Laser cleaning: optical physics, applied physics, and materials science
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
River Edge, N.J.
World Scientific
2002
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Review papers of the participants of the First International Workshop on Laser Cleaning held in Singapore in 2001. - Includes bibliographical references and index |
| Beschreibung: | xiv, 466 p. ill. : 24 cm |
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IMAGE 1
OPTICAL PHYSICS, APPLIED PHYSICS AND MATERIALS SCIENCE
LASER CLEANING
EDITOR
BORIS LUK YANCHUK
DATA STORAGE INSTITUTE,
AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH, SINGAPORE
L I FE WORLD SCIENTIFIC 1* NEW JERSEY * LONDON * SINE NEW JERSEY *
LONDON * SINGAPORE * HONG KONG
IMAGE 2
CONTENTS
PREFACE 1
PART 1. HISTORY
CHAPTER 1 . THE ROAD TO "STEAM LASER CLEANING" W. ZAPKA 23
1. MEETING ANDREW C. TARN 23
2. A CLEANING METHOD NEEDED 24
3. 'LASER CLEANING' 26
4. 'STEAM LASER CLEANING' 29
5. STEAM LASER CLEANING WITH SHORT-PULSE IR-LASERS 33
6. STEAM LASER CLEANING: DIRECT IMAGING OF THE JET MOTION 34
7. OPTO-ACOUSTIC DETECTION OF THE LIQUID FILM EXPLOSION 40
8. STEAM LASER CLEANING: STUDY OF THE MECHANISM OF THE LIQUID FILM
EXPLOSION 41
9. STENCIL MASKS AGAIN 45
ACKNOWLEDGEMENT 46
THANKS TO ANDREW C. TARN 46
REFERENCES 46
PART 2. DRY LASER CLEANING
CHAPTER 2. DRY LASER CLEANING OF PARTICLES BY NANOSECOND PULSES: THEORY
N. ARNOLD 51
1. INTRODUCTION 51
2. ADHESION POTENTIAL AND EQUATION OF MOTION 53
2.1. MODEL EXPRESSION FOR ELASTIC-VDW POTENTIAL 53
2.2. PARABOLIC APPROXIMATION 57
2.3. EQUATION FOR THE EVOLUTION OF DEFORMATION H 58
2.4. DAMPING COEFFICIENT 59
2.4.1. KNUDSEN VISCOSITY 59
2.4.2. STOKES VISCOSITY 59
2.4.3. ABSORPTION OF SOUND 60
2.4.4. EMISSION OF SOUND 61
2.4.5. PLASTIC DEFORMATION 61
VII
IMAGE 3
3. THERMAL EXPANSION 62
3.1. HIERARCHY OF SCALES 62
3.2. GENERAL EQUATIONS 63
3.3. UNILATERAL QUASI-STATIC EXPANSION 65
3.4. 3D QUASI-STATIC EXPANSION FOR FINITE BEAMS WITH ID HEAT CONDUCTION
67
3.4.1. COMPARISON BETWEEN DIFFERENT APPROXIMATIONS 68
3.5. PARTICLE INFLUENCE ON THE EXPANSION OF THE SUBSTRATE 69
3.6. UNILATERAL DYNAMIC EXPANSION 70
3.7. THERMAL EXPANSION OF ABSORBING PARTICLE 71
3.8. TRANSPARENT PARTICLE HEATED BY THE SUBSTRATE 72
3.9. MAXIMUM ENERGY OF EJECTED PARTICLES 72
4. CLEANING THRESHOLD 73
4.1. GENERAL THRESHOLD CONDITIONS 73
4.1.1. SHORT CLEANING PULSE 74
4.1.2. LONG CLEANING PULSE 74
4.1.3. OVER-DAMPED MOVEMENT 75
4.1.4. LONG PULSES WITH STEEP FRONTS 75
4.2. SINGLE SINUSOIDAL PULSE IN PARABOLIC POTENTIAL WITHOUT DAMPING 76
4.3. DEPENDENCE OF CLEANING THRESHOLD ON PARTICLE RADIUS AND PULSE
DURATION 78
5. SI0 2 PARTICLES CLEANED FROM SI WAFERS 82
5.1. EXPERIMENTAL 82
5.2. CLEANING THRESHOLD VS. RADIUS 83
5.3. ROLE OF SMALL OSCILLATIONS IN INTENSITY 86
5.4. SUGGESTIONS FOR CLEANING EXPERIMENTS 87
6. CONCLUSIONS 89
ACKNOWLEDGEMENTS 90
APPENDIX A. QUASI-STATIC 3D THERMAL EXPANSION 90
APPENDIX B. CLEANING THRESHOLD WITH THE SINGLE SINUSOIDAL PULSE 95
REFERENCES 96
CHAPTER 3. OPTICAL RESONANCE AND NEAR-FIELD EFFECTS IN DRY LASER
CLEANING B. S. LUK'YANCHUK, M. MOSBACHER, Y. W. ZHENG, H.- J. MUENZER, S.
