APA (7th ed.) Citation

May, G. S., & Sze, S. M. (2004). Fundamentals of semiconductor fabrication (Internat. ed.). Wiley.

Chicago Style (17th ed.) Citation

May, Gary S., and Simon M. Sze. Fundamentals of Semiconductor Fabrication. Internat. ed. Hoboken, NJ: Wiley, 2004.

MLA (9th ed.) Citation

May, Gary S., and Simon M. Sze. Fundamentals of Semiconductor Fabrication. Internat. ed. Wiley, 2004.