Superhard nc-TiN-a-BN-a-TiB 2 and nc-MnN-a-metal nanocrystalline composite coatings:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
2003
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | München, Techn. Univ., Diss., 2003 |
| Beschreibung: | II, 154 Bl. Ill., graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV017424381 | ||
| 003 | DE-604 | ||
| 005 | 20050811 | ||
| 007 | t| | ||
| 008 | 030821s2003 xx ad|| m||| 00||| eng d | ||
| 016 | 7 | |a 968621481 |2 DE-101 | |
| 035 | |a (OCoLC)76613580 | ||
| 035 | |a (DE-599)BVBBV017424381 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-91 |a DE-12 | ||
| 084 | |a WER 480d |2 stub | ||
| 084 | |a FER 882d |2 stub | ||
| 084 | |a WER 420d |2 stub | ||
| 084 | |a CHE 380d |2 stub | ||
| 100 | 1 | |a Karvánková, Pavla |d 1976- |e Verfasser |0 (DE-588)128520612 |4 aut | |
| 245 | 1 | 0 | |a Superhard nc-TiN-a-BN-a-TiB 2 and nc-MnN-a-metal nanocrystalline composite coatings |c Pavla Karvánková |
| 264 | 1 | |c 2003 | |
| 300 | |a II, 154 Bl. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a München, Techn. Univ., Diss., 2003 | ||
| 650 | 0 | 7 | |a Bornitrid |0 (DE-588)4146352-3 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Nanostrukturiertes Material |0 (DE-588)4342626-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a PECVD-Verfahren |0 (DE-588)4267316-1 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Hartstoff |0 (DE-588)4023555-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Verbundwerkstoff |0 (DE-588)4062670-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Titannitrid |0 (DE-588)4185564-4 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Hartstoff |0 (DE-588)4023555-5 |D s |
| 689 | 0 | 1 | |a PECVD-Verfahren |0 (DE-588)4267316-1 |D s |
| 689 | 0 | 2 | |a Verbundwerkstoff |0 (DE-588)4062670-2 |D s |
| 689 | 0 | 3 | |a Nanostrukturiertes Material |0 (DE-588)4342626-8 |D s |
| 689 | 0 | 4 | |a Titannitrid |0 (DE-588)4185564-4 |D s |
| 689 | 0 | 5 | |a Bornitrid |0 (DE-588)4146352-3 |D s |
| 689 | 0 | |5 DE-604 | |
| 856 | 4 | 2 | |m DNB Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=010501135&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-010501135 | |
Datensatz im Suchindex
| _version_ | 1816445149766483968 |
|---|---|
| adam_text |
TABLE OF CONTENT
1. INTRODUCTION.1
2. GOAL OF THE WORK.2
3. THEORETICAL PART.3
3.1. DEPOSITION TECHNIQUES.3
3.1.1. PHYSICAL PLASMA.3
3.1.2. HIGH FREQUENCY DISCHARGE. 4
3.1.3. PHYSICAL VAPOR DEPOSITION.5
3.1.3.1. CONVENTIONAL DIODE AND MAGNETRON SPUTTERING.5
3.1.3.2. VACUUM ARC PROCESS.6
3.1.4. CHEMICAL VAPOR DEPOSITION AND PLASMA CHEMICAL VAPOR DEPOSITION. 7
3.2. MICROSTRUCTURE OF THIN FILMS.7
3.3. PROPERTIES OF THIN FILMS.10
3.3.1. HARDNESS OF MATERIALS AND RELATED PROPERTIES.10
3.3.2. INTRINSICALLY HARD MATERIALS.12
3.3.3. EXTRINSICALLY HARD MATERIALS. 12
3.3.3.1. HARDENING BY ENERGETIC ION BOMBARDMENT.14
3.3.3.2. HETEROSTRUCTURES.15
3.3.3.3. NANOCRYSTALLINE COMPOSITE COATINGS.16
3.4. LITERATURE OVERVIEW.
19
3.4.1. TIN COATINGS.
19
3.4.2. TI-B-N SYSTEM.21
3.4.3. NC-M
NN/A-METAL COATINGS.23
4. EXPERIMENTAL.25
4.1. DEPOSITION OF THE COATINGS.25
4.1.1. TIN AND NC-TIN/A-BN/A-TIB
2 COATINGS DEPOSITED BY PLASMA CVD. 25
4.1.2. NC-TIN/A-TIB
2 COATINGS DEPOSITED BY ARC EVAPORATION.28
4.1.3. ZRN/NI AND CR
2N/NI COATINGS DEPOSITED BY MAGNETRON SPUTTERING. 29
4.2. THIN FILM CHARACTERIZATION.31
4.2.1. HARDNESS MEASUREMENT.31
4.2.2. STRESS MEASUREMENT. 35
4.2.3. X-RAY DIFFRACTION (XRD).36
4.2.4. SCANNING ELECTRON MICROSCOPY (SEM) AND ENERGY DISPERSIVE
ANALYSIS OF X-RAY (EDX).38
4.2.5. ELASTIC RECOIL DETECTION (ERD).39
I
BIBLIOGRAFISCHE INFORMATIONEN
HTTP://D-NB.INFO/968621481
4.2.6. X-RAY PHOTOELECTRON SPECTROSCOPY (XPS).40
5. RESULTS AND DISCUSSION.41
5.1. TIN FILMS DEPOSITED BY PLASMA CVD AND OPTIMIZATION OF THE
DEPOSITION
PARAMETERS. 41
5.2. TI-B-N FILMS DEPOSITED BY PLASMA CVD.48
5.2.1. DEPOSITION RATE.48
5.2.2. COMPOSITION OF THE COATINGS.49
5.2.3. HARDNESS AND ELASTIC MODULUS. 55
5.2.4. CRYSTALLITE SIZE.70
5.2.5. PREFERENTIAL ORIENTATION.72
5.2.6. PHASE COMPOSITION.77
5.2.7. COVERAGE OF TIN NANOCRYSTALS WITH BN.81
5.2.8. MICROSTRUCTURE AND MORPHOLOGY. 83
5.3. TI-B-N FILMS DEPOSITED BY MEANS OF VACUUM ARC PVD.
86
5.4. NC-M
NN/A-METAL COATINGS.89
5.5. THERMAL STABILITY.
94
5.5.1. THERMAL STABILITY OF TI-B-N COATINGS.
95
5.5.1.
1
. STRESS RELAXATION.96
5.5.1.
2
. RECRYSTALLIZATION.98
5.5.1.3. LOSS OF BORON.
99
5.5.1.4. DIFFUSION OF ELEMENTS FROM THE SUBSTRATE INTO THE COATINGS.
103
5.5.1.5. THERMAL STABILITY VS. COATING PROPERTIES.105
5.5.2. THERMAL STABILITY OF NC-M
NN/A-METAL COATINGS. 115
5.5.2.
1
. NC-ZRN/A-NI COATINGS.
115
5.5.2.2. NC-CR
2
N/A-NI COATINGS.122
5.6. OXIDATION RESISTANCE OF NC-TIN/A-BN/A-TIB
2
COATINGS.124
5.7. LONG-TERM STABILITY OF THE COATINGS.129
5.8. POSSIBLE ARTEFACTS OF THE HARDNESS MEASUREMENT ON SUPERHARD
COATINGS.
132
6
. SUMMARY AND CONCLUSIONS.
141
7. REFERENCES.
143
II |
| any_adam_object | 1 |
| author | Karvánková, Pavla 1976- |
| author_GND | (DE-588)128520612 |
| author_facet | Karvánková, Pavla 1976- |
| author_role | aut |
| author_sort | Karvánková, Pavla 1976- |
| author_variant | p k pk |
| building | Verbundindex |
| bvnumber | BV017424381 |
| classification_tum | WER 480d FER 882d WER 420d CHE 380d |
| ctrlnum | (OCoLC)76613580 (DE-599)BVBBV017424381 |
| discipline | Werkstoffwissenschaften Chemie Fertigungstechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00000nam a2200000 c 4500</leader><controlfield tag="001">BV017424381</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20050811</controlfield><controlfield tag="007">t|</controlfield><controlfield tag="008">030821s2003 xx ad|| m||| 00||| eng d</controlfield><datafield tag="016" ind1="7" ind2=" "><subfield code="a">968621481</subfield><subfield code="2">DE-101</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)76613580</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV017424381</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield><subfield code="a">DE-12</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">WER 480d</subfield><subfield code="2">stub</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">FER 882d</subfield><subfield code="2">stub</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">WER 420d</subfield><subfield code="2">stub</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">CHE 380d</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Karvánková, Pavla</subfield><subfield code="d">1976-</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)128520612</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Superhard nc-TiN-a-BN-a-TiB 2 and nc-MnN-a-metal nanocrystalline composite coatings</subfield><subfield code="c">Pavla Karvánková</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2003</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">II, 154 Bl.