Laser assisted synthesis of nanostructured materials:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Düsseldorf
VDI-Verl.
2002
|
| Ausgabe: | Als Ms. gedr. |
| Schriftenreihe: | Fortschritt-Berichte VDI
Reihe 9, Elektrotechnik, Elektronik ; 357 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Literaturverz. S. 196 - 228 |
| Beschreibung: | X, 229 S. Ill., graph. Darst. |
| ISBN: | 3183357097 |
Internformat
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Datensatz im Suchindex
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| adam_text | FORTSCHRITT-BERICHTE VDI
REIHE 9
ELEKFRONIK/MIKRO-
UND NANOTECHNIK
DR. DR.-ING. HABIL. ANDRE GORBUNOFF,
DRESDEN
NR. 357
LASER-ASSISTED
SYNTHESIS OF
NANOSTRUCTURED
MATERIALS
VDI VERLAG
INDEX
INDEX
NOMENCLATURE VM
PREFACE 1
CHAPTER 1. UV-LASER ABLATION 11
1.1. INTRODUCTION. EXCIMER LASERS AND THEIR PECULIARITIES 11
1.1.1. OPTICAL SOURCES FOR LASER ABLATION 11
1.1.2. PECULIARITIES OF UV-RADIATION INTERACTION WITH MATTER 13
1.2. EXPERIMENTAL 16
1.3. THRESHOLD OF EXCIMER LASER ABLATION IN VACUUM 19
1.3.1. EXPERIMENTAL DATA 19
1.3.2. THEORETICAL CRITERIA 21
1.3.2.1. LASER HEATING AND EVAPORATION 21
1.3.2.2. VAPOR FLOW MODE 24
1.3.2.3. PLASMA IGNITION 25
1.4. EXCIMER LASER ABLATION IN PRESENCE OF THE EROSION PLASMA 28
1.4.1. INTEGRAL CHARACTERISTICS OF THE LASER-TARGET INTERACTION 28
1.4.2. CHARACTERISTICS OF THE EROSION PLASMA 32
1.5. DYNAMICS OF THE LASER ABLATION PLASMA 37
1.5.1. HYDRODYNAMIC FLOW ZONE 39
1.5.2. INERTIAL FREE-MOLECULAR EXPANSION 31
CONCLUSIONS TO CHAPTER 1 48
CHAPTER 2. CROSS-BEAM PLD OF METASTABLE FILM STRUCTURES 49
2.1. INTRODUCTION. PULSED LASER DEPOSITION OF THIN FILMS 49
2.1.1. PECULIARITIES OF PLD 49
2.1.1.1. ENERGETIC DEPOSITION 51
2.1.1.2. HIGH SUPERSATURATION 55
2.1.1.3. QUENCHING RATE 56
2.1.2. THE PROBLEM OF DROPLETS IN PLD . 56
2.1.3. CONCLUSIONS 60
2.2. CROSS-BEAM PLD 60
2.2.1. BASIC PRINCIPLE AND EXPERIMENTAL DETAILS OF CBPLD 61
2.2.2. DROPLETS 63
2.2.3. ANGULAR DISTRIBUTION OF THE LASER PLASMA 64
2.2.4. TRANSFORMATION OF PLASMA CHARACTERISTICS IN COLLIDING EROSION
JETS 69
2.2.4.1. EXPERIMENTAL PROCEDURE 69
2.2.4.2. PARTICLE ENERGIES IN CBPLD 73
VI INDEX
2.2.4.3. EFFICIENCY OF THE PLUME INTERACTION IN CBPLD 74
2.2.4.4. IONIZATION FRACTION OF EROSION PLUME IN CBPLD 76
2.2.6. CONCLUSIONS 78
2.3. PLD OF THIN FILMS, MULTILAYERS, AND ALLOYS 79
2.3.1. INTRODUCTION. METASTABLE FILM STRUCTURES 79
2.3.1.1. ORIGIN AND STABILIZATION OF METASTABLE STATES 79
2.3.1.2. SYNTHESIS OF METASTABLE MATERIALS 80
2.3.1.3. PLD OF METASTABLE FILMS AND ALLOYS 82
2.3.1.4. MATERIALS SYSTEMS STUDIED 84
2.3.2. DEPOSITION AND CHARACTERIZATION DETAILS 89
2.3.3. ABNORMAL THIN FILM METASTABLE STRUCTURES 90
2.3.3.1. CU-CO ALLOYS 90
2.3.3.2. FE-CR ALLOYS 93
2.3.3.3. FE-AL ALLOYS 96
2.3.4. THE PROBLEM OF TRANSITION LAYERS IN PLD 99
2.3.4.1. EXPERIMENTAL RESULTS ] 00
2.3.4.2. BALLISTIC SIMULATIONS 104
2.3.4.3. COMPOSITION PROFILE OF TRANSITION LAYERS IN FE/AL MULTILAYERS
106
2.3.5. CONCLUSIONS 109
CONCLUSIONS TO CHAPTER 2 110
CHAPTER 3. ONE-STEP FABRICATION OF NANOSTRUCTURES IN THIN FILMS 111
3.1. INTRODUCTION. ADVANCED OPTICAL MICROPROCESSING 111
3.1.1. GENERAL TRENDS IN MICROLITHOGRAPHY 111
3.1.2. MASK PROJECTION PHOTOLITHOGRAPHY 113
3.1.3. HOLOGRAPHIC LITHOGRAPHY 115
3.1.4. DIRECT WRITING 118
3.1.5. NEAR-FIELD OPTICAL LITHOGRAPHY 120
3.1.5.1. SNOM-BASED LITHOGRAPHY 121
3.1.5.2. PROXIMITY FOCUSING LITHOGRAPHY 122
3.1.6. ATOM FOCUSING BY LIGHT 129
