A user's guide to vacuum technology:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Hoboken, NJ
Wiley-Interscience
2003
|
| Ausgabe: | 3. ed. |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XVIII, 516 S. Ill., graph. Darst. |
| ISBN: | 9780471270522 |
Internformat
MARC
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| 020 | |a 9780471270522 |9 978-0-471-27052-2 | ||
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| 100 | 1 | |a O'Hanlon, John F. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a A user's guide to vacuum technology |c John F. O'Hanlon |
| 250 | |a 3. ed. | ||
| 264 | 1 | |a Hoboken, NJ |b Wiley-Interscience |c 2003 | |
| 300 | |a XVIII, 516 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 0 | 7 | |a Vakuumtechnik |0 (DE-588)4062270-8 |2 gnd |9 rswk-swf |
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| 999 | |a oai:aleph.bib-bvb.de:BVB01-010277231 | ||
Datensatz im Suchindex
| _version_ | 1804129929079554048 |
|---|---|
| adam_text | Contents
ITS
BASIS
1.
Vacuum
Technology
З
1.1
Units of Measurement
6
References
8
2.
Gas Properties
9
2.1
Kinetic Picture of a Gas
9
2.1.1
Velocity Distribution
10
2.1.2
Energy Distribution
11
2.1.3
Mean Free Path
12
2.1.4
Particle Flux
13
2.1.5
Monolayer Formation Time
14
2.1.6
Pressure
14
2.2
Gas Laws
15
2.2.1
Boyle s Law
15
2.2.2
Amonton s Law
16
2.2.3
Charles Law
16
2.2.4
Dalton sLaw
16
2.2.5
Avogadro s Law
16
2.2.6
Graham s Law
17
2.3
Elementary Gas Transport Phenomena
18
2.3.1
Viscosity
18
2.3.2
Thermal Conductivity
20
2.3.3
Diffusion
21
2.3.4
Thermal Transpiration
22
References
23
Problems
24
3.
Gas Flow
25
3.1
Flow Regimes
25
3.2
Throughput, Mass Flow, and Conductance
27
3.3
Continuum Flow
28
3.3.1
Orifices
29
3.3.2
Long Round Tubes
30
3.3.3
Short Round Tubes
32
3.4
Molecular
Flow
32
3.4.1
Orifices
33
3.4.2
Long Round Tubes
34
3.4.3
Short Round Tubes
34
3.4.4
Other
Short Structure Solutions
36
Analytical
Solutions
37
Monte Carlo Technique
38
3.4.5
Combining Molecular Conductances
39
Parallel Conductances
39
Series Conductances
39
Exit and Entrance Effects
44
Series Calculations
45
3.5
The Transition Region
49
3.6
Models Spanning Several Pressure Regions
50
3.7
Summary of Flow Regimes
51
References
52
Problems
53
4.
Gas Release from Solids
57
4.1
Vaporization
57
4.2
Diffusion
58
4.2.1
Reduction of Outdiffusion by Vacuum Baking
60
4.3
Thermal Desorption
61
4.3.1
Desorption Without Readsorption
62
Zero-Order Desorption
62
First-Order Desorption
62
Second-Order Desorption
63
4.3.2
Desorption from Real Surfaces
65
Outgassing Measurements
65
Outgassing Models
67
Reduction of Outgassing by Baking
68
4.4
Stimulated Desorption
70
4.4.1
Electron-Stimulated Desorption
70
4.4.2
Ion-Stimulated Desorption
70
4.4.3
Stimulated Chemical Reactions
70
4.4.4
Photodesorption
71
4.5
Permeation
71
4.5.1
Molecular Permeation
71
4.5.2
Dissociative Permeation
73
4.5.3
Permeation and Outgassing Units
73
4.6
Pressure Limits
74
References
77
Problems
77
MEASUREMENT
5.
Pressure Gauges
81
5.1
Direct-Reading Gauges
81
5.1.1
Diaphragm and Bourdon Gauges
82
5.1.2
Capacitance Manometers
83
5.2
Indirect-Reading Gauges
87
5.2.1
Thermal Conductivity Gauges
87
Pirani Gauge
88
Thermocouple Gauge
91
Stability and Calibration
92
5.2.2
Spinning Rotor Gauge
92
5.2.3
Ionization Gauges
94
Hot Cathode Gauges
94
Hot Cathode Gauge Errors
100
Cold Cathode Gauge
103
Gauge Calibration
104
References
105
Problems
106
6.
