Handbook of surface and nanometrology:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Bristol [u.a.]
Inst. of Physics Publ.
2003
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Revised and expanded ed. of Handbook of surface metrology |
| Beschreibung: | XX, 1150 S. graph. Darst. |
| ISBN: | 0750305835 |
Internformat
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| 245 | 1 | 0 | |a Handbook of surface and nanometrology |c David J. Whitehouse |
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Datensatz im Suchindex
| _version_ | 1804130271504629760 |
|---|---|
| adam_text | HANDBOOK OF SURFACE AND NANOMETROLOGY DAVID J WHITEHOUSE UNIVERSITY OF
WARWICK LOP INSTITUTE OF PHYSICS PUBLISHING BRISTOL AND PHILADEPHIA
CONTENTS CONTENTS PREFACE ACKNOWLEDGMENTS CHAPTER 1 GENERAL PHILOSOPHY
OF MEASUREMENT 1.1 WHERE DOES SURFACE METROLOGY FIT IN GENERAL
METROLOGY, AND WHAT ABOUT NANOMETROLOGY? 1.2 IMPORTANCE OF SURFACE
METROLOGY CHAPTER 2 SURFACE CHARACTERIZATION: THE NATURE OF SURFACES
XVLL XIX 2.1 2.2 2.3 2.4 2.5 2.6 SURFACE ROUGHNESS CHARACTERIZATION
2.7.7 PROFILE PARAMETERS REFERENCE LINES STATISTICAL PARAMETERS OF
SURFACE ROUGHNESS AREAL TEXTURE PARAMETERS, ISOTROPY AND LAY (CONTINUOUS
SIGNAL) DISCRETE CHARACTERIZATION ASSESSMENT OF ISOTROPY AND LAY .
POTENTIAL METHODS OF CHARACTERIZATION FRACTALS SURFACE TEXTURE AND
NON-LINEAR DYNAMICS IN MACHINES 2.1.2 2.1.3 2.1.4 2.1.5 2.1.6 2.1.7
2.1.8 2.1.9 WAVINESS I; ERRORS OF FORM 2.3.1 INTRODUCTION 2.3.2
STRAIGHTNESS AND RELATED TOPICS 2.3.3 GENERALIZED PROBE CONFIGURATIONS
FOR VARIABLE ERRORS 2.3.4 ASSESSMENTS AND CLASSIFICATION 2.3.5 FLATNESS
2.3.6 ROUNDNESS 2.3.7 CYLINDRICITY COMPARISON OF DEFINITIONS FOR SURFACE
METROLOGY AND COORDINATE-MEASURING MACHINES 2.4.7 OTHER DIFFERENCES
CHARACTERIZATION OF DEFECT SHAPES ON THE SURFACE 2.5.7 GENERAL 2.5.2
DIMENSIONAL CHARACTERISTICS OF DEFECTS 2.5.3 TYPES OF DEFECT SUMMARY
REFERENCES 13 26 49 78 89 94 97 123 129 130 139 139 142 143 144 146 152
208 223 225 226 226 227 227 229 229 VIII CONTENTS CHAPTER 3 PROCESSING
233 3.1 DIGITAL METHODS 233 3.1.1 SAMPLING * . -*- ^ 3.1.2 QUANTIZATION
237 3.1.3 NUMERICAL ANALYSIS * THE DIGITAL MODEL 231 3.2 DIGITAL
PROPERTIES OF RANDOM SURFACES 242 3.2.1 SOME NUMERICAL PROBLEMS
ENCOUNTERED IN SURFACE METROLOGY 242 3.2.2 DEFINITIONS OF A PEAK AND
DENSITY OF PEAKS [2] 24 2 3.2.3 EFFECT OF QUANTIZATION 242 3.2.4 EFFECT
OF NUMERICAL MODEL 244 3.2.5 EFFECT OF DISTANCE BETWEEN SAMPLES ON THE
PEAK DENSITY VALUE 246 3.2.6 DIGITAL EVALUATION OF OTHER IMPORTANT PEAK
PARAMETERS 250 3.2.7 AREAL (TWO-DIMENSIONAL) DIGITAL MEASUREMENT OF
