Infrared ellipsometry on III-V semiconductor layer structures:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
2003
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| Schlagworte: | |
| Beschreibung: | Leipzig, Univ., Habil.-Schr., 2003 |
| Beschreibung: | 107 S. Ill., graph. Darst. |
Internformat
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| 100 | 1 | |a Schubert, Mathias |d 1966- |e Verfasser |0 (DE-588)115551867 |4 aut | |
| 245 | 1 | 0 | |a Infrared ellipsometry on III-V semiconductor layer structures |c von Mathias Schubert |
| 264 | 1 | |c 2003 | |
| 300 | |a 107 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
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| 650 | 0 | 7 | |a Ellipsometrie |0 (DE-588)4152025-7 |2 gnd |9 rswk-swf |
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Datensatz im Suchindex
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| author | Schubert, Mathias 1966- |
| author_GND | (DE-588)115551867 |
| author_facet | Schubert, Mathias 1966- |
| author_role | aut |
| author_sort | Schubert, Mathias 1966- |
| author_variant | m s ms |
| building | Verbundindex |
| bvnumber | BV016510907 |
| classification_tum | PHY 693d PHY 703d MSR 372d |
| ctrlnum | (OCoLC)633112149 (DE-599)BVBBV016510907 |
| discipline | Physik Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik |
| format | Book |
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| genre_facet | Hochschulschrift |
| id | DE-604.BV016510907 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T19:11:22Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-010205343 |
| oclc_num | 633112149 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-355 DE-BY-UBR |
| owner_facet | DE-91 DE-BY-TUM DE-355 DE-BY-UBR |
| physical | 107 S. Ill., graph. Darst. |
| publishDate | 2003 |
| publishDateSearch | 2003 |
| publishDateSort | 2003 |
| record_format | marc |
| spelling | Schubert, Mathias 1966- Verfasser (DE-588)115551867 aut Infrared ellipsometry on III-V semiconductor layer structures von Mathias Schubert 2003 107 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Leipzig, Univ., Habil.-Schr., 2003 Dielektrische Funktion (DE-588)4241321-7 gnd rswk-swf Mehrschichtsystem (DE-588)4244347-7 gnd rswk-swf Drei-Fünf-Halbleiter (DE-588)4150649-2 gnd rswk-swf Ellipsometrie (DE-588)4152025-7 gnd rswk-swf Mischkristall (DE-588)4170112-4 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Drei-Fünf-Halbleiter (DE-588)4150649-2 s Mischkristall (DE-588)4170112-4 s Mehrschichtsystem (DE-588)4244347-7 s Dielektrische Funktion (DE-588)4241321-7 s Ellipsometrie (DE-588)4152025-7 s DE-604 |
| spellingShingle | Schubert, Mathias 1966- Infrared ellipsometry on III-V semiconductor layer structures Dielektrische Funktion (DE-588)4241321-7 gnd Mehrschichtsystem (DE-588)4244347-7 gnd Drei-Fünf-Halbleiter (DE-588)4150649-2 gnd Ellipsometrie (DE-588)4152025-7 gnd Mischkristall (DE-588)4170112-4 gnd |
| subject_GND | (DE-588)4241321-7 (DE-588)4244347-7 (DE-588)4150649-2 (DE-588)4152025-7 (DE-588)4170112-4 (DE-588)4113937-9 |
| title | Infrared ellipsometry on III-V semiconductor layer structures |
| title_auth | Infrared ellipsometry on III-V semiconductor layer structures |
| title_exact_search | Infrared ellipsometry on III-V semiconductor layer structures |
| title_full | Infrared ellipsometry on III-V semiconductor layer structures von Mathias Schubert |
| title_fullStr | Infrared ellipsometry on III-V semiconductor layer structures von Mathias Schubert |
| title_full_unstemmed | Infrared ellipsometry on III-V semiconductor layer structures von Mathias Schubert |
| title_short | Infrared ellipsometry on III-V semiconductor layer structures |
| title_sort | infrared ellipsometry on iii v semiconductor layer structures |
| topic | Dielektrische Funktion (DE-588)4241321-7 gnd Mehrschichtsystem (DE-588)4244347-7 gnd Drei-Fünf-Halbleiter (DE-588)4150649-2 gnd Ellipsometrie (DE-588)4152025-7 gnd Mischkristall (DE-588)4170112-4 gnd |
| topic_facet | Dielektrische Funktion Mehrschichtsystem Drei-Fünf-Halbleiter Ellipsometrie Mischkristall Hochschulschrift |
| work_keys_str_mv | AT schubertmathias infraredellipsometryoniiivsemiconductorlayerstructures |