Copper and hydrogen related defects in silicon:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
Berlin
Logos-Verl.
2002
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | VI, 106 S. Ill., graph. Darst. : 21 cm |
| ISBN: | 3832500847 |
Internformat
MARC
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Datensatz im Suchindex
| _version_ | 1808045322499260416 |
|---|---|
| adam_text |
CONTENTS
ZUSAMMENFASSUNG
.
1
SUMMARY
.
3
1.
INTRODUCTION
.
5
1.1
DEFECTS
IN
CRYSTALLINE
SEMICONDUCTORS
.
6
1.2
HYDROGEN
IN
SILICON
.
11
1.3
COPPER
IN
SILICON
.
14
2.
EXPERIMENTAL
TECHNIQUES
.
17
2.1
CAPACITANCE
MEASUREMENTS
.
17
2.1.1
CAPACITANCE-VOLTAGE
MEASUREMENTS
.
17
2.1.2
CAPACITANCE
SPECTROSCOPY
.
19
2.1.3
MEASUREMENT
OF
CONCENTRATION
PROFILES
.
27
2.1.4
OPTICAL
EXCITATION
.
28
2.1.5
EXPERIMENTAL
SETUP
.
30
2.2
PHOTOLUMINESCENCE
.
31
2.2.1
EXCITATION
AND
RECOMBINATION
OF
CHARGE
CARRIERS
.
31
2.2.2
VIBRONIC
PROPERTIES
AND
ISOTOPE
EFFECTS
.
34
2.2.3
EXPERIMENTAL
SETUP
.
35
2.3
MATERIAL
AND
SAMPLE
PREPARATION
.
36
3.
EXPERIMENTAL
RESULTS
.
39
3.1
SUBSTITUTIONAL
COPPER
AND
COPPER-HYDROGEN
COMPLEXES
.
39
3.1.1
DEEP
LEVELS
.
.
.
.
.
39
3.1.2
DEPTH
PROFILES
.
45
3.1.3
ANALYSIS
OF
DEPTH
PROFILES
.
50
3.1.4
ANNEALING
EXPERIMENTS
.
61
3.2
THE
COPPER
7
PAIR
DEFECT
.
67
3.2.1
DLTS
AND
PL-MEASUREMENTS
.
67
3.2.2
MODEL
FOR
THE
CONCENTRATION-DEPENDENCE
OF
THE
PL-SIGNAL
.
71
3.3
THE
CU*
DEFECT
.
75
3.3.1
LUMINESCENCE
EXPERIMENTS
.
76
3.3.2
DLTS
EXPERIMENTS
.
82
VI
CONTENTS
4.
DISCUSSION
.
87
4.1
COPPER-HYDROGEN
COMPLEXES
.
87
4.1.1
RESULTS
FROM
PREVIOUS
STUDIES
.
87
4.1.2
CHEMICAL
TRENDS
.
88
4.1.3
COMPARISON
BETWEEN
THEORY
AND
EXPERIMENT
.
.
.
YY
.
90
4.2
THE
COPPER-PAIR
AND
CU*
.
92
4.2.1
COMPARISON
OF
THEORY
AND
EXPERIMENT
.
92
4.3
CONCLUSION
AND
OUTLOOK
.
96
LIST
OF
SYMBOLS
AND
ACRONYMS
.
97
BIBLIOGRAPHY
.
99
ACKNOWLEDGEMENTS
.
107
CURRICULUM
VITAE
.
109 |
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| author | Knack, Steffen 1974- |
| author_GND | (DE-588)124313493 |
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| author_role | aut |
| author_sort | Knack, Steffen 1974- |
| author_variant | s k sk |
| building | Verbundindex |
| bvnumber | BV014849895 |
| classification_rvk | UQ 2400 |
| ctrlnum | (OCoLC)633950000 (DE-599)BVBBV014849895 |
| discipline | Physik |
| format | Thesis Book |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV014849895 |
| illustrated | Illustrated |
| indexdate | 2024-08-22T00:26:26Z |
| institution | BVB |
| isbn | 3832500847 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-010046284 |
| oclc_num | 633950000 |
| open_access_boolean | |
| owner | DE-703 DE-188 |
| owner_facet | DE-703 DE-188 |
| physical | VI, 106 S. Ill., graph. Darst. : 21 cm |
| publishDate | 2002 |
| publishDateSearch | 2002 |
| publishDateSort | 2002 |
| publisher | Logos-Verl. |
| record_format | marc |
| spelling | Knack, Steffen 1974- Verfasser (DE-588)124313493 aut Copper and hydrogen related defects in silicon vorgelegt von Steffen Knack Berlin Logos-Verl. 2002 VI, 106 S. Ill., graph. Darst. : 21 cm txt rdacontent n rdamedia nc rdacarrier Dresden, Techn. Univ., Diss., 2002 Silicium (DE-588)4077445-4 gnd rswk-swf DLTS (DE-588)4150331-4 gnd rswk-swf Wasserstoff (DE-588)4064784-5 gnd rswk-swf Kupfer (DE-588)4033734-0 gnd rswk-swf Störstelle (DE-588)4193400-3 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Silicium (DE-588)4077445-4 s Störstelle (DE-588)4193400-3 s Kupfer (DE-588)4033734-0 s Wasserstoff (DE-588)4064784-5 s DLTS (DE-588)4150331-4 s DE-604 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=010046284&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Knack, Steffen 1974- Copper and hydrogen related defects in silicon Silicium (DE-588)4077445-4 gnd DLTS (DE-588)4150331-4 gnd Wasserstoff (DE-588)4064784-5 gnd Kupfer (DE-588)4033734-0 gnd Störstelle (DE-588)4193400-3 gnd |
| subject_GND | (DE-588)4077445-4 (DE-588)4150331-4 (DE-588)4064784-5 (DE-588)4033734-0 (DE-588)4193400-3 (DE-588)4113937-9 |
| title | Copper and hydrogen related defects in silicon |
| title_auth | Copper and hydrogen related defects in silicon |
| title_exact_search | Copper and hydrogen related defects in silicon |
| title_full | Copper and hydrogen related defects in silicon vorgelegt von Steffen Knack |
| title_fullStr | Copper and hydrogen related defects in silicon vorgelegt von Steffen Knack |
| title_full_unstemmed | Copper and hydrogen related defects in silicon vorgelegt von Steffen Knack |
| title_short | Copper and hydrogen related defects in silicon |
| title_sort | copper and hydrogen related defects in silicon |
| topic | Silicium (DE-588)4077445-4 gnd DLTS (DE-588)4150331-4 gnd Wasserstoff (DE-588)4064784-5 gnd Kupfer (DE-588)4033734-0 gnd Störstelle (DE-588)4193400-3 gnd |
| topic_facet | Silicium DLTS Wasserstoff Kupfer Störstelle Hochschulschrift |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=010046284&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT knacksteffen copperandhydrogenrelateddefectsinsilicon |