SURFACE ROUGHNESS PARAMETERS 260 3.2.8 PATTERNS OF SAMPLING AND THEIR
EFFECT ON DISCRETE PROPERTIES 267 3.3 FOURIER TRANSFORM AND THE FAST
FOURIER TRANSFORM 280 3.3.1 GENERAL PROPERTIES OF THE FOURIER TRANSFORM
280 3.3.2 FAST FOURIER TRANSFORM ROUTINE 282 3.3.3 A PRACTICAL
REALIZATION OF THE FAST FOURIER TRANSFORM 286 3.3.4 GENERAL
CONSIDERATIONS 287 3.3.5 APPLICATIONS OF FOURIER TRANSFORMS WITH
PARTICULAR REFERENCE TO THE FFT 288 3.4 STATISTICAL PARAMETERS IN
DIGITAL FORM 291 3.4.1 AMPLITUDE PROBABILITY DENSITY FUNCTION 291 3.4.2
STATISTICAL MOMENTS OFTHEAPDF 292 3.4.3 AUTOCORRELATION FUNCTION (ACF)
293 3.4.4 AUTOCORRELATION MEASUREMENT USING FFT 294 3.4.5 MEASUREMENT
OF POWER SPECTRAL DENSITY, ( PSD ) 295 3.5 PROPERTIES AND IMPLEMENTATION
OF THE AMBIGUITY FUNCTION AND WIGNER DISTRIBUTION FUNCTION 297 3.5.7
GENERAL 297 3.5.2 AMBIGUITY FUNCTION 297 3.5.3 THE WIGNER DISTRIBUTION
FUNCTION 299 3.5.4 SOME EXAMPLES OF WIGNER DISTRIBUTION: APPLICATION TO
SIGNALS * WAVINESS 303 3.5.5 COMPARISON OF THE FOURIER TRANSFORM, THE
AMBIGUITY FUNCTION, THE WIGNER DISTRIBUTION FUNCTION AND WAVELET
TRANSFORM 305 3.6 DIGITAL ESTIMATION OF REFERENCE LINES FOR SURFACE
METROLOGY 305 3.6.1 NUMERICAL FILTERING METHODS FOR ESTABLISHING MEAN
LINES FOR ROUGHNESS AND WAVINESS PROFILES 305 3.6.2 CONVOLUTION
FILTERING 306 3.6.3 STANDARD FILTER . 306 3.6.4 PHASE-CORRECTED (LINEAR
PHASE ) FILTERS, OTHER FILTERS AND FILTERING ISSUES 307 3.6.5
GAUSSIANFILTER 309 3.6.6 BOX FUNCTIONS 312 3.6.7 TRUNCATION 313 3.6.8
ALTERNATIVE METHODS OF COMPUTATION 315 CONTENTS 3.6.9 EQUAL-WEIGHT
TECHNIQUES 316 3.6.10 RECURSIVE FILTERS 318 3.6.11 THE DISCRETE TRANSFER
FUNCTION 318 3.6.12 THE 2CR FILTER * 322 3.6.13 USE OF THE FFT IN
SURFACE METROLOGY FILTERING * AREAL CASE 323 3.6.14 EXAMPLES OF
NUMERICAL PROBLEMS IN STRAIGHTNESS AND FLATNESS 324 3.6.15 EFFECT OF
COMPUTER WORD FORMAT 326 3.7 ALGORITHMS 328 3.7.1 DIFFERENCES BETWEEN
SURFACE AND DIMENSIONAL METROLOGY ALGORITHMS: LEAST-SQUARES EVALUATION
OF GEOMETRIC ELEMENTS 328 3.7.2 BEST-FIT SHAPES 330 3.7.3 OTHER METHODS
339 3.7.4 MINIMAX METHODS * CONSTRAINED OPTIMIZATION 340 3.7.5 SIMPLEX
METHODS 340 3.7.6 BASIC CONCEPTS IN LINEAR PROGRAMMING 343 3.8
TRANSFORMATIONS IN SURFACE METROLOGY 351 3.8.1 GENERAL 351 3.8.2 HARTLEY
TRANSFORM 351 3.8.3 SQUARE WAVE FUNCTIONS * WALSH FUNCTIONS 352 3.8.4
SPACE*FREQUENCY FUNCTIONS 354 3.8.5 GABOR TRANSFORMS 356 3.9 SURFACE
GENERATION 358 3.9.1 PROFILE GENERATION 358 3.9.2 TWO-DIMENSIONAL
SURFACE GENERATION 362 REFERENCES 366 CHAPTER 4 INSTRUMENTATION 369 4.1
INTRODUCTION AND HISTORY , 369 4.7.7 HISTORICAL DETAILS 369 4.1.2 SOME
