Nano-scale patterning of aluminium films by water and light:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
2003
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| Schlagworte: | |
| Online-Zugang: | http://e-collection.ethbib.ethz.ch/show?type=diss&nr=15144 |
| Beschreibung: | Zürich, Eidgenössische Techn. Hochsch., Diss., 2003 |
| Beschreibung: | Online-Ressource |
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| spelling | Häfliger, Daniel 1974- Verfasser (DE-588)128502371 aut Nano-scale patterning of aluminium films by water and light Daniel Häfliger 2003 Online-Ressource txt rdacontent c rdamedia cr rdacarrier Zürich, Eidgenössische Techn. Hochsch., Diss., 2003 Laserlithografie (DE-588)4240927-5 gnd rswk-swf Aluminium (DE-588)4001573-7 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Aluminium (DE-588)4001573-7 s Laserlithografie (DE-588)4240927-5 s Dünnschichttechnik (DE-588)4136339-5 s DE-604 http://e-collection.ethbib.ethz.ch/show?type=diss&nr=15144 |
| spellingShingle | Häfliger, Daniel 1974- Nano-scale patterning of aluminium films by water and light Laserlithografie (DE-588)4240927-5 gnd Aluminium (DE-588)4001573-7 gnd Dünnschichttechnik (DE-588)4136339-5 gnd |
| subject_GND | (DE-588)4240927-5 (DE-588)4001573-7 (DE-588)4136339-5 (DE-588)4113937-9 |
| title | Nano-scale patterning of aluminium films by water and light |
| title_auth | Nano-scale patterning of aluminium films by water and light |
| title_exact_search | Nano-scale patterning of aluminium films by water and light |
| title_full | Nano-scale patterning of aluminium films by water and light Daniel Häfliger |
| title_fullStr | Nano-scale patterning of aluminium films by water and light Daniel Häfliger |
| title_full_unstemmed | Nano-scale patterning of aluminium films by water and light Daniel Häfliger |
| title_short | Nano-scale patterning of aluminium films by water and light |
| title_sort | nano scale patterning of aluminium films by water and light |
| topic | Laserlithografie (DE-588)4240927-5 gnd Aluminium (DE-588)4001573-7 gnd Dünnschichttechnik (DE-588)4136339-5 gnd |
| topic_facet | Laserlithografie Aluminium Dünnschichttechnik Hochschulschrift |
| url | http://e-collection.ethbib.ethz.ch/show?type=diss&nr=15144 |
| work_keys_str_mv | AT hafligerdaniel nanoscalepatterningofaluminiumfilmsbywaterandlight |