APA-Zitierstil (7. Ausg.)

(2003). CMOS front end materials and process technology: Symposium held April 22 - 24, 2003, San Francisco, California, U.S.A. Materials Research Soc.

Chicago-Zitierstil (17. Ausg.)

CMOS Front End Materials and Process Technology: Symposium Held April 22 - 24, 2003, San Francisco, California, U.S.A. Warrendale, Pa: Materials Research Soc, 2003.

MLA-Zitierstil (9. Ausg.)

CMOS Front End Materials and Process Technology: Symposium Held April 22 - 24, 2003, San Francisco, California, U.S.A. Materials Research Soc, 2003.