EARLY DATES OF IMPORTANCE IN THE METROLOGY AND PRODUCTION OF SURFACES
370 4.1.3 SPECIFICATION 372 4.1.4 DESIGN CRITERIA FOR INSTRUMENTATION
373 4.1.5 KINEMATICS 373 4.7.6 PSEUDO-KINEMATIC DESIGN 377 4.1.7
MOBILITY 377 4.1.8 LINEAR HINGE MECHANISMS 379 4.7.9 ANGULAR MOTION
FLEXURES 382 4.1.10 MEASUREMENT AND FORCE LOOPS 383 4.1.11 ALIGNMENT
ERRORS 393 4.1.12 OTHER MECHANICAL CONSIDERATIONS * BALANCE OF FORCES
394 4.1.13 SYSTEMATIC ERRORS AND NON-LINEARITIES 395 4.1.14 MATERIAL
SELECTION 396 4.1.15 DRIVE SYSTEMS 399 4.2 MEASUREMENT SYSTEMS 400 4.2.7
ASPECT OF GENERAL STYLUS SYSTEMS 400 4.2.2 STYLUS CHARACTERISTICS 401
CONTENTS 4.3 4.4 4.5 4.6 4.7 4.8 4.9 4.2.3 4.2.4 4.2.5 OPTICAL 4.3.1
4.3.2 4.3.3 4.3.4 4.3.5 4.3.6 4.3.7 4.3.8 4.3.9 4.3.10 4.3.11 4.3.12
4.3.13 4.3.14 SCANNING PROBE MICROSCOPES [48 *57/ ( SPM) ASPECTS OF
STYLUS INSTRUMENTS AREA (3D) MAPPING OF SURFACES USING STYLUS METHODS 1
TECHNIQUES FOR THE MEASUREMENT OF SURFACES GENERAL PROPERTIES OF THE
FOCUSED SPOT OPTICAL FOLLOWERS HYBRID MICROSCOPES OBLIQUE ANGLE METHODS
PHASE DETECTION SYSTEMS HETERODYNE METHODS MOIRE METHODS [133]
HOLOGRAPHIC TECHNIQUES SPECKLE METHODS DIFFRACTION METHODS
SCATTEROMETERS (GLOSSMETERS) FLAW DETECTION COMPARISON OF OPTICAL
TECHNIQUES CAPACITANCE TECHNIQUES FOR MEASURING SURFACES 4.4.7 4.4.2
4.4.3 GENERAL SCANNING CAPACITATIVE MICROSCOPES CAPACITANCE AS A
PROXIMITY GAUGE INDUCTANCE TECHNIQUE FOR MEASURING SURFACES IMPEDANCE
TECHNIQUE * SKIN EFFECT OTHER NON-STANDARD TECHNIQUES 4.7.7 4.7.2 4.7.3
4.7.4 4.7.5 4.7.6 4.7.7 4.7.8 4.7.9 GENERAL FRICTION DEVICES
ROLLING-BALL DEVICE LIQUID METHODS * WATER LIQUID METHODS * OILS
PNEUMATIC METHODS THERMAL METHOD ULTRASONICS SUMMARY ELECTRON MICROSCOPY
4.S.7 4.8.2 4.8.3 4.8.4 4.8.5 GENERAL REACTION OF ELECTRONS WITH SOLIDS
SCANNING ELECTRON MICROSCOPE (SEM) TRANSMISSION ELECTRON MICROSCOPE
(TEM) PHOTON TUNNELLING MICROSCOPY (PTM) MERIT OF TRANSDUCERS 4.9.7
4.9.2 4.9.3 4.9.4 4.9.5 4.9.6 COMPARISON OF TRANSDUCER SYSTEMS TYPES OF
CONVERSION AND TRANSDUCER NOISE TYPES OF CONVERSION AND TYPES OF
TRANSDUCER MERIT AND COST EXAMPLES OF TRANSDUCER PROPERTIES TALYSTEP 435
457 479 491 491 496 497 503 506 508 515 529 533 538 547 560 565 575 576
576 579 580 580 580 580 580 581 581 581 582 582 583 583 585 585 585 588
590 592 592 594 595 597 598 605 605 609 CONTENTS XI 4.9.7 COMPARISON OF
TECHNIQUES * GENERAL SUMMARY 613 REFERENCES 615 CHAPTER 5
TRACEABILITY*STANDARDIZATION*VARIABILITY 621 5.1 INTRODUCTION 621 5.2
NATURE OF ERRORS 621 5.2.7 SYSTEMATIC ERRORS 622 5.2.2 RANDOM ERRORS 622
5.3 DETERMINISTIC OR SYSTEMATIC ERROR MODEL 622 5.4 BASIC COMPONENTS OF
