CMOS front end materials and process technology: symposium held April 22 - 24, 2003, San Francisco, California, U.S.A.
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Warrendale, Pa.
Materials Research Soc.
2003
|
| Series: | Materials Research Society symposia proceedings
765 |
| Subjects: | |
| Physical Description: | XI, 308 S. Ill., graph. Darst. |
| ISBN: | 1558997024 |
Staff View
MARC
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| 650 | 4 | |a Metal oxide semiconductors, Complementary |x Materials |v Congresses | |
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Record in the Search Index
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| genre | (DE-588)1071861417 Konferenzschrift 2003 San Francisco Calif. gnd-content |
| genre_facet | Konferenzschrift 2003 San Francisco Calif. |
| id | DE-604.BV017820255 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T19:22:11Z |
| institution | BVB |
| isbn | 1558997024 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-010697273 |
| oclc_num | 53233488 |
| open_access_boolean | |
| owner | DE-29T DE-83 |
| owner_facet | DE-29T DE-83 |
| physical | XI, 308 S. Ill., graph. Darst. |
| publishDate | 2003 |
| publishDateSearch | 2003 |
| publishDateSort | 2003 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society symposia proceedings |
| series2 | Materials Research Society symposia proceedings |
| spelling | CMOS front end materials and process technology symposium held April 22 - 24, 2003, San Francisco, California, U.S.A. ed.: Tsu-Jae King ... CMOS front-end materials and process technology Warrendale, Pa. Materials Research Soc. 2003 XI, 308 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society symposia proceedings 765 Dielectrics Congresses Gate array circuits Materials Congresses Metal oxide semiconductors Materials Congresses Metal oxide semiconductors, Complementary Materials Congresses Nanostructured materials Congresses CMOS (DE-588)4010319-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2003 San Francisco Calif. gnd-content CMOS (DE-588)4010319-5 s DE-604 King, Tsu-Jae Sonstige oth Materials Research Society symposia proceedings 765 (DE-604)BV001899105 765 |
| spellingShingle | CMOS front end materials and process technology symposium held April 22 - 24, 2003, San Francisco, California, U.S.A. Materials Research Society symposia proceedings Dielectrics Congresses Gate array circuits Materials Congresses Metal oxide semiconductors Materials Congresses Metal oxide semiconductors, Complementary Materials Congresses Nanostructured materials Congresses CMOS (DE-588)4010319-5 gnd |
| subject_GND | (DE-588)4010319-5 (DE-588)1071861417 |
| title | CMOS front end materials and process technology symposium held April 22 - 24, 2003, San Francisco, California, U.S.A. |
| title_alt | CMOS front-end materials and process technology |
| title_auth | CMOS front end materials and process technology symposium held April 22 - 24, 2003, San Francisco, California, U.S.A. |
| title_exact_search | CMOS front end materials and process technology symposium held April 22 - 24, 2003, San Francisco, California, U.S.A. |
| title_full | CMOS front end materials and process technology symposium held April 22 - 24, 2003, San Francisco, California, U.S.A. ed.: Tsu-Jae King ... |
| title_fullStr | CMOS front end materials and process technology symposium held April 22 - 24, 2003, San Francisco, California, U.S.A. ed.: Tsu-Jae King ... |
| title_full_unstemmed | CMOS front end materials and process technology symposium held April 22 - 24, 2003, San Francisco, California, U.S.A. ed.: Tsu-Jae King ... |
| title_short | CMOS front end materials and process technology |
| title_sort | cmos front end materials and process technology symposium held april 22 24 2003 san francisco california u s a |
| title_sub | symposium held April 22 - 24, 2003, San Francisco, California, U.S.A. |
| topic | Dielectrics Congresses Gate array circuits Materials Congresses Metal oxide semiconductors Materials Congresses Metal oxide semiconductors, Complementary Materials Congresses Nanostructured materials Congresses CMOS (DE-588)4010319-5 gnd |
| topic_facet | Dielectrics Congresses Gate array circuits Materials Congresses Metal oxide semiconductors Materials Congresses Metal oxide semiconductors, Complementary Materials Congresses Nanostructured materials Congresses CMOS Konferenzschrift 2003 San Francisco Calif. |
| volume_link | (DE-604)BV001899105 |
| work_keys_str_mv | AT kingtsujae cmosfrontendmaterialsandprocesstechnologysymposiumheldapril22242003sanfranciscocaliforniausa AT kingtsujae cmosfrontendmaterialsandprocesstechnology |