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">München, Techn. Univ., Diss., 2003</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Bornitrid</subfield><subfield code="0">(DE-588)4146352-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Nanostrukturiertes Material</subfield><subfield code="0">(DE-588)4342626-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">PECVD-Verfahren</subfield><subfield code="0">(DE-588)4267316-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Hartstoff</subfield><subfield code="0">(DE-588)4023555-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Verbundwerkstoff</subfield><subfield code="0">(DE-588)4062670-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Titannitrid</subfield><subfield code="0">(DE-588)4185564-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Hartstoff</subfield><subfield code="0">(DE-588)4023555-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">PECVD-Verfahren</subfield><subfield code="0">(DE-588)4267316-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Verbundwerkstoff</subfield><subfield code="0">(DE-588)4062670-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="3"><subfield code="a">Nanostrukturiertes Material</subfield><subfield code="0">(DE-588)4342626-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="4"><subfield code="a">Titannitrid</subfield><subfield code="0">(DE-588)4185564-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="5"><subfield code="a">Bornitrid</subfield><subfield code="0">(DE-588)4146352-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">DNB Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=010501135&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-010501135</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV017424381 |
| illustrated | Illustrated |
| indexdate | 2024-11-22T17:38:05Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-010501135 |
| oclc_num | 76613580 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-12 |
| owner_facet | DE-91 DE-BY-TUM DE-12 |
| physical | II, 154 Bl. Ill., graph. Darst. |
| publishDate | 2003 |
| publishDateSearch | 2003 |
| publishDateSort | 2003 |
| record_format | marc |
| spelling | Karvánková, Pavla 1976- Verfasser (DE-588)128520612 aut Superhard nc-TiN-a-BN-a-TiB 2 and nc-MnN-a-metal nanocrystalline composite coatings Pavla Karvánková 2003 II, 154 Bl. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier München, Techn. Univ., Diss., 2003 Bornitrid (DE-588)4146352-3 gnd rswk-swf Nanostrukturiertes Material (DE-588)4342626-8 gnd rswk-swf PECVD-Verfahren (DE-588)4267316-1 gnd rswk-swf Hartstoff (DE-588)4023555-5 gnd rswk-swf Verbundwerkstoff (DE-588)4062670-2 gnd rswk-swf Titannitrid (DE-588)4185564-4 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Hartstoff (DE-588)4023555-5 s PECVD-Verfahren (DE-588)4267316-1 s Verbundwerkstoff (DE-588)4062670-2 s Nanostrukturiertes Material (DE-588)4342626-8 s Titannitrid (DE-588)4185564-4 s Bornitrid (DE-588)4146352-3 s DE-604 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=010501135&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Karvánková, Pavla 1976- Superhard nc-TiN-a-BN-a-TiB 2 and nc-MnN-a-metal nanocrystalline composite coatings Bornitrid (DE-588)4146352-3 gnd Nanostrukturiertes Material (DE-588)4342626-8 gnd PECVD-Verfahren (DE-588)4267316-1 gnd Hartstoff (DE-588)4023555-5 gnd Verbundwerkstoff (DE-588)4062670-2 gnd Titannitrid (DE-588)4185564-4 gnd |
| subject_GND | (DE-588)4146352-3 (DE-588)4342626-8 (DE-588)4267316-1 (DE-588)4023555-5 (DE-588)4062670-2 (DE-588)4185564-4 (DE-588)4113937-9 |
| title | Superhard nc-TiN-a-BN-a-TiB 2 and nc-MnN-a-metal nanocrystalline composite coatings |
| title_auth | Superhard nc-TiN-a-BN-a-TiB 2 and nc-MnN-a-metal nanocrystalline composite coatings |
| title_exact_search | Superhard nc-TiN-a-BN-a-TiB 2 and nc-MnN-a-metal nanocrystalline composite coatings |
| title_full | Superhard nc-TiN-a-BN-a-TiB 2 and nc-MnN-a-metal nanocrystalline composite coatings Pavla Karvánková |
| title_fullStr | Superhard nc-TiN-a-BN-a-TiB 2 and nc-MnN-a-metal nanocrystalline composite coatings Pavla Karvánková |
| title_full_unstemmed | Superhard nc-TiN-a-BN-a-TiB 2 and nc-MnN-a-metal nanocrystalline composite coatings Pavla Karvánková |
| title_short | Superhard nc-TiN-a-BN-a-TiB 2 and nc-MnN-a-metal nanocrystalline composite coatings |
| title_sort | superhard nc tin a bn a tib 2 and nc mnn a metal nanocrystalline composite coatings |
| topic | Bornitrid (DE-588)4146352-3 gnd Nanostrukturiertes Material (DE-588)4342626-8 gnd PECVD-Verfahren (DE-588)4267316-1 gnd Hartstoff (DE-588)4023555-5 gnd Verbundwerkstoff (DE-588)4062670-2 gnd Titannitrid (DE-588)4185564-4 gnd |
| topic_facet | Bornitrid Nanostrukturiertes Material PECVD-Verfahren Hartstoff Verbundwerkstoff Titannitrid Hochschulschrift |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=010501135&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT karvankovapavla superhardnctinabnatib2andncmnnametalnanocrystallinecompositecoatings |