CMOS front end materials and process technology: symposium held April 22 - 24, 2003, San Francisco, California, U.S.A.
Gespeichert in:
Format: | Buch |
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Sprache: | English |
Veröffentlicht: |
Warrendale, Pa.
Materials Research Soc.
2003
|
Schriftenreihe: | Materials Research Society symposia proceedings
765 |
Schlagworte: | |
Beschreibung: | XI, 308 S. Ill., graph. Darst. |
ISBN: | 1558997024 |
Internformat
MARC
LEADER | 00000nam a2200000 cb4500 | ||
---|---|---|---|
001 | BV017820255 | ||
003 | DE-604 | ||
005 | 20040202 | ||
007 | t | ||
008 | 040202s2003 ad|| |||| 10||| eng d | ||
020 | |a 1558997024 |9 1-55899-702-4 | ||
035 | |a (OCoLC)53233488 | ||
035 | |a (DE-599)BVBBV017820255 | ||
040 | |a DE-604 |b ger |e rakwb | ||
041 | 0 | |a eng | |
049 | |a DE-29T |a DE-83 | ||
050 | 0 | |a TK7871.99.M44 | |
082 | 0 | |a 621.39/732 |2 22 | |
084 | |a UD 8400 |0 (DE-625)145545: |2 rvk | ||
245 | 1 | 0 | |a CMOS front end materials and process technology |b symposium held April 22 - 24, 2003, San Francisco, California, U.S.A. |c ed.: Tsu-Jae King ... |
246 | 1 | 3 | |a CMOS front-end materials and process technology |
264 | 1 | |a Warrendale, Pa. |b Materials Research Soc. |c 2003 | |
300 | |a XI, 308 S. |b Ill., graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
490 | 1 | |a Materials Research Society symposia proceedings |v 765 | |
650 | 4 | |a Dielectrics |v Congresses | |
650 | 4 | |a Gate array circuits |x Materials |v Congresses | |
650 | 4 | |a Metal oxide semiconductors |x Materials |v Congresses | |
650 | 4 | |a Metal oxide semiconductors, Complementary |x Materials |v Congresses | |
650 | 4 | |a Nanostructured materials |v Congresses | |
650 | 0 | 7 | |a CMOS |0 (DE-588)4010319-5 |2 gnd |9 rswk-swf |
655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 2003 |z San Francisco Calif. |2 gnd-content | |
689 | 0 | 0 | |a CMOS |0 (DE-588)4010319-5 |D s |
689 | 0 | |5 DE-604 | |
700 | 1 | |a King, Tsu-Jae |e Sonstige |4 oth | |
830 | 0 | |a Materials Research Society symposia proceedings |v 765 |w (DE-604)BV001899105 |9 765 | |
999 | |a oai:aleph.bib-bvb.de:BVB01-010697273 |
Datensatz im Suchindex
_version_ | 1804130510752972800 |
---|---|
any_adam_object | |
building | Verbundindex |
bvnumber | BV017820255 |
callnumber-first | T - Technology |
callnumber-label | TK7871 |
callnumber-raw | TK7871.99.M44 |
callnumber-search | TK7871.99.M44 |
callnumber-sort | TK 47871.99 M44 |
callnumber-subject | TK - Electrical and Nuclear Engineering |
classification_rvk | UD 8400 |
ctrlnum | (OCoLC)53233488 (DE-599)BVBBV017820255 |
dewey-full | 621.39/732 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 621 - Applied physics |
dewey-raw | 621.39/732 |
dewey-search | 621.39/732 |
dewey-sort | 3621.39 3732 |
dewey-tens | 620 - Engineering and allied operations |
discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
format | Book |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01670nam a2200433 cb4500</leader><controlfield tag="001">BV017820255</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20040202 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">040202s2003 ad|| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1558997024</subfield><subfield code="9">1-55899-702-4</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)53233488</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV017820255</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-29T</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7871.99.M44</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.39/732</subfield><subfield code="2">22</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UD 8400</subfield><subfield code="0">(DE-625)145545:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">CMOS front end materials and process technology</subfield><subfield code="b">symposium held April 22 - 24, 2003, San Francisco, California, U.S.A.</subfield><subfield code="c">ed.: Tsu-Jae King ...</subfield></datafield><datafield tag="246" ind1="1" ind2="3"><subfield code="a">CMOS front-end materials and process technology</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Warrendale, Pa.</subfield><subfield code="b">Materials Research Soc.</subfield><subfield code="c">2003</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XI, 308 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Materials Research Society symposia proceedings</subfield><subfield code="v">765</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Dielectrics</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Gate array circuits</subfield><subfield code="x">Materials</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Metal oxide semiconductors</subfield><subfield code="x">Materials</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Metal oxide semiconductors, Complementary</subfield><subfield code="x">Materials</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Nanostructured materials</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">CMOS</subfield><subfield code="0">(DE-588)4010319-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">2003</subfield><subfield code="z">San Francisco Calif.