Microoptics:
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | German |
| Veröffentlicht: |
Weinheim
Wiley-VCH
2003
|
| Ausgabe: | 2., rev. and enl. ed. |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XIV, 433 S. Ill., graph. Darst. |
| ISBN: | 3527403558 |
Internformat
MARC
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| 100 | 1 | |a Sinzinger, Stefan |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Microoptics |c Stefan Sinzinger ; Jürgen Jahns |
| 250 | |a 2., rev. and enl. ed. | ||
| 264 | 1 | |a Weinheim |b Wiley-VCH |c 2003 | |
| 300 | |a XIV, 433 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 4 | |a optika - mikrooptika - integrirana optika - tehnologija - optoelektronske komponente - aplikacije | |
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Datensatz im Suchindex
| _version_ | 1804129838496219136 |
|---|---|
| adam_text | STEFAN SINZINGER, JUERGEN JAHNS MICROOPTICS 2 ND , REVISED AND ENLARGED
EDITION WILEY- VCH WILEY-VCH GMBH & CO. KGAA CONTENTS PREFACE V FOREWORD
TO THE SECOND EDITION VII 1 FROM MACROOPTICS TO MICROOPTICS * AN
OVERVIEW 1 1.1 OPTICS TECHNOLOGY 1 1.2 CLASSIFICATION OF OPTICAL
HARDWARE 3 1.3 OPTICAL FUNCTIONS AND THEIR IMPLEMENTATION 4 1.4 SCOPE OF
THIS BOOK 7 1.5 ORGANIZATION OF THE BOOK 8 1.6 FURTHER READING - 10 1.7
ACKNOWLEDGMENT 10 REFERENCES 12 2 OPTICAL COMPONENTS WITH SMALL
DIMENSIONS 13 2.1 MICROLENS PERFORMANCE 13 2.1.1 DIFFRACTION LIMIT 13
2.1.2 ABERRATIONS 15 2.1.3 QUALITY CRITERIA FOR LENS PERFORMANCE 18 2.2
SCALING * FROM MACRO- TO MICRO-COMPONENTS 25 2.2.1 SCALING OF
DIFFRACTIVE AND REFRACTIVE LENSES 25 2.2.2 SCALING OF PRISMS 27 2.3 LIST
OF SYMBOLS 30 2.4 EXERCISES 31 REFERENCES 32 3 LITHOGRAPHIE FABRICATION
TECHNOLOGY 33 3.1 PATTERN GENERATION 33 3.1.1 PLOTTING AND
PHOTOREDUETION 35 3.1.2 LASER BEAM WRITING 36 3.1.3 X-RAY AND E-BEAM
WRITING 37 3.1.4 GREY-LEVEL MASKS 42 3.1.5 SPECIAL MASKS 45 3.2 COATING
OR THIN LAYER DEPOSITION 46 3.2.1 SPIN COATING 46 X CONTENTS 3.2.2
PHYSICAL VAPOUR DEPOSITION (PVD) 46 3.2.3 CHEMICAL VAPOUR DEPOSITION
(CVD) 49 3.3 ALIGNMENT AND EXPOSURE 49 3.3.1 EXPOSURE GEOMETRY 50 3.3.2
LIGHT SOURCES FOR MASK LITHOGRAPHY 52 3.3.3 ILLUMINATION WITH X-RAY
(SYNCHROTRON) AND PROTON RADIATION 53 3.3.4 MULTIMASK ALIGNMENT 53 3.3.5
THROUGH-WAFER ALIGNMENT 55 3.4 PATTERN TRANSFER 56 3.4.1 ETCHING 57
3.4.2 LASER MICROMACHINING * LASER INITIATED ABLATION 62 3.4.3
MECHANICAL MICROMACHINING * DIAMOND TURNING OF MICROOPTICAL COM- PONENTS
