Papers from the 47th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication: 27 - 30 May 2003, Marriott Waterside, Tampa, FL
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York
American Inst. of Physics
2003
|
| Schriftenreihe: | Journal of vacuum science and technology / B
21,6 |
| Schlagworte: | |
| Beschreibung: | Einzelaufn. eines Zeitschr.-H. |
| Beschreibung: | S. 2623 - 3193 Ill., graph. Darst. |
Internformat
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| 111 | 2 | |a International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |n 47 |d 2003 |c Tampa, Fla. |j Verfasser |0 (DE-588)5557452-X |4 aut | |
| 245 | 1 | 0 | |a Papers from the 47th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |b 27 - 30 May 2003, Marriott Waterside, Tampa, FL |c ed. for the proceedings: Mark L. Schattenburg |
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Datensatz im Suchindex
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| id | DE-604.BV017803908 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T19:22:03Z |
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| institution_GND | (DE-588)5557452-X |
| language | English |
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| physical | S. 2623 - 3193 Ill., graph. Darst. |
| publishDate | 2003 |
| publishDateSearch | 2003 |
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| publisher | American Inst. of Physics |
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| series2 | Journal of vacuum science and technology / B |
| spelling | International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 47 2003 Tampa, Fla. Verfasser (DE-588)5557452-X aut Papers from the 47th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 27 - 30 May 2003, Marriott Waterside, Tampa, FL ed. for the proceedings: Mark L. Schattenburg New York American Inst. of Physics 2003 S. 2623 - 3193 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science and technology / B 21,6 Einzelaufn. eines Zeitschr.-H. Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Teilchenstrahl (DE-588)4165339-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2003 Tampa Fla. gnd-content Nanotechnologie (DE-588)4327470-5 s Teilchenstrahl (DE-588)4165339-7 s DE-604 Schattenburg, Mark L. Sonstige oth |
| spellingShingle | Papers from the 47th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 27 - 30 May 2003, Marriott Waterside, Tampa, FL Nanotechnologie (DE-588)4327470-5 gnd Teilchenstrahl (DE-588)4165339-7 gnd |
| subject_GND | (DE-588)4327470-5 (DE-588)4165339-7 (DE-588)1071861417 |
| title | Papers from the 47th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 27 - 30 May 2003, Marriott Waterside, Tampa, FL |
| title_auth | Papers from the 47th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 27 - 30 May 2003, Marriott Waterside, Tampa, FL |
| title_exact_search | Papers from the 47th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 27 - 30 May 2003, Marriott Waterside, Tampa, FL |
| title_full | Papers from the 47th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 27 - 30 May 2003, Marriott Waterside, Tampa, FL ed. for the proceedings: Mark L. Schattenburg |
| title_fullStr | Papers from the 47th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 27 - 30 May 2003, Marriott Waterside, Tampa, FL ed. for the proceedings: Mark L. Schattenburg |
| title_full_unstemmed | Papers from the 47th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 27 - 30 May 2003, Marriott Waterside, Tampa, FL ed. for the proceedings: Mark L. Schattenburg |
| title_short | Papers from the 47th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| title_sort | papers from the 47th international conference on electron ion and photon beam technology and nanofabrication 27 30 may 2003 marriott waterside tampa fl |
| title_sub | 27 - 30 May 2003, Marriott Waterside, Tampa, FL |
| topic | Nanotechnologie (DE-588)4327470-5 gnd Teilchenstrahl (DE-588)4165339-7 gnd |
| topic_facet | Nanotechnologie Teilchenstrahl Konferenzschrift 2003 Tampa Fla. |
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