Flow Meters
109
6.1
Molar Flow, Mass Flow, and Throughput
109
6.2
Rotameters
and Chokes
112
6.3
Differential Pressure Techniques
114
6.4
Thermal Mass Flow Meter Technique
115
6.4.1
Mass Flow Meter
115
6.4.2
Mass Flow Controller
120
6.4.3
Mass Flow Meter Calibration
120
References
121
Problems
121
7.
Pumping Speed
123
7.1
Pumping Speed
123
7.2
Mechanical Pumps
124
7.3
High Vacuum Pumps
125
7.3.1
Measurement Techniques
125
Pump Dependence
126
Measurement of Water Vapor Pumping Speed
126
Pumping Speed at the Chamber
127
7.3.2
Measurement Error
128
References
130
Problems
130
zU
8. Residual Gas
Analyzers
133
8.1 Instrument
Description
133
8.1.1 Ion
Sources
134
Open Ion Sources 13S
Closed Ion Sources
136
8.1.2
Mass Filters
139
Magnetic Sector
139
RF
Quadrupede
141
Resolving Power
145
8.1.3
Detectors
145
Discrete Dynode Electron Multiplier
147
Continuous Dynode Electron Multiplier
148
8.2
Installation and Operation
150
8.2.1
High Vacuum Operation
150
Mounting
150
Stability
151
8.2.2
Medium and Low Vacuum Sampling
153
Differentially Pumped Sampling
153
Miniature Quadrupoles
156
8.3
RGA Calibration
156
8.4
RGA Selection
158
References
159
Problems
160
9.
Interpretation of RGA Data
161
9.1
Cracking Patterns
161
9.1.1
Dissociative Ionization
161
9.1.2
Isotopes
162
9.1.3
Multiple Ionization
163
9.1.4
Combined Effects
163
9.1.5
Ion Molecule Reactions
165
9.2
Qualitative Analysis
166
9.3
Quantitative Analysis
172
9.3.1
Isolated Spectra
172
9.3.2
Overlapping Spectra
173
References
177
Problems
178
PRODUCTION
10.
Mechanical Pumps
183
10.1
Rotary Vane Pump
183
10.2
Rotary Piston Pump
187
liU
10.3 Lobe Pump 189
10.4
Claw Pump
193
10.5
Scroll Pump
194
10.6
Screw Pump
195
10.7
Diaphragm Pump
196
10.8
Mechanical
Pump Operation 198
References
199
Problems 199
11. Turbomolecular Pumps 201
11.1
Pumping Mechanism
201
11.2
Speed-compression Relations
203
11.2.1
Maximum Compression Ratio
203
11.2.2
Maximum Speed
206
11.2.3
General Relation
207
11.3
Ultimate Pressure
209
11.4
Turbomolecular Pump Designs
210
11.5
Turbomolecular Drag Pumps
213
References
214
Problems
215
12.
Diffusion Pumps
217
12.1
Pumping Mechanism
217
12.2
Speed-Throughput Characteristics
219
12.3
Boiler Heating Effects
223
12.4 Backstreaming,
Baffles, and Traps
224
References
227
Problems
228
13.
Pump Fluids
229
13.1
Fluid Properties
229
13.1.1
Vapor Pressure
229
13.2.2
Other Properties
233
13.2
Pump Fluid Types
234
13.2.1
Mineral Oils
234
13.2.2
Synthetic Fluids
235
Esters
236
Silicones
236
Ethers
237
Fluorochemicals
237
13.3
Fluid Selection
238
13.3.1
Rotary Vane, Piston, and Lobe Pumps
238
13.3.2
Turbomolecular Pumps
240
xiv
13.3.3 Diffusion
Pumps
241
13.4
Reclamation
244
References
244
Problems
245
14.
Getter and Ion Pumps
247
14.1
Getter Pumps
247
14.1.1
Titanium Sublimation Pumps
248
14.1.2
Nonevaporable Getter
258
14.2
Ion Pumps
256
References
260
Problems
261
15.