M. HUANG, M. BERTSCH, W. D. SONG, Z. B. WANG, Y. F. LU, O. DUBBERS, J.
BONEBERG, P. LEIDERER, M. H. HONG, *. * CHONG 103
1. INTRODUCTION 103
VIII
IMAGE 4
2. OPTICAL RESONANCE AND NEAR-FIELD EFFECTS WITHIN THE MIE THEORY 106
3. PARTICLE ON THE SURFACE. BEYOND THE MIE THEORY 117
4. ADHESION POTENTIAL AND HAMAKER-LIFSHITZ CONSTANT 128
5. TEMPERATURE UNDER THE PARTICLE 138
6. DYNAMICS OF THE PARTICLE, 3D EFFECTS 144
7. COMPARISON WITH EXPERIMENTAL RESULTS 155
7.1. LOCAL SUBSTRATE ABLATION - A PROBE FOR OPTICAL NEAR-FIELDS 155
7.1.1. MORPHOLOGY OF NEAR FIELD-INDUCED DAMAGE SITES 156
7.1.2. PARAMETERS INFLUENCING FIELD ENHANCEMENT INDUCED ABLATION 159
7.2. NEAR FIELD EFFECTS IN THE LASER CLEANING PROCESS 162
7.2.1. EXPERIMENTAL DETAILS 162
7.2.2. VARIATION OF THE SIZE PARAMETER 163
7.2.2.1. VARIATION OF THE PARTICLE SIZE 164
7.2.2.2. VARIATION OF THE LASER WAVELENGTH 167
7.2.3. INFLUENCE OF INCIDENT ANGLE 168
7.2.4. INFLUENCE OF SURFACE ROUGHNESS 169
8. CONCLUSION 170
ACKNOWLEDGEMENTS 172
REFERENCES 172
PART 3. STEAM LASER CLEANING
CHAPTER 4. PULSED LASER CLEANING OF PARTICLES FROM SURFACES AND OPTICAL
MATERIALS D. M. KANE, A. J. FERNANDES, D. R. HALFPENNY 181
1. INTRODUCTION 181
2. REVIEW TABLES OF EXPERIMENTAL PULSED LASER CLEANING OF CONTAMINANTS
(MOSTLY PARTICLES) FROM SURFACES 185
2.1. OVERVIEW OF THE INFORMATION IN THE TABLES 185
2.2. SILICON-WAFERS, HYDROPHILIC AND MEMBRANE MASKS 190
2.3. GLASS AND RELATED OPTICAL SURFACES 196
2.4. OTHER MATERIAL SURFACES 198
3. EXPERIMENTAL STUDIES OF LASER CLEANING PARTICLES FROM GLASS AT
MACQUARIE UNIVERSITY 198
3.1. SINGLE PULSE LASER CLEANING STUDIES 198
3.1.1. "DIP AND TAP" SAMPLE PREPARATION 198
3.1.2. DRY/DAMP LASER CLEANING 199
3.1.3. BEFORE AND AFTER IMAGES - MICROSCOPE SLIDES AND FUSED SILICA 211
IX
IMAGE 5
3.2. CLEANING EFFICIENCY MEASURED FROM OPTICAL MICROSCOPY
IMAGES 214
3.2.1. PARTICLE DE-AGGLOMERATION AND REMOVAL 214
3.2.2. LASER CLEANING EFFICIENCY AS A FUNCTION OF PULSE FLUENCE 218
3.2.3. LASER CLEANING THRESHOLD FLUENCE MEASUREMENT 220