63 3.4.4 REPLICATION OF MICRORELIEF STRUCTURES 64 3.4.5 DIFFUSION *
ION-EXCHANGE PROCESSES 67 3.5 BONDING OF PLANAR STRUCTURES 67 3.5.1
FLIP-CHIP BONDING 67 3.5.2 THERMO-ANODIC BONDING 69 3.6 LIST OF NEW
SYMBOLS 71 3.7 EXERCISES 73 REFERENCES 74 4 MEASUREMENT AND
CHARACTERIZATION OF MICROOPTICS 77 4.1 PHYSICAL PROBING*PROFILOMETRY 79
4.2 INTERFEROMETRY 80 4.2.1 TYPES OF INTERFEROMETERS 81 4.2.2
PHASE-SHIFTING INTERFEROMETRY 84 4.2.3 EVALUATION OF INTERFEROMETRIC
MEASUREMENTS 86 4.3 IMAGING EXPERIMENTS 87 4.4 ARRAY TESTING 88 4.5 LIST
OF NEW SYMBOLS 90 4.6 EXERCISES 91 REFERENCES 92 5 REFRACTIVE
MICROOPTICS 93 5.1 SURFACE PROFILE MICROLENSES 94 5.1.1 MELTED
PHOTORESIST LENSES * REFLOW LENSES 94 5.1.2 MICROLENS FABRICATION BY
MASS TRANSPORT MECHANISMS IN SEMICONDUCTORS 100 5.1.3 MICROLENSES FORMED
BY VOLUME CHANGE OF A SUBSTRATE MATERIAL .... 102 5.1.4 LITHOGRAPHICALLY
INITIATED VOLUME GROWTH IN PMMA FOR MICROLENS FABRICATION 103 5.1.5
DISPENSED OR DROPLET MICROLENSES 106 5.1.6 DIRECT WRITING TECHNIQUES FOR
REFRACTIVE MICROOPTICS 107 5.1.7 GREY-SCALE LITHOGRAPHY FOR ROE
FABRICATION 110 5.2 GRADIENT-INDEX (GRIN) OPTICS 110 CONTENTS XI 5.2.1
GRIN ROD LENSES 111 5.2.2 PLANAR GRIN LENSES 114 5.3 MICROPRISMS AND
MICROMIRRORS 121 5.3.1 LITHOGRAPHY FOR THE FABRICATION OF MICROPRISMS
122 5.3.2 MICROMACHINING OF MICROPRISMS USING SINGLE POINT DIAMOND
TURNING OR EMBOSSING 124 5.3.3 ANISOTROPIE ETCHMG OF MIRROR STRUCTURES
IN CRYSTALLINE MATERIALS . . . 124 5.4 LIST OF NEW SYMBOLS 126 5.5
EXERCISES 127 REFERENCES 128 6 DIFFRACTIVE MICROOPTICS 133 6.1 TRADING
SPATIAL RESOLUTION FOR REDUCED PHASE THICKNESS 133 6.1.1 BLAZING AND
PHASE QUANTIZATION 133 6.1.2 ALTERNATIVE QUANTIZATION SCHEMES FOR
MICROLENSES 136 6.1.3 EXAMPLES OF DIFFRACTIVE OPTICAL COMPONENTS 137 6.2
FABRICATION OF DIFFRACTIVE OPTICS 138 6.2.1 MULTIMASK PROCESSING FOR
KINOFORM DOES 138 6.2.2 FABRICATION ERRORS FOR KINOFORM ELEMENTS 139 6.3
MODELLING OF DIFFRACTIVE OPTICS 141 6.3.1 APPROACHES TO RIGOROUS
DIFFRACTION THEORY 142 6.3.2 THIN AND THICK GRATINGS 145 6.3.3 SCALAR
DIFFRACTION THEORY 146 6.3.4 FRESNEL AND FRAUNHOFER DIFFRACTION 148
6.3.5 LINEAR KINOFORM GRATING 148 6.3.6 DIFFRACTIVE LENSES 152 6.3.7
RAY-TRACING ANALYSIS OF DIFFRACTIVE LENSES 155 6.3.8 CHROMATIC
ABERRATIONS OF DIFFRACTIVE LENSES 157 6.3.9 PHOTON SIEVES FOR X-RAY
FOCUSING 158 6.3.10 DETOUR-PHASE DIFFRACTIVE OPTICAL ELEMENTS 158 6.3.11
POLARISATION-SELECTIVE DIFFRACTIVE OPTICAL ELEMENTS 160 6.3.12
HOLOGRAPHIE OPTICAL ELEMENTS AS THICK BRAGG GRATINGS 161 6.3.13