Cryogenic Pumps
263
15.1
Pumping Mechanisms
264
15.2
Speed, Pressure, and Saturation
267
15.3
Refrigeration Techniques
271
15.4
Cryogenic Pump Characteristics
276
15.4.1
Medium Vacuum
Sorption
Pumps
276
15.4.2
High Vacuum Gas Refrigerator Pumps
279
15.4.3
High Vacuum Liquid Pumps
283
References
284
Problems
286
MATERIALS
16.
Materials in Vacuum
289
16.1
Metals
290
16.1.1
Vaporization
290
16.1.2
Permeability
290
16.1.3
Outgassing
291
Dissolved Gas
292
Surface and Near-Surface Gas
295
16.1.4
Structural Metals
299
16.2
Glasses and Ceramics
300
16.3
Polymers
306
References
309
Problems
311
17.
Joints, Seals, and Valves
313
17.1
Permanent
Jointe
313
17.1.1
Welding
314
17.1.2
Soldering and Brazing
318
17.1.3
Joining Glasses and Ceramics
319
17.2
Demountable Joints
321
17.2.1
Elastomer Seals
322
17.2.2
Metal Gaskets
328
17.3
Valves and Motion Feedthroughs
329
17.3.1
Small Valves
330
17.3.2
Large Valves
332
17.3.3
Special Purpose Valves
335
17.3.4
Motion Feedthroughs
337
References
341
Problems
342
18.
LubricatioD
345
18.1
Lubrication Processes
345
18.2
Rheology
347
18.2.1
Absolute Viscosity
347
18.2.2
Kinematic Viscosity
348
18.2.3
Viscosity Index
348
18.3
Lubrication Techniques
349
18.3.1
Liquid Lubrication
349
18.3.2
Grease Lubrication
352
18.3.3.
Dry Lubrication
353
References
355
Problems
356
SYSTEMS
19.
Rough Vacuum Pumping
359
19.1
Pumping Rate
360
19.1.1
Pump Size
360
19.1.2
Aerosol Formation
362
19.2
Crossover
365
19.2.1
Oil
Backstreaming 366
19.2.2
Overload Criteria
369
Diffusion Pumps
369
Turbomolecular Pumps
371
Cryogenic Pumps
373
Ion Pumps
374
References
375
Problems
376
20.
High Vacuum Systems
379
20.1
Diffusion-Pumped Systems
379
xvi
20.1.1
System
Operation 382
20.1.2
Operating Concerns
383
20.2
Turbomolecular-Pumped Systems
385
20.2.1
System Operation
388
20.2.2
Operating Concerns
389
20.3
Ion-Pumped Systems
391
20.3.1
System Operation
391
20.3.2
Operating Concerns
393
20.4
Cryogenic-Pumped Systems
394
20.4.1
System Operation
394
20.4.2
Regeneration
394
20.4.3
Operating Concerns
396
20.5
High Vacuum Chambers
397
20.5.1
Managing Water Vapor
References
400
Problems
400
21.
Ultraclean Vacuum Systems
. 403
21.1
Ultraclean Pumps
405
21.1.1
Turbomolecular Pumps
405
21.1.2
Cryogenic Pumps
406
21.1.3
Sputter-Ion, TSP, and
NEG
Pumps
406
21.2
Ultraclean Chambers
407
21.2.1
Chamber Materials and Components
407
21.2.2
Chamber Pumping
409
21.2.3
Pressure Measurement
412
References
412
Problems
413
22.
High Flow Systems
415
22.1
Mechanically Pumped Systems
417
22.2
Throttled High Vacuum Systems
419
22.2.1
Process Chambers
419
22.2.2
Turbo Pumped
421
22.2.3
Cryo Pumped
424
References
429
Problems
429
23.
Multichamber Systems
431
23.1
Flexible Substrates
432
23.2
Rigid Substrates
434
23.2.1
Inline Systems
435
232.2
Cluster Systems
440
zvU
23.3
Instrumentation Systems
443
References
444
Problems
444
24.