4. CONCLUDING REMARKS 222
ACKNOWLEDGMENTS 223
REFERENCES 223
CHAPTER 5. LIQUID-ASSISTED PULSED LASER CLEANING WITH NEAR INFRARED AND
ULTRAVIOLET-PULSED LASERS * P. GRIGOROPOULOS, D. KIM 229
1. INTRODUCTION 229
2. EXPERIMENTS 232
2.1. LASER CLEANING SYSTEM AND OPTICAL DIAGNOSTICS 232
2.2. OPERATION PARAMETERS AND EXPERIMENTAL PROCEDURES 236
3. EXPERIMENTAL RESULTS 236
3.1. EXCIMER LASER CLEANING 236
3.2. ND: YAG LASER CLEANING 237
3.3. SUMMARY OF CLEANING RESULTS 240
4. PHYSICAL MECHANISMS 241
4.1. IN-SITU MONITORING OF REFLECTANCE AND VISUALIZATION 241
4.2. TEMPERATURE, PRESSURE, AND BUBBLE DYNAMICS 242
5. CONCLUSION 252
ACKNOWLEDGMENTS 252
REFERENCES 252
CHAPTER 6. STEAM LASER CLEANING OF SILICON WAFERS: LASER INDUCED BUBBLE
NUCLEATION AND EFFICIENCY MEASUREMENTS P. LEIDERER, M. MOSBACHER, V.
DOBLER, A. SCHILLING, O. YAVAS, B. S. LUK'YANCHUK, J. BONEBERG 255
1. INTRODUCTION 256
2. EXPERIMENTAL 257
2.1. SAMPLE PREPARATION 258
2.2. LASER SOURCES 259
2.3. SURFACE PLASMON PROBE AND OPTICAL REFLECTANCE PROBE 260
X
IMAGE 6
2.4. SCATTERED LIGHT PROBE 262
2.5. EVALUATION OF THE CLEANING EFFICIENCY 262
2.6. DETERMINATION OF LASER FLUENCE 263
3. LASER INDUCED BUBBLE NUCLEATION AND PRESSURE GENERATION 264
3.1. THEORETICAL BACKGROUND 265
3.1.1. KINETIC LIMIT OF SUPERHEATING 265
3.1.2. NUCLEATION THEORY 267
3.2. EXPERIMENTS ON METAL FILMS 272
3.2.1. DETECTION OF BUBBLE NUCLEATION VIA SPP 272
3.3. BUBBLE NUCLEATION ON SILICON WAFERS 282
3.3.1. WATER AT SMOOTH SILICON WAFERS 283
3.3.2. WATER AT STRUCTURED SILICON SUBSTRATES 289
3.3.3. IPA ON SMOOTH SILICON WAFERS 292
3.4. HEAT TRANSFER COEFFICIENT 292
4. REMOVAL OF PARTICLES ON SURFACES VIA LASER INDUCED BUBBLE NUCLEATION:
STEAM LASER CLEANING 294
4.1. EFFICIENCY MEASUREMENTS 296
4.1.1. DEPENDENCE ON THE NUMBER OF APPLIED LASER PULSES 296 4.1.2.
DEPENDENCE ON THE LASER FLUENCE AND VARIATION ON THE PARTICLE SIZE 298
4.2. DISCUSSION AND CONCLUDING REMARKS 300
ACKNOWLEDGMENTS 304
REFERENCES 305
CHAPTER 7. PHYSICAL MECHANISMS OF LASER CLEANING V. P. VEIKO, E. A.