EFFECTIVE MEDIUM THEORY OF ZERO-ORDER GRATINGS 164 6.4 DESIGN OF
DIFFRACTIVE OPTICAL ELEMENTS 165 6.4.1 DOES OPTIMIZED FOR IMAGING ALONG
A TILTED OPTICAL AXIS 166 6.4.2 ITERATIVE DESIGN TECHNIQUES FOR DOES 168
6.5 LIST OF NEW SYMBOLS 170 6.6 EXERCISES 171 REFERENCES 172 7
INTEGRATED WAVEGUIDE OPTICS 177 7.1 MODES IN OPTICAL WAVEGUIDES 177
7.1.1 DISCRETE WAVEGUIDE MODES 178 7.1.2 FIELD DISTRIBUTION OF THE MODES
180 7.2 WAVEGUIDE COUPLERS AND BEAM SPLITTERS 181 CONTENTS 7.2.1
EXTERNAL COUPLING 182 7.2.2 COUPLING BETWEEN WAVEGUIDES 184 7.2.3 3 DB
COUPLERS FOR BEAM SPLITTING 186 7.2.4 BRANCHING WAVEGUIDES 187 7.3
WAVEGUIDE OPTICAL MODULATORS 187 7.3.1 THE ELECTRO-OPTIC EFFECT 187
7.3.2 THE ELECTRO-OPTIC PHASE MODULATOR 188 7.3.3 POLARISATION MODULATOR
* DYNAMIC PHASE RETARDER 188 7.3.4 INTEGRATED INTENSITY MODULATORS 189
7.3.5 ELECTRO-OPTIC DIRECTIONAL COUPLERS 190 7.4 APPLICATIONS OF
WAVEGUIDE OPTICS 191 7.4.1 WAVEGUIDE OPTICS IN OPTICAL INTERCONNECTS 191
7.4.2 WAVEGUIDE OPTICAL SENSORS 195 7.5 LIST OF NEW SYMBOLS 198 7.6
EXERCISES 199 REFERENCES 200 MICROOPTICAL SYSTEMS 203 8.1 SYSTEMS
INTEGRATION 204 8.1.1 MOEMS FOR OPTICAL SYSTEMS INTEGRATION 204 8.1.2
STACKED OPTICS 207 8.1.3 PLANAR OPTICS 208 8.2 IMAGING SYSTEMS FOR
OPTICAL INTERCONNECTS 211 8.2.1 DILUTE ARRAYS 212 8.2.2 CONVENTIONAL
IMAGING 213 8.2.3 MULTICHANNEL IMAGING SYSTEM 214 8.2.4 HYBRID IMAGING
216 8.2.5 INTEGRATED MICROOPTICAL IMAGING SYSTEMS 218 8.3 LIST OF NEW
SYMBOLS 221 8.4 EXERCISES 222 REFERENCES 223 OPTOELECTRONIC DEVICES AND
SMART PIXEL ARRAYS 225 9.1 SUPERLATTICES AND MULTIPLE QUANTUM WELLS 225
9.1.1 HETERO-SUPERLATTICES 226 9.1.2 NIPI-SUPERLATTICES 226 9.2 THE SEED
(SELF-ELECTRO-OPTIC EFFECT DEVICE) 228 9.2.1 STRUCTURE AND FABRICATION
228 9.2.2 ENERGY DISSIPATION AND EFFICIENCY 229 9.2.3 ALL-OPTICAL
MODULATION 229 9.2.4 S-SEED 230 9.2.5 PERFORMANCE OF S-SEEDS 231 9.3
VERTICAL CAVITY SURFACE EMITTING LASERS 232 9.3.1 STRUCTURE AND
FABRICATION 233 9.3.2 MIRRORS ANDRESONATOR 235 CONTENTS XIII 9.3.3 I -V
CHARACTERISTICS AND EFFICIENCY 237 9.3.4 SPECTRAL CHARACTERISTICS AND
THERMAL EFFECTS 238 9.3.5 OTHER MATERIAL COMBINATIONS 239 9.4 SMART
PIXEL ARRAYS (SPAS) 240 9.5 LIST OF NEW SYMBOLS 243 9.6 EXERCISES 244
REFERENCES 245 10 ARRAY ILLUMINATORS 247 10.1 IMAGE PLANE ARRAY
ILLUMINATION 249 10.1.1 PHASE-CONTRAST ARRAY ILLUMINATION 249 10.1.2
MULTIPLE BEAM-SPLITTING THROUGH APERTURE DIVISION 254 10.1.3 MULTIPLE
BEAM-SPLITTING THROUGH WAVEGUIDE COUPLING 254 10.2 FRESNEL PLANE ARRAY
ILLUMINATORS 255 10.3 FOURIER PLANE ARRAY ILLUMINATORS 258 10.3.1
DAMMANN GRATINGS 258 10.3.2 MODIFICATIONS OF DAMMANN S DESIGN PROCEDURE
262 10.3.3 LENSLET ARRAYS AS FOURIER PLANE ARRAY ILLUMINATORS 264 10.3.4
CASCADING OF BEAM-SPLITTER GRATINGS 265 10.4 SUMMARY 266 10.5 LIST OF
NEW SYMBOLS 268 10.6 EXERCISES 269 REFERENCES 270 11 MICROOPTICAL
COMPONENTS FOR BEAM SHAPING 273 11.1 BEAM SHAPING FROM A GENERAL
PERSPECTIVE 274 11.2 LATERAL LASER BEAM SHAPING 278 11.2.1 COLLIMATION
OF ASTIGMATIC BEAMS 278 11.2.2 LASER BEAM HOMOGENIZATION 280 11.3 AXIAL
BEAM SHAPING 283 11.4 TEMPORAL BEAM SHAPING 286 11.5 MULTIPLE APERTURE
BEAM SHAPING 288 11.6 INTRA-CAVITY BEAM SHAPING 289 11.6.1 INTRA-CAVITY
BEAM SHAPING OF INDIVIDUAL LASER BEAMS 289 11.6.2 INTRA-CAVITY BEAM
SHAPING OF ARRAYS OF LASER BEAMS 291 11.7 LIST OF NEW SYMBOLS 294 11.8
EXERCISES 295 REFERENCES 296 12 MICROOPTICS FOR OPTICAL INFORMATION
TECHNOLOGY 301 12.1 OPTICAL INFORMATION PROCESSING 301 12.1.1 ANALOG
INFORMATION PROCESSING 301 12.1.2 DIGITAL OPTICAL INFORMATION PROCESSING
303 12.2 OPTICAL INTERCONNECTS 303 12.2.1 TERMINOLOGY 304 XIV CONTENTS
12.2.2 INTERCONNECT HIERARCHY 306 12.2.3 OPTICAL CLOCK DISTRIBUTION 311
12.3 MICROOPTICS FOR OPTICAL DATA STORAGE 311 12.3.1 BASICS OF OPTICAL
DATA STORAGE 311 12.3.2 MICROOPTICS FOR READ/WRITE HEADS 315 12.3.3
VOLUME OPTICAL MEMORIES 321 12.4 LIST OF NEW SYMBOLS 326 12.5 EXERCISES
327 REFERENCES 328 13 MICROOPTICS IN OPTICAL DESIGN 333 13.1
DIFFRACTIVE/REFRACTIVE OPTICAL ELEMENTS 334 13.2 ACHROMATISATION WITH
DIFFRACTIVE/REFRACTIVE DOUBLETS 334 13.3 INTERFEROMETRICALLY FABRICATED
HYBRID DIFFRACTIVE/REFRACTIVE OBJECTIVE LENSES . . 336 13.4 DIFFRACTIVE
CORRECTION OF HIGH-NA OBJECTIVES 337 13.5 MULTI-ORDER LENSES 339 13.6
MULTILAYER DIFFRACTIVE OPTICAL ELEMENTS FOR ACHROMATISATION OF
PHOTOGRAPHIE LENSES 340 13.7 ATHERMALISATION WITH HYBRID ELEMENTS 343
13.8 LIST OF NEW SYMBOLS 346 13.9 EXERCISES 347 REFERENCES 348 14 NOVEL
DIRECTIONS 351 14.1 BEAM STEERING WITH MICROLENSES 352 14.2 COMPOSITE
IMAGING WITH LENSLET ARRAYS 356 14.3 CONFOCAL IMAGING WITH MICROOPTICS
359 14.4 WAVEFRONT SENSING WITH THE SHACK-HARTMANN SENSOR 363 14.5
ADAPTIVE MICROOPTICS 364 14.6 MICROOPTICAL MANIPULATION OF ATOMS 365
14.7 PHOTONIC CRYSTALS 367 14.8 LIST OF NEW SYMBOLS 373 14.9 EXERCISES
374 REFERENCES 375 CONCLUSION 379 GLOSSARY 381 ABBREVIATIONS 391
SOLUTIONS TO EXERCISES 395 INDEX 427
|
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| author | Sinzinger, Stefan Jahns, Jürgen 1953- |