3.1.7. SUMMARY 131
3.2. SELF-LIMITED LASER THERMOCHEMISTRY 132
3.2.1. INTRODUCTION. NONRECIPROCAL LASER-MICROCHEMICAL PROCESSING 132
3.2.2. EXPERIMENTAL 135
3.2.3. NANOSTRUCTURING OF TI FILMS BY SELF-LIMITED OXIDATION 135
3.2.4. DISCUSSION OF THE SELF-LIMITATION MECHANISM OF STRUCTURE
FORMATION 138
3.2.5. CONCLUSIONS 143
3.3. FABRICATION OF THIN FILM MAGNETIC NANOSTRUCTURES 143
3.3.1. INTRODUCTION. STABILITY OF NANOSTRUCTURES 143
3.3.2. LASER LITHOGRAPHY AND ION BEAM PATTERNING OF METASTABLE FE-CR
ALLOY FILMS 145
3.3.2.1. INTERFERENCE LITHOGRAPHY 145
INDEX VII
3.3.2.2. ION BEAM PATTERNING 147
3.3.2.3. CONCLUSIONS 150
3.3.3. DIRECT WRITING OF NANOSTRUCTURES ON METASTABLE NI/C MULTILAYERS
150
3.3.3.1. EXPERIMENTAL 151
3.3.3.2. MODIFICATION RESULTS. TWO TYPES OF NANOSTRUCTURES 154
3.3.3.3. DISCUSSION OF NANOSTRUCTURE FORMATION MECHANISMS 161
3.3.3.4. LASER DIRECT WRITING OF MAGNETIC STRUCTURES 164
3.3.4. CONCLUSIONS 164
CONCLUSIONS TO CHAPTER 3 166
CHAPTER 4. LASER ABLATION SYNTHESIS OF CARBON NANOTUBES 167
4.1. INTRODUCTION. NEW FORMS OF CARBON 167
4.2. EXPERIMENTAL PROCEDURE. LASER-FURNACE TECHNIQUE 172
4.3. EXPERIMENTAL RESULTS 174
4.4. DISCUSSION. SWNT FORMATION MECHANISM 178
4.4.1. TIMING OF SWNT GROWTH 180
4.4.2. LIQUID STATE CATALYTIC GRAPHITIZATION 183
4.4.3. SOLID-LIQUID-SOLID MECHANISM OF SWNT NUCLEATION AND GROWTH 188
CONCLUSIONS TO CHAPTER 4 193
GENERAL SUMMARY 194
REFERENCES 196
|
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| id | DE-604.BV014765759 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T19:05:59Z |
| institution | BVB |
| isbn | 3183357097 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009999331 |
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| owner_facet | DE-210 DE-83 |
| physical | X, 229 S. Ill., graph. Darst. |
| publishDate | 2002 |
| publishDateSearch | 2002 |
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| series | Fortschritt-Berichte VDI |
| series2 | Fortschritt-Berichte VDI : Reihe 9, Elektrotechnik, Elektronik |
| spelling | Gorbunoff, André 1956- Verfasser (DE-588)12403733X aut Laser assisted synthesis of nanostructured materials André Gorbunoff Als Ms. gedr. Düsseldorf VDI-Verl. 2002 X, 229 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Fortschritt-Berichte VDI : Reihe 9, Elektrotechnik, Elektronik 357 Literaturverz. S. 196 - 228 Nanostrukturiertes Material - Laserablation - Excimerlaser - Impulslaserbeschichten - Laserlithographie - Dünnschichttechnik Impulslaserbeschichten (DE-588)4476620-8 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Nanostrukturiertes Material (DE-588)4342626-8 gnd rswk-swf Excimerlaser (DE-588)4153300-8 gnd rswk-swf Laserlithografie (DE-588)4240927-5 gnd rswk-swf Laserablation (DE-588)4279134-0 gnd rswk-swf Nanostrukturiertes Material (DE-588)4342626-8 s Laserablation (DE-588)4279134-0 s Excimerlaser (DE-588)4153300-8 s Impulslaserbeschichten (DE-588)4476620-8 s Laserlithografie (DE-588)4240927-5 s Dünnschichttechnik (DE-588)4136339-5 s DE-604 Fortschritt-Berichte VDI Reihe 9, Elektrotechnik, Elektronik ; 357 (DE-604)BV047505631 357 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009999331&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Gorbunoff, André 1956- Laser assisted synthesis of nanostructured materials Fortschritt-Berichte VDI Nanostrukturiertes Material - Laserablation - Excimerlaser - Impulslaserbeschichten - Laserlithographie - Dünnschichttechnik Impulslaserbeschