Entwurf eines Rotationssensors in dreischichtiger, CMOS-kompatibler Silizium-Oberflächen-Mikromechanik:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | German |
| Veröffentlicht: |
2002
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| Schlagworte: | |
| Online-Zugang: | http://ubdata.uni-paderborn.de/ediss/14/2002/sasse/index.htm |
| Beschreibung: | Paderborn, Univ., Diss., 2002 |
| Beschreibung: | Online-Ressource |
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Datensatz im Suchindex
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| any_adam_object | |
| author | Sasse, Philipp Wilhelm |
| author_facet | Sasse, Philipp Wilhelm |
| author_role | aut |
| author_sort | Sasse, Philipp Wilhelm |
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| building | Verbundindex |
| bvnumber | BV019290380 |
| collection | ebook |
| ctrlnum | (OCoLC)76575297 (DE-599)BVBBV019290380 |
| format | Electronic eBook |
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| id | DE-604.BV019290380 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T19:43:40Z |
| institution | BVB |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-012042141 |
| oclc_num | 76575297 |
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| physical | Online-Ressource |
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| publishDate | 2002 |
| publishDateSearch | 2002 |
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| spelling | Sasse, Philipp Wilhelm Verfasser aut Entwurf eines Rotationssensors in dreischichtiger, CMOS-kompatibler Silizium-Oberflächen-Mikromechanik von Philipp Wilhelm Sasse 2002 Online-Ressource txt rdacontent c rdamedia cr rdacarrier Paderborn, Univ., Diss., 2002 Oberflächenmontage (DE-588)4248071-1 gnd rswk-swf Entwurf (DE-588)4121208-3 gnd rswk-swf Siliciumbauelement (DE-588)4181368-6 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf Rotationssensor (DE-588)4178505-8 gnd rswk-swf CMOS (DE-588)4010319-5 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Rotationssensor (DE-588)4178505-8 s Entwurf (DE-588)4121208-3 s Mikromechanik (DE-588)4205811-9 s Oberflächenmontage (DE-588)4248071-1 s CMOS (DE-588)4010319-5 s Siliciumbauelement (DE-588)4181368-6 s DE-604 http://ubdata.uni-paderborn.de/ediss/14/2002/sasse/index.htm |
| spellingShingle | Sasse, Philipp Wilhelm Entwurf eines Rotationssensors in dreischichtiger, CMOS-kompatibler Silizium-Oberflächen-Mikromechanik Oberflächenmontage (DE-588)4248071-1 gnd Entwurf (DE-588)4121208-3 gnd Siliciumbauelement (DE-588)4181368-6 gnd Mikromechanik (DE-588)4205811-9 gnd Rotationssensor (DE-588)4178505-8 gnd CMOS (DE-588)4010319-5 gnd |
| subject_GND | (DE-588)4248071-1 (DE-588)4121208-3 (DE-588)4181368-6 (DE-588)4205811-9 (DE-588)4178505-8 (DE-588)4010319-5 (DE-588)4113937-9 |
| title | Entwurf eines Rotationssensors in dreischichtiger, CMOS-kompatibler Silizium-Oberflächen-Mikromechanik |
| title_auth | Entwurf eines Rotationssensors in dreischichtiger, CMOS-kompatibler Silizium-Oberflächen-Mikromechanik |
| title_exact_search | Entwurf eines Rotationssensors in dreischichtiger, CMOS-kompatibler Silizium-Oberflächen-Mikromechanik |
| title_full | Entwurf eines Rotationssensors in dreischichtiger, CMOS-kompatibler Silizium-Oberflächen-Mikromechanik von Philipp Wilhelm Sasse |
| title_fullStr | Entwurf eines Rotationssensors in dreischichtiger, CMOS-kompatibler Silizium-Oberflächen-Mikromechanik von Philipp Wilhelm Sasse |
| title_full_unstemmed | Entwurf eines Rotationssensors in dreischichtiger, CMOS-kompatibler Silizium-Oberflächen-Mikromechanik von Philipp Wilhelm Sasse |
| title_short | Entwurf eines Rotationssensors in dreischichtiger, CMOS-kompatibler Silizium-Oberflächen-Mikromechanik |
| title_sort | entwurf eines rotationssensors in dreischichtiger cmos kompatibler silizium oberflachen mikromechanik |
| topic | Oberflächenmontage (DE-588)4248071-1 gnd Entwurf (DE-588)4121208-3 gnd Siliciumbauelement (DE-588)4181368-6 gnd Mikromechanik (DE-588)4205811-9 gnd Rotationssensor (DE-588)4178505-8 gnd CMOS (DE-588)4010319-5 gnd |
| topic_facet | Oberflächenmontage Entwurf Siliciumbauelement Mikromechanik Rotationssensor CMOS Hochschulschrift |
| url | http://ubdata.uni-paderborn.de/ediss/14/2002/sasse/index.htm |
| work_keys_str_mv | AT sassephilippwilhelm entwurfeinesrotationssensorsindreischichtigercmoskompatiblersiliziumoberflachenmikromechanik |