Fundamentals of semiconductor fabrication:
Saved in:
| Main Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Hoboken, NJ
Wiley
2004
|
| Edition: | Internat. ed. |
| Subjects: | |
| Physical Description: | XIII, 305 S. Ill., graph. Darst. |
| ISBN: | 0471232793 0471452386 |
Staff View
MARC
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| author | May, Gary S. Sze, Simon M. |
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| id | DE-604.BV017395442 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T19:17:29Z |
| institution | BVB |
| isbn | 0471232793 0471452386 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-010481894 |
| oclc_num | 52333554 |
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| physical | XIII, 305 S. Ill., graph. Darst. |
| publishDate | 2004 |
| publishDateSearch | 2004 |
| publishDateSort | 2004 |
| publisher | Wiley |
| record_format | marc |
| spelling | May, Gary S. Verfasser aut Fundamentals of semiconductor fabrication Gary S. May ; Simon M. Sze Internat. ed. Hoboken, NJ Wiley 2004 XIII, 305 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Integrated circuits Semiconductors Design and construction Fertigung (DE-588)4016899-2 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Halbleiter (DE-588)4022993-2 s Fertigung (DE-588)4016899-2 s DE-604 Sze, Simon M. Verfasser aut |
| spellingShingle | May, Gary S. Sze, Simon M. Fundamentals of semiconductor fabrication Integrated circuits Semiconductors Design and construction Fertigung (DE-588)4016899-2 gnd Halbleiter (DE-588)4022993-2 gnd |
| subject_GND | (DE-588)4016899-2 (DE-588)4022993-2 |
| title | Fundamentals of semiconductor fabrication |
| title_auth | Fundamentals of semiconductor fabrication |
| title_exact_search | Fundamentals of semiconductor fabrication |
| title_full | Fundamentals of semiconductor fabrication Gary S. May ; Simon M. Sze |
| title_fullStr | Fundamentals of semiconductor fabrication Gary S. May ; Simon M. Sze |
| title_full_unstemmed | Fundamentals of semiconductor fabrication Gary S. May ; Simon M. Sze |
| title_short | Fundamentals of semiconductor fabrication |
| title_sort | fundamentals of semiconductor fabrication |
| topic | Integrated circuits Semiconductors Design and construction Fertigung (DE-588)4016899-2 gnd Halbleiter (DE-588)4022993-2 gnd |
| topic_facet | Integrated circuits Semiconductors Design and construction Fertigung Halbleiter |
| work_keys_str_mv | AT maygarys fundamentalsofsemiconductorfabrication AT szesimonm fundamentalsofsemiconductorfabrication |