</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">CMOS</subfield><subfield code="0">(DE-588)4010319-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">King, Tsu-Jae</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Materials Research Society symposia proceedings</subfield><subfield code="v">765</subfield><subfield code="w">(DE-604)BV001899105</subfield><subfield code="9">765</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-010697273</subfield></datafield></record></collection> |
genre | (DE-588)1071861417 Konferenzschrift 2003 San Francisco Calif. gnd-content |
genre_facet | Konferenzschrift 2003 San Francisco Calif. |
id | DE-604.BV017820255 |
illustrated | Illustrated |
indexdate | 2024-07-09T19:22:11Z |
institution | BVB |
isbn | 1558997024 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-010697273 |
oclc_num | 53233488 |
open_access_boolean | |
owner | DE-29T DE-83 |
owner_facet | DE-29T DE-83 |
physical | XI, 308 S. Ill., graph. Darst. |
publishDate | 2003 |
publishDateSearch | 2003 |
publishDateSort | 2003 |
publisher | Materials Research Soc. |
record_format | marc |
series | Materials Research Society symposia proceedings |
series2 | Materials Research Society symposia proceedings |
spelling | CMOS front end materials and process technology symposium held April 22 - 24, 2003, San Francisco, California, U.S.A. ed.: Tsu-Jae King ... CMOS front-end materials and process technology Warrendale, Pa. Materials Research Soc. 2003 XI, 308 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society symposia proceedings 765 Dielectrics Congresses Gate array circuits Materials Congresses Metal oxide semiconductors Materials Congresses Metal oxide semiconductors, Complementary Materials Congresses Nanostructured materials Congresses CMOS (DE-588)4010319-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2003 San Francisco Calif. gnd-content CMOS (DE-588)4010319-5 s DE-604 King, Tsu-Jae Sonstige oth Materials Research Society symposia proceedings 765 (DE-604)BV001899105 765 |
spellingShingle | CMOS front end materials and process technology symposium held April 22 - 24, 2003, San Francisco, California, U.S.A. Materials Research Society symposia proceedings Dielectrics Congresses Gate array circuits Materials Congresses Metal oxide semiconductors Materials Congresses Metal oxide semiconductors, Complementary Materials Congresses Nanostructured materials Congresses CMOS (DE-588)4010319-5 gnd |
subject_GND | (DE-588)4010319-5 (DE-588)1071861417 |
title | CMOS front end materials and process technology symposium held April 22 - 24, 2003, San Francisco, California, U.S.A. |
title_alt | CMOS front-end materials and process technology |
title_auth | CMOS front end materials and process technology symposium held April 22 - 24, 2003, San Francisco, California, U.S.A. |
title_exact_search | CMOS front end materials and process technology symposium held April 22 - 24, 2003, San Francisco, California, U.S.A. |
title_full | CMOS front end materials and process technology symposium held April 22 - 24, 2003, San Francisco, California, U.S.A. ed.: Tsu-Jae King ... |
title_fullStr | CMOS front end materials and process technology symposium held April 22 - 24, 2003, San Francisco, California, U.S.A. ed.: Tsu-Jae King ... |
title_full_unstemmed | CMOS front end materials and process technology symposium held April 22 - 24, 2003, San Francisco, California, U.S.A. ed.: Tsu-Jae King ... |
title_short | CMOS front end materials and process technology |
title_sort | cmos front end materials and process technology symposium held april 22 24 2003 san francisco california u s a |
title_sub | symposium held April 22 - 24, 2003, San Francisco, California, U.S.A. |
topic | Dielectrics Congresses Gate array circuits Materials Congresses Metal oxide semiconductors Materials Congresses Metal oxide semiconductors, Complementary Materials Congresses Nanostructured materials Congresses CMOS (DE-588)4010319-5 gnd |
topic_facet | Dielectrics Congresses Gate array circuits Materials Congresses Metal oxide semiconductors Materials Congresses Metal oxide semiconductors, Complementary Materials Congresses Nanostructured materials Congresses CMOS Konferenzschrift 2003 San Francisco Calif. |
volume_link | (DE-604)BV001899105 |
work_keys_str_mv | AT kingtsujae cmosfrontendmaterialsandprocesstechnologysymposiumheldapril22242003sanfranciscocaliforniausa AT kingtsujae cmosfrontendmaterialsandprocesstechnology |