19:58:45Z |
| institution | BVB |
| isbn | 9783527334988 9783527675043 352730746x |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-012835051 |
| oclc_num | 55807757 |
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| owner | DE-703 DE-M347 DE-29T DE-91 DE-BY-TUM DE-1043 DE-1050 DE-898 DE-BY-UBR DE-1051 DE-522 DE-11 |
| owner_facet | DE-703 DE-M347 DE-29T DE-91 DE-BY-TUM DE-1043 DE-1050 DE-898 DE-BY-UBR DE-1051 DE-522 DE-11 |
| physical | XII, 427 S. Ill., graph. Darst. |
| publishDate | 2004 |
| publishDateSearch | 2004 |
| publishDateSort | 2004 |
| publisher | Wiley-VCH |
| record_format | marc |
| series | Advanced micro & nanosystems |
| series2 | Advanced micro & nanosystems |
| spelling | Enabling technology for MEMS and nanodevices ed. by H. Baltes ... Weinheim Wiley-VCH 2004 XII, 427 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Advanced micro & nanosystems 1 hier auch unveränderte Nachdrucke Microelectrónica Nanotecnología Sistemas microelectromecánicos Microelectromechanical systems Microelectronics Nanotechnology Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 s DE-604 Mikrosystemtechnik (DE-588)4221617-5 s Baltes, Henry Sonstige oth Advanced micro & nanosystems 1 (DE-604)BV019371555 1 |
| spellingShingle | Enabling technology for MEMS and nanodevices Advanced micro & nanosystems Microelectrónica Nanotecnología Sistemas microelectromecánicos Microelectromechanical systems Microelectronics Nanotechnology Nanotechnologie (DE-588)4327470-5 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| subject_GND | (DE-588)4327470-5 (DE-588)4221617-5 |
| title | Enabling technology for MEMS and nanodevices |
| title_auth | Enabling technology for MEMS and nanodevices |
| title_exact_search | Enabling technology for MEMS and nanodevices |
| title_full | Enabling technology for MEMS and nanodevices ed. by H. Baltes ... |
| title_fullStr | Enabling technology for MEMS and nanodevices ed. by H. Baltes ... |
| title_full_unstemmed | Enabling technology for MEMS and nanodevices ed. by H. Baltes ... |
| title_short | Enabling technology for MEMS and nanodevices |
| title_sort | enabling technology for mems and nanodevices |
| topic | Microelectrónica Nanotecnología Sistemas microelectromecánicos Microelectromechanical systems Microelectronics Nanotechnology Nanotechnologie (DE-588)4327470-5 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| topic_facet | Microelectrónica Nanotecnología Sistemas microelectromecánicos Microelectromechanical systems Microelectronics Nanotechnology Nanotechnologie Mikrosystemtechnik |
| volume_link | (DE-604)BV019371555 |
| work_keys_str_mv | AT balteshenry enablingtechnologyformemsandnanodevices |