Leak Detection
447
24.1
Instruments
448
24.1.1
Forward-Flow Leak Detector
448
24.1.2
Counter-Flow Leak Detector
449
24.2
Performance
450
24.2.1
Sensitivity
450
24.2.2
Response Time
452
24.2.3
Sampling Pressurized Chambers
453
24.3
Leak-Hunting Techniques
453
References
457
Problems
457
Symbols
459
APPENDIXES
A. Units and Constants
463
A.1 Physical Constants
463
A.2 SI Base Units
463
A.3 Conversion Factors
464
B. Gas Properties
466
B.I Mean Free Paths of Gases as a Function of Pressure
466
B.2 Physical Properties of Gases and Vapors at
Τ
=0°C
467
B.3 Cryogenic Properties of Gases
468
B.4 Gas Conductance and Flow Formulas
469
B.5 Vapor Pressure Curves of Common Gases
475
B.6 Appearances of Discharges in Gases and Vapors at
Low Pressures
477
C. Material Properties
478
C.I Outgassing Rates of Vacuum Baked Metals
478
C.2 Outgassing Rates of Unbaked Metals
479
C.3 Outgassing Rates of Unbaked Ceramics and Glasses
480
C.4 Outgassing Rates of Elastomers
480
C.5 Permeability of Polymeric Materials
481
C.6 Vapor Pressure Curves of Solid and Liquid Elements
482
C.7 Outgassing Rates of Polymers
485
C.8 Austenitic Stainless Steels
486
xviii
D.
Isotopie
Abundances
488
E.
Cracking Patterns
492
E.I Cracking Patterns of Pump Fluids
492
E.2 Cracking Patterns of Gases
494
E.3 Cracking Patterns of Common Vapors
495
E.4 Cracking Patterns of Common Solvents
496
E.5 Cracking Patterns of Semiconductor Dopants
497
F. Pump Fluid Properties
498
F.I Compatibility of Elastomers and Pump Fluids
498
F.2 Vapor Pressures of Mechanical Pump Fluids
499
F.3 Vapor Pressure of Diffusion Pump Fluids
500
F.4 Kinematic Viscosity of Pump Fluids
501
F.5 Kinematic Viscosity Conversion Factors
502
References
503
Index
505
|
| any_adam_object | 1 |
| author | O'Hanlon, John F. |
| author_facet | O'Hanlon, John F. |
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| classification_tum | MAS 970f |
| ctrlnum | (OCoLC)248878432 (DE-599)BVBBV017028986 |
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| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.55 |
| dewey-search | 621.55 |
| dewey-sort | 3621.55 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Maschinenbau / Maschinenwesen Physik Maschinenbau |
| edition | 3. ed. |
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| id | DE-604.BV017028986 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T19:12:56Z |
| institution | BVB |
| isbn | 9780471270522 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-010277231 |
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| physical | XVIII, 516 S. Ill., graph. Darst. |
| publishDate | 2003 |
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| publisher | Wiley-Interscience |
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| spelling | O'Hanlon, John F. Verfasser aut A user's guide to vacuum technology John F. O'Hanlon 3. ed. Hoboken, NJ Wiley-Interscience 2003 XVIII, 516 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Vakuumtechnik (DE-588)4062270-8 gnd rswk-swf Vakuumtechnik (DE-588)4062270-8 s DE-604 Digitalisierung UB Regensburg application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=010277231&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | O'Hanlon, John F. A user's guide to vacuum technology Vakuumtechnik (DE-588)4062270-8 gnd |
| subject_GND | (DE-588)4062270-8 |
| title | A user's guide to vacuum technology |
| title_auth | A user's guide to vacuum technology |
| title_exact_search | A user's guide to vacuum technology |
| title_full | A user's guide to vacuum technology John F. O'Hanlon |
| title_fullStr | A user's guide to vacuum technology John F. O'Hanlon |
| title_full_unstemmed | A user's guide to vacuum technology John F. O'Hanlon |
| title_short | A user's guide to vacuum technology |
| title_sort | a user s guide to vacuum technology |
| topic | Vakuumtechnik (DE-588)4062270-8 gnd |
| topic_facet | Vakuumtechnik |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=010277231&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT ohanlonjohnf ausersguidetovacuumtechnology |