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| edition | 2., rev. and enl. ed. |
| format | Book |
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| id | DE-604.BV016522436 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T19:11:30Z |
| institution | BVB |
| isbn | 3527403558 |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-010211089 |
| oclc_num | 442641174 |
| open_access_boolean | |
| owner | DE-19 DE-BY-UBM DE-898 DE-BY-UBR DE-355 DE-BY-UBR DE-M347 DE-1046 DE-703 DE-92 DE-1043 DE-91 DE-BY-TUM DE-210 DE-29T DE-91G DE-BY-TUM DE-522 DE-523 DE-526 DE-11 DE-188 |
| owner_facet | DE-19 DE-BY-UBM DE-898 DE-BY-UBR DE-355 DE-BY-UBR DE-M347 DE-1046 DE-703 DE-92 DE-1043 DE-91 DE-BY-TUM DE-210 DE-29T DE-91G DE-BY-TUM DE-522 DE-523 DE-526 DE-11 DE-188 |
| physical | XIV, 433 S. Ill., graph. Darst. |
| publishDate | 2003 |
| publishDateSearch | 2003 |
| publishDateSort | 2003 |
| publisher | Wiley-VCH |
| record_format | marc |
| spelling | Sinzinger, Stefan Verfasser aut Microoptics Stefan Sinzinger ; Jürgen Jahns 2., rev. and enl. ed. Weinheim Wiley-VCH 2003 XIV, 433 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier optika - mikrooptika - integrirana optika - tehnologija - optoelektronske komponente - aplikacije Mikrooptik (DE-588)4362762-6 gnd rswk-swf Mikrooptik (DE-588)4362762-6 s DE-604 Jahns, Jürgen 1953- Verfasser (DE-588)17408823X aut GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=010211089&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Sinzinger, Stefan Jahns, Jürgen 1953- Microoptics optika - mikrooptika - integrirana optika - tehnologija - optoelektronske komponente - aplikacije Mikrooptik (DE-588)4362762-6 gnd |
| subject_GND | (DE-588)4362762-6 |
| title | Microoptics |
| title_auth | Microoptics |
| title_exact_search | Microoptics |
| title_full | Microoptics Stefan Sinzinger ; Jürgen Jahns |
| title_fullStr | Microoptics Stefan Sinzinger ; Jürgen Jahns |
| title_full_unstemmed | Microoptics Stefan Sinzinger ; Jürgen Jahns |
| title_short | Microoptics |
| title_sort | microoptics |
| topic | optika - mikrooptika - integrirana optika - tehnologija - optoelektronske komponente - aplikacije Mikrooptik (DE-588)4362762-6 gnd |
| topic_facet | optika - mikrooptika - integrirana optika - tehnologija - optoelektronske komponente - aplikacije Mikrooptik |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=010211089&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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