SHAKHNO 311
1. INTRODUCTION 311
2. LASER CLEANING OF THE SOLID SURFACE FROM PARTICLES 312
2.1. DRY LASER CLEANING 313
2.1.1. THE CLEANING FORCE 313
2.1.2. SURFACE CLEANING CONDITION 316
2.1.3. DRY LASER CLEANING IN THE MULTIPULSE REGIME 316
2.1.4. DISCUSSION 318
2.2. STEAM LASER CLEANING 319
2.2.1. ABSORBING PARTICLES AT THE TRANSPARENT SUBSTRATE 319
2.2.2. TRANSPARENT PARTICLES AT THE ABSORBING SUBSTRATE 321
2.2.3. ABSORBING PARTICLES AT THE ABSORBING SUBSTRATE 326
2.2.4. DISCUSSION 327
3. LASER CLEANING OF THE SOLID SURFACE FROM FILMS 327
3.1. LASER CLEANING BY BUCKLING MECHANISM 328
XI
IMAGE 7
3.1.1. THE MAIN REGULARITIES AND REGIMES OF FILM BUCKLING 329
3.1.2. FILM ABLATION WITHOUT MELTING BEFORE SEPARATION OF THE FILM
FRAGMENT 331
3.1.3. ABLATION OF THE MELTING FILM 331
3.1.4. FILM DEGRADATION 334
3.2. LASER CLEANING BY FILM SHAKING-OFF 337
3.3. THE CONDITIONS OF ACTION OF SHAKING-OFF AND BUCKLING MECHANISMS OF
FILM ABLATION 337
3.4. OTHER MECHANISMS OF LASER CLEANING OF SOLID SURFACES FROM FILMS 338
4. CONCLUSION 339
ACKNOWLEDGMENTS 340
REFERENCES 340
PART 4. LASER CLEANING OF ARTWORKS
CHAPTER 8. LASER ABLATION IN CLEANING OF ARTWORKS V. ZAFIROPULOS 343
1. INTRODUCTION 343
2. LASER ABLATION OF COMPLEX POLYMERIZED MATERIALS 344
2.1. OPTIMIZATION OF LASER PARAMETERS 344
2.1.1. ABLATION EFFICIENCY STUDIES 346
2.1.2. LIGHT TRANSMISSION STUDIES 353
2.1.3. CHEMICAL ALTERATION OF SUBSTRATE 355
2.2. LASER-ASSISTED REMOVAL OF AGED VARNISH FROM PAINTINGS 358
2.3. LASER-ASSISTED REMOVAL OF PAINT FROM COMPOSITE MATERIALS 365 3.
LASER DIVESTMENT OF ENCRUSTATION 370
3.1. MAJOR OPERATIVE MECHANISMS AND ASSOCIATED OPTICAL PHENOMENA 370
3.2. REMOVAL OF ENCRUSTATION - TEST CASE STUDIES 380
4. CONCLUSIONS 384
ACKNOWLEDGMENTS 385
REFERENCES 385
CHAPTER 9. ON THE THEORY OF DISCOLORATION EFFECT IN PIGMENTS AT LASER
CLEANING B. S. LUK'YANCHUK, V. ZAFIROPULOS 393
1. INTRODUCTION 393
2. THE THERMAL ABLATION MODEL 395
XII
IMAGE 8
3. METHOD OF MOMENTS 398
4. THERMAL FIELD WITHIN THE ABLATED MATERIAL. NUMERICAL RESULTS 402
5. KINETICS OF PHASE TRANSITION AND SURFACE MODIFICATION 405
ACKNOWLEDGMENTS 411
REFERENCES 411
PART 5. APPLICATIONS OF LASER CLEANING
CHAPTER 10. CLEANING FOR FIELD EMITTER ARRAYS M. TAKAI, N. SUZUKI, O.
YAVAS 417
1. INTRODUCTION 417
2. EXPERIMENTAL PROCEDURES 419
3. LASER LIGHT IRRADIATION 420
3.1. LASER IRRADIATION MODES 420
3.1.1. LASER IRRADIATION WITHOUT FIELD EMISSION 420
3.1.2. LASER IRRADIATION WITH FIELD EMISSION 422
3.2. IR AND VISIBLE LASER LIGHT (A = 1047 AND 523.5 NM) IRRADIATION .
422 3.3. UV LASER LIGHT (A = 349 NM) IRRADIATION 422
3.4. UV LASER LIGHT (A = 262 NM) IRRADIATION 429
4. CONCLUSIONS 430
ACKNOWLEDGMENTS 431
REFERENCES 431
CHAPTER 11 . LASER CLEANING OF ORGANIC CONTAMINATION ON MICROELECTRONIC
DEVICES AND PROCESS REAL-TIME MONITORING M. H. HONG, W. D. SONG, Y. F.
LU, B. S. LUK'YANCHUK,
*. * CHONG 433
1. INTRODUCTION 436
2. EXPERIMENTAL SETUP 438
3. RESULTS AND DISCUSSION 438
3.1. LASER CLEANING OF FLEXIBLE CIRCUIT FOR INKJET PRINTER CARTRIDGE 438
3.2. LASER DEFLASHING OF 1* PACKAGES 441
3.3. SIGNAL GENERATION AND DIAGNOSTICS DURING THE LASER CLEANING 448
3.3.1. AUDIBLE ACOUSTIC WAVE GENERATION 451
3.3.2. DIAGNOSTICS OF PLASMA-INDUCED ELECTRIC FIELD 456
XIII
IMAGE 9
3.3.3. DETECTION OF PLASMA OPTICAL SIGNAL 457
4. CONCLUSIONS 460
ACKNOWLEDGMENTS 461
REFERENCES 461
SUBJECT INDEX 465
XIV |
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| spelling | Laser cleaning optical physics, applied physics, and materials science editor, Boris Luk'yanchuk River Edge, N.J. World Scientific 2002 xiv, 466 p. ill. : 24 cm txt rdacontent n rdamedia nc rdacarrier Review papers of the participants of the First International Workshop on Laser Cleaning held in Singapore in 2001. - Includes bibliographical references and index Lasers - Applications industrielles ram Lasers Industrial applications Congresses Materials science Instruments Congresses Reinigung (DE-588)4049250-3 gnd rswk-swf Laser (DE-588)4034610-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Laser (DE-588)4034610-9 s Reinigung (DE-588)4049250-3 s DE-604 Lukianchuk, Boris Semenovich Sonstige oth GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=010341319&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Laser cleaning optical physics, applied physics, and materials science Lasers - Applications industrielles ram Lasers Industrial applications Congresses Materials science Instruments Congresses Reinigung (DE-588)4049250-3 gnd Laser (DE-588)4034610-9 gnd |
| subject_GND | (DE-588)4049250-3 (DE-588)4034610-9 (DE-588)1071861417 |
| title | Laser cleaning optical physics, applied physics, and materials science |
| title_auth | Laser cleaning optical physics, applied physics, and materials science |
| title_exact_search | Laser cleaning optical physics, applied physics, and materials science |
| title_full | Laser cleaning optical physics, applied physics, and materials science editor, Boris Luk'yanchuk |
| title_fullStr | Laser cleaning optical physics, applied physics, and materials science editor, Boris Luk'yanchuk |
| title_full_unstemmed | Laser cleaning optical physics, applied physics, and materials science editor, Boris Luk'yanchuk |
| title_short | Laser cleaning |
| title_sort | laser cleaning optical physics applied physics and materials science |
| title_sub | optical physics, applied physics, and materials science |
| topic | Lasers - Applications industrielles ram Lasers Industrial applications Congresses Materials science Instruments Congresses Reinigung (DE-588)4049250-3 gnd Laser (DE-588)4034610-9 gnd |
| topic_facet | Lasers - Applications industrielles Lasers Industrial applications Congresses Materials science Instruments Congresses Reinigung Laser Konferenzschrift |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=010341319&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT lukianchukborissemenovich lasercleaningopticalphysicsappliedphysicsandmaterialsscience |