Fundamentals of semiconductor fabrication:
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Hoboken, NJ
Wiley
2004
|
| Ausgabe: | Internat. ed. |
| Schlagworte: | |
| Beschreibung: | XIII, 305 S. Ill., graph. Darst. |
| ISBN: | 0471232793 0471452386 |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV017395442 | ||
| 003 | DE-604 | ||
| 005 | 20040323 | ||
| 007 | t | ||
| 008 | 030808s2004 ad|| |||| 00||| eng d | ||
| 020 | |a 0471232793 |9 0-471-23279-3 | ||
| 020 | |a 0471452386 |9 0-471-45238-6 | ||
| 035 | |a (OCoLC)52333554 | ||
| 035 | |a (DE-599)BVBBV017395442 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-1050 |a DE-703 |a DE-20 |a DE-29T | ||
| 050 | 0 | |a TK7871.85 | |
| 082 | 0 | |a 621.3815/2 |2 22 | |
| 084 | |a ZN 4800 |0 (DE-625)157408: |2 rvk | ||
| 100 | 1 | |a May, Gary S. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Fundamentals of semiconductor fabrication |c Gary S. May ; Simon M. Sze |
| 250 | |a Internat. ed. | ||
| 264 | 1 | |a Hoboken, NJ |b Wiley |c 2004 | |
| 300 | |a XIII, 305 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 4 | |a Integrated circuits | |
| 650 | 4 | |a Semiconductors |x Design and construction | |
| 650 | 0 | 7 | |a Fertigung |0 (DE-588)4016899-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
| 689 | 0 | 1 | |a Fertigung |0 (DE-588)4016899-2 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Sze, Simon M. |e Verfasser |4 aut | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-010481894 | ||
Datensatz im Suchindex
| _version_ | 1804130215505428480 |
|---|---|
| any_adam_object | |
| author | May, Gary S. Sze, Simon M. |
| author_facet | May, Gary S. Sze, Simon M. |
| author_role | aut aut |
| author_sort | May, Gary S. |
| author_variant | g s m gs gsm s m s sm sms |
| building | Verbundindex |
| bvnumber | BV017395442 |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.85 |
| callnumber-search | TK7871.85 |
| callnumber-sort | TK 47871.85 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 4800 |
| ctrlnum | (OCoLC)52333554 (DE-599)BVBBV017395442 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | Internat. ed. |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01300nam a2200409 c 4500</leader><controlfield tag="001">BV017395442</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20040323 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">030808s2004 ad|| |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0471232793</subfield><subfield code="9">0-471-23279-3</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0471452386</subfield><subfield code="9">0-471-45238-6</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)52333554</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV017395442</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-1050</subfield><subfield code="a">DE-703</subfield><subfield code="a">DE-20</subfield><subfield code="a">DE-29T</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7871.85</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815/2</subfield><subfield code="2">22</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4800</subfield><subfield code="0">(DE-625)157408:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">May, Gary S.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Fundamentals of semiconductor fabrication</subfield><subfield code="c">Gary S. May ; Simon M. Sze</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">Internat. ed.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Hoboken, NJ</subfield><subfield code="b">Wiley</subfield><subfield code="c">2004</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XIII, 305 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Integrated circuits</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield><subfield code="x">Design and construction</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Fertigung</subfield><subfield code="0">(DE-588)4016899-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Fertigung</subfield><subfield code="0">(DE-588)4016899-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Sze, Simon M.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-010481894</subfield></datafield></record></collection> |
| id | DE-604.BV017395442 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T19:17:29Z |
| institution | BVB |
| isbn | 0471232793 0471452386 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-010481894 |
| oclc_num | 52333554 |
| open_access_boolean | |
| owner | DE-1050 DE-703 DE-20 DE-29T |
| owner_facet | DE-1050 DE-703 DE-20 DE-29T |
| physical | XIII, 305 S. Ill., graph. Darst. |
| publishDate | 2004 |
| publishDateSearch | 2004 |
| publishDateSort | 2004 |
| publisher | Wiley |
| record_format | marc |
| spelling | May, Gary S. Verfasser aut Fundamentals of semiconductor fabrication Gary S. May ; Simon M. Sze Internat. ed. Hoboken, NJ Wiley 2004 XIII, 305 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Integrated circuits Semiconductors Design and construction Fertigung (DE-588)4016899-2 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Halbleiter (DE-588)4022993-2 s Fertigung (DE-588)4016899-2 s DE-604 Sze, Simon M. Verfasser aut |
| spellingShingle | May, Gary S. Sze, Simon M. Fundamentals of semiconductor fabrication Integrated circuits Semiconductors Design and construction Fertigung (DE-588)4016899-2 gnd Halbleiter (DE-588)4022993-2 gnd |
| subject_GND | (DE-588)4016899-2 (DE-588)4022993-2 |
| title | Fundamentals of semiconductor fabrication |
| title_auth | Fundamentals of semiconductor fabrication |
| title_exact_search | Fundamentals of semiconductor fabrication |
| title_full | Fundamentals of semiconductor fabrication Gary S. May ; Simon M. Sze |
| title_fullStr | Fundamentals of semiconductor fabrication Gary S. May ; Simon M. Sze |
| title_full_unstemmed | Fundamentals of semiconductor fabrication Gary S. May ; Simon M. Sze |
| title_short | Fundamentals of semiconductor fabrication |
| title_sort | fundamentals of semiconductor fabrication |
| topic | Integrated circuits Semiconductors Design and construction Fertigung (DE-588)4016899-2 gnd Halbleiter (DE-588)4022993-2 gnd |
| topic_facet | Integrated circuits Semiconductors Design and construction Fertigung Halbleiter |
| work_keys_str_mv | AT maygarys fundamentalsofsemiconductorfabrication AT szesimonm fundamentalsofsemiconductorfabrication |