ACCURACY EVALUATION 623 5.5 BASIC ERROR THEORY FOR A SYSTEM 624 5.6
PROPAGATION OF ERRORS 625 5.6.7 DETERMINISTIC ERRORS 625 5.6.2 RANDOM
ERRORS 627 5.7 SOME USEFUL STATISTICAL TESTS FOR SURFACE METROLOGY 627
5.7.7 CONFIDENCE INTERVALS FOR ANY PARAMETER 628 5.7.2 TESTS FOR THE
MEAN VALUE OF A SURFACE * THE STUDENT T TEST 628 5.7.3 TESTS FOR THE
STANDARD DEVIATION * THE C2 TEST 630 5.7.4 GOODNESS OF FIT 630 5.7.5
TESTS FOR VARIANCE * THE F TEST 631 5.7.6 MEASUREMENT OF
RELEVANCE*FACTORIAL DESIGN 631 5.7.7 LINES OF REGRESSION 634 5.7.8
METHODS OF DISCRIMINATION 635 5.8 UNCERTAINTY IN INSTRUMENTS*CALIBRATION
IN GENERAL 636 5.9 THE CALIBRATION OF STYLUS INSTRUMENTS 638 5.9.7
STYLUS CALIBRATION 639 5.9.2 CALIBRATION OF AMPLIFICATION , 643 5.9.3
X-RAY METHODS 651 5.9.4 PRACTICAL STANDARDS 657 5.9.5 CALIBRATION OF
TRANSMISSION CHARACTERISTICS 659 5.9.6 FILTER CALIBRATION STANDARDS 661
5.10 CALIBRATION OF FORM INSTRUMENTS 663 5.70.7 MAGNITUDE 663 5.10.2
SEPARATION OF ERRORS * CALIBRATION OF ROUNDNESS AND FORM 665 5.70J
GENERAL ERRORS DUE TO MOTION 612 5.11 VARIABILITY OF SURFACE PARAMETERS
680 5.12 NATIONAL AND INTERNATIONAL STANDARDS 684 5.72.7 GEOMETRICAL
PRODUCT SPECIFICATION (GPS) 685 5.72.2 CHAIN OF STANDARDS 687 5.12.3
SURFACE STANDARDIZATION 687 5.12.4 ROLE OF TECHNICAL SPECIFICATION
DOCUMENTS 689 5.12.6 SELECTED LIST OF INTERNATIONAL STANDARDS APPLICABLE
TO SURFACE ROUGHNESS MEASUREMENT: METHODS; PARAMETERS; INSTRUMENTS;
COMPARISON SPECIMENS 690 5.12.7 INTERNATIONAL (EQUIVALENTS, IDENTICALS
AND SIMILARS) 691 XU CONTENTS 5.13 SPECIFICATION ON DRAWINGS 5.13.1
SURFACE ROUGHNESS 5.14 SUMMARY REFERENCES 695 695 700 701 CHAPTER 6
SURFACE METROLOGY IN MANUFACTURE 6.1 6.2 6.3 6.4 6.5 6.6 6.7
INTRODUCTION MANUFACTURING PROCESSES 6.2.7 CUTTINJ 6.3.1 6.3.2 6.3.3
6.3.4 GENERAL T TURNING DIAMOND TURNING MILLING AND BROACHING DRY
CUTTING ABRASIVE PROCESSES 6.4.7 6.4.2 6.4.3 6.4.4 6.4.5 6.4.6 6.4.7
6.4.8 6.4.9 6.4.10 6.4.11 GENERAL TYPES OF GRINDING COMMENTS ON GRINDING
NATURE OF THE GRINDING PROCESS CENTRELESS GRINDING (FIGURE 6.44)
CYLINDRICAL GRINDING GENERAL COMMENTS ON GRINDING NANOGRINDING GENERAL
COMMENTS ON ROUGHNESS HONING POLISHING (LAPPING) UNCONVENTIONAL
MACHINING 6.5.7 6.5.2 6.5.3 6.5.4 6.5.5 6.5.6 6.5.7 ULTRASONIC MACHINING
MAGNETIC FLOAT POLISHING PHYSICAL AND CHEMICAL MACHINING FORMING
PROCESSES MICRO- AND NANOMACHINING ATOMIC-SCALE MACHINING STRUCTURED
SURFACES * ENGINEERED SURFACES WAYS OF MAKING STRUCTURED SURFACES 6.6.7
6.6.2 6.6.3 GENERAL THE INTERFACE GENERAL DESIGN POINTS SURFACE
INTEGRITY 6.7.7 6.7.2 6.7.3 6.7.4 6.7.5 SURFACE EFFECTS RESULTING FROM
THE MACHINING PROCESS SURFACE ALTERATIONS RESIDUAL STRESS MEASUREMENT OF
STRESSES SUB-SURFACE PROPERTIES INFLUENCING FUNCTION 6.8 SURFACE
GEOMETRY*A FINGERPRINT OF MANUFACTURE 6.8.1 GENERAL 6.8.2 USE OF RANDOM
PROCESS ANALYSIS [141] 703 703 704 704 706 706 718 720 724 725 725 730
732 732 733 737 744 745 750 756 757 761 761 762 762 765 772 779 787 789
789 790 792 793 793 794 798 806 810 813 813 814 CONTENTS XIII 6.8.3
SPACE-FREQUENCY FUNCTIONS (THE WIGNER FUNCTION) 818 6.8.4 NON-LINEAR
DYNAMICS 819 6.9 SUMMARY 823 REFERENCES . . . - 82 4 CHAPTER 7 SURFACE
GEOMETRY AND ITS IMPORTANCE IN FUNCTION 829 7.1 7.2 7.3 7.4 7.5 7.6
INTRODUCTION 7.7.7 THE FUNCTION MAP 7.1.2 - NATURE OF INTERACTION
TWO-BODY INTERACTION*THE STATIC SITUATION 7.2.7 CONTACT 7.2.2
MACROSCOPIC BEHAVIOUR 7.2.3 MICROSCOPIC BEHAVIOUR 7.2.4 EFFECT OF
WAVINESS ON CONTACT. 7.2.5 NON-GAUSSIAN SURFACES AND CONTACT 7.2.6
FRACTAL AND CONTACT 7.2.7 COATED CONTACT FUNCTIONAL PROPERTIES OF
CONTACT 7.3.1 GENERAL 7.3.2 STIFFNESS 7.3.3 MECHANICAL SEALS 7.3.4
ADHESION 7.3.5 THERMAL CONDUCTIVITY 7.3.6 RELATIONSHIP
BETWEEN-ELECTRICAL AND THERMAL CONDUCTIVITY 7.3.7 SUMMARY TWO-BODY
INTERACTIONS*DYNAMIC EFFECTS 7.4.1 GENERAL 7.4.2 FRICTION 7.4.3 WEAR
GENERAL 7.9.4 SHAKEDOWN AND SURFACE TEXTURE 7.4.5 LUBRICATION 7.4.6
INTERACTION BETWEEN TWO SURFACES VIA A FILM 7.4.7 BOUNDARY LUBRICATION
SURFACE ROUGHNESS, MECHANICAL SYSTEM LIFE AND DESIGNER SURFACES 7.5.7
WEIBULL AND DUAL-FREQUENCY-SPACE FUNCTIONS 7.5.2 RUNNING-IN PROCESS *
SHAKEDOWN 7.5.3 SURFACE ROUGHNESS ONE-NUMBER SPECIFICATION AND
RUNNING-IN 7.5.4 DESIGNER SURFACES * RUNNING-IN 7.5.5 SCUFFING 7.5.6
ROLLING FATIGUE FAILURE (PITTING, SPALLING) 7.5.7 VIBRATING EFFECTS
7.5.8 SQUEEZE FILMS AND ROUGHNESS 7.5.9 FRETTING AND FRETTING FATIGUE
ONE-BODY INTERACTIONS 7.6.7 GENERAL 7.6.2 FATIGUE 829 830 833 835 835
838 843 864 865 867 867 868 868 869 875 876 880 884 888 888 888 888 897
903 905 919 929 933 933 934 934 936 940 942 954 955 956 959 959 960
CONTENTS 7.6.3 CORROSION FATIGUE-GENERAL 965 7.6.4 CORROSION 966 7.7 ONE
BODY WITH RADIATION (OPTICAL). THE EFFECT OF ROUGHNESS ON THE SCATTERING
OF ELECTROMAGNETIC AND OTHER RADIATION 971 7.7.7 OPTICAL SCATTER-GENERAL
971 7.7.2 GENERAL OPTICAL 972 7.7.3 SMOOTH RANDOM SURFACE 976 7.7.4
GEOMETRIC RAY-TRACING CRITERION * ROUGH RANDOM SURFACES 977 7.7.5
SCATTER FROM DETERMINISTIC SURFACES 980 7.7.6 SMOOTH DETERMINISTIC
SIGNAL 981 7.7.7 GEOMETRIC RAY CONDITION, ROUGH DETERMINISTIC SURFACES
981 7.7.8 SUMMARY OF RESULTS, SCALAR AND GEOMETRICAL 982 7.7.9 MIXTURES
OF TWO RANDOM COMPONENTS 983 7.7.10 OTHER CONSIDERATIONS ON LIGHT
SCATTER 984 7.7.11 SCATTERING FROM NON-GAUSSIAN SURFACES 995 7.7.72
ASPHERICS 1003 7.8 SCATTERING BY DIFFERENT SORTS OF WAVES 1006 7.8.7
GENERAL 1006 7.8.2 SCATTERING FROM PARTICLES AND THE INFLUENCE OF
ROUGHNESS 1007 7.8.3 BRAGG SCATTERING 1007 7.9 SYSTEM FUNCTION 1011
7.9.7 SURFACE GEOMETRY AND TOLERANCES AND FITS 1011 7.9.2 TOLERANCES 101
1 7.10 DISCUSSION 1015 7.70.7 PROFILE PARAMETERS 1015 7.10.2 FUNCTIONAL
TYPES OF PARAMETER 1016 7.10.3 AREAL (3D) PARAMETERS 1017 7.10.4
FUNCTION MAPS AND SURFACE PARAMETERS 1022 7.70.5 SYSTEM APPROACH 1024
7.11 CONCLUSIONS * 1028 REFERENCES 1029 CHAPTER 8 NANOMETROLOGY 1039
8.1 INTRODUCTION . 1039 8.1.1 SCOPE OF NANOTECHNOLOGY 1039 8.1.2
NANOTECHNOLOGY AND ENGINEERING 1039 8.1.3 NANOMETROLOGY 1041 8.2 EFFECT
OF SCALE ON MANUFACTURE, FUNCTIONALITY AND INSTRUMENT DESIGN 1042 8.2.1
MACHINEABILITY 1042 8.2.2 DYNAMIC CONSIDERATIONS * HOW FORCE BALANCE
DEPENDS ON SCALE 1045 8.2.3 STRUCTURAL CONSIDERATIONS * HOW STIFFNESS
AND RESONANCE CHANGE WITH SCALE OF SIZE 1046 8.2.4 FUNCTIONAL DEPENDENCE
ON SCALE OF SIZE 1048 8.3 METROLOGY AT THE NANOSCALE 1049 8.3.1
NANOMETRE IMPLICATIONS OF GEOMETRIC SIZE 1049 8.3.2 GEOMETRIC FEATURES
AND THE SCALE OF SIZE 1049 CONTENTS 8.3.3 HOW ROUGHNESS DEPENDS ON SCALE
1050 8.3.4 SURFACE AND BULK PROPERTIES DEPENDENCE ON SCALE 1052 8.3.5
SHAPE AND (SCALE OF SIZE) 1053 8.4 STABILITY OF SIGNAL FROM METROLOGY
INSTRUMENTS AS FUNCTION OF SCALE 1057 8.4.1 LENGTH 1057 8.4.2 NANO
POSITION SENSING 1059 8.5 CALIBRATION 1060 8.5.7 GENERAL 1060 8.5.2
LENGTH AND POSITION CALIBRATION AND MEASUREMENT AT THE NANOSCALE 1060
8.5.3 THE PROBE 1062 8.5.4 HEIGHT MEASUREMENT CALIBRATION AT THE
NANOMETRE SCALE OF SIZE 1064 8.6 NOISE 1066 8.6.7 SIGNAL LIMITATIONS
1066 8.6.2 THERMAL EFFECTS 1067 8.7 CALIBRATION ARTEFACTS 1067 8.8
DYNAMICS OF CALIBRATION AT NANOMETRE LEVEL 1070 8.9 SOFTWARE CORRECTION
1071 8.10 NANOMETRE METROLOGY SYSTEMS 1072 8.10.1 SCANNING FORCE
MICROSCOPE * NANOMETROLOGY VERSION 1072 8.70.2 TRACEABILITY 1073 8.11
METHODS OF MEASURING LENGTH AND SURFACES TO NANOSCALE RESULTS WITH
INTERFEROMETERS AND OTHER DEVICES 1074 8.77.7 CONVENTIONAL 1074 8.77.2
HETERODYNE , 1074 8.11.3 FREQUENCY TRACKING * FABRY-PEROT ETALONS (FPE)
1075 8.77.4 CAPACITATIVE METHODS 1076 8.77.5 STYLUS INSTRUMENTS 1077
8.11.6 ELECTRON AND X-RAY DIFFRACTION 1078 8.12 SUMMARY , 1078
REFERENCES 1081 CHAPTER 9 SUMMARY AND CONCLUSIONS 1083 1083 1084 1087
1088 1092 1093 1094 1098 1101 1105 1119 9.1 9.2 9.3 9.4 9.5 9.6 9.7 9.8
9.9 GLOSSARY INDEX GENERAL CHARACTERIZATION DATA PROCESSING
INSTRUMENTATION CALIBRATION MANUFACTURE SURFACES AND FUNCTION
NANOMETROLOGY OVERVIEW
|
| any_adam_object | 1 |
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| discipline | Physik |
| format | Book |
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| id | DE-604.BV017470032 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T19:18:23Z |
| institution | BVB |
| isbn | 0750305835 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-010523808 |
| oclc_num | 249608294 |
| open_access_boolean | |
| owner | DE-703 DE-858 |
| owner_facet | DE-703 DE-858 |
| physical | XX, 1150 S. graph. Darst. |
| publishDate | 2003 |
| publishDateSearch | 2003 |
| publishDateSort | 2003 |
| publisher | Inst. of Physics Publ. |
| record_format | marc |
| spelling | Whitehouse, David J. Verfasser aut Handbook of surface and nanometrology David J. Whitehouse Bristol [u.a.] Inst. of Physics Publ. 2003 XX, 1150 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Revised and expanded ed. of Handbook of surface metrology Surfaces (Technology) Measurement Oberflächenanalyse (DE-588)4172243-7 gnd rswk-swf Oberflächenmessung (DE-588)4172249-8 gnd rswk-swf Nanometerbereich (DE-588)4327473-0 gnd rswk-swf Oberflächenmessung (DE-588)4172249-8 s DE-604 Oberflächenanalyse (DE-588)4172243-7 s Nanometerbereich (DE-588)4327473-0 s 1\p DE-604 GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=010523808&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Whitehouse, David J. Handbook of surface and nanometrology Surfaces (Technology) Measurement Oberflächenanalyse (DE-588)4172243-7 gnd Oberflächenmessung (DE-588)4172249-8 gnd Nanometerbereich (DE-588)4327473-0 gnd |
| subject_GND | (DE-588)4172243-7 (DE-588)4172249-8 (DE-588)4327473-0 |
| title | Handbook of surface and nanometrology |
| title_auth | Handbook of surface and nanometrology |
| title_exact_search | Handbook of surface and nanometrology |
| title_full | Handbook of surface and nanometrology David J. Whitehouse |
| title_fullStr | Handbook of surface and nanometrology David J. Whitehouse |
| title_full_unstemmed | Handbook of surface and nanometrology David J. Whitehouse |
| title_short | Handbook of surface and nanometrology |
| title_sort | handbook of surface and nanometrology |
| topic | Surfaces (Technology) Measurement Oberflächenanalyse (DE-588)4172243-7 gnd Oberflächenmessung (DE-588)4172249-8 gnd Nanometerbereich (DE-588)4327473-0 gnd |
| topic_facet | Surfaces (Technology) Measurement Oberflächenanalyse Oberflächenmessung Nanometerbereich |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=010523808&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT whitehousedavidj handbookofsurfaceandnanometrology |