Rapid thermal processing for future semiconductor devices: proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RIP 2001) held at Ise-Shima, Mie, Japan, November 14 - 16, 2001
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Amsterdam [u.a.]
Elsevier
2003
|
| Ausgabe: | 2. impr. |
| Schlagworte: | |
| Beschreibung: | X, 150 S. Ill., graph. Darst. |
| ISBN: | 0444513396 |
Internformat
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Datensatz im Suchindex
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| discipline | Physik |
| edition | 2. impr. |
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| genre_facet | Konferenzschrift 2001 Ise |
| id | DE-604.BV017541902 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T19:19:10Z |
| institution | BVB |
| institution_GND | (DE-588)10125010-1 |
| isbn | 0444513396 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-010561392 |
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| physical | X, 150 S. Ill., graph. Darst. |
| publishDate | 2003 |
| publishDateSearch | 2003 |
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| publisher | Elsevier |
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| spelling | Rapid thermal processing for future semiconductor devices proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RIP 2001) held at Ise-Shima, Mie, Japan, November 14 - 16, 2001 ed. by Hisashi Fukuda 2. impr. Amsterdam [u.a.] Elsevier 2003 X, 150 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Halbleiter (DE-588)4022993-2 gnd rswk-swf Rapid thermal processing (DE-588)4347011-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2001 Ise gnd-content Halbleiter (DE-588)4022993-2 s Rapid thermal processing (DE-588)4347011-7 s DE-604 Fukuda, Hisashi Sonstige oth International Conference on Rapid Thermal Processing for Future Semiconductor Devices 2 2001 Ise-Shima Sonstige (DE-588)10125010-1 oth |
| spellingShingle | Rapid thermal processing for future semiconductor devices proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RIP 2001) held at Ise-Shima, Mie, Japan, November 14 - 16, 2001 Halbleiter (DE-588)4022993-2 gnd Rapid thermal processing (DE-588)4347011-7 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4347011-7 (DE-588)1071861417 |
| title | Rapid thermal processing for future semiconductor devices proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RIP 2001) held at Ise-Shima, Mie, Japan, November 14 - 16, 2001 |
| title_auth | Rapid thermal processing for future semiconductor devices proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RIP 2001) held at Ise-Shima, Mie, Japan, November 14 - 16, 2001 |
| title_exact_search | Rapid thermal processing for future semiconductor devices proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RIP 2001) held at Ise-Shima, Mie, Japan, November 14 - 16, 2001 |
| title_full | Rapid thermal processing for future semiconductor devices proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RIP 2001) held at Ise-Shima, Mie, Japan, November 14 - 16, 2001 ed. by Hisashi Fukuda |
| title_fullStr | Rapid thermal processing for future semiconductor devices proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RIP 2001) held at Ise-Shima, Mie, Japan, November 14 - 16, 2001 ed. by Hisashi Fukuda |
| title_full_unstemmed | Rapid thermal processing for future semiconductor devices proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RIP 2001) held at Ise-Shima, Mie, Japan, November 14 - 16, 2001 ed. by Hisashi Fukuda |
| title_short | Rapid thermal processing for future semiconductor devices |
| title_sort | rapid thermal processing for future semiconductor devices proceedings of the 2001 international conference on rapid thermal processing for future semiconductor devices rip 2001 held at ise shima mie japan november 14 16 2001 |
| title_sub | proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RIP 2001) held at Ise-Shima, Mie, Japan, November 14 - 16, 2001 |
| topic | Halbleiter (DE-588)4022993-2 gnd Rapid thermal processing (DE-588)4347011-7 gnd |
| topic_facet | Halbleiter Rapid thermal processing Konferenzschrift 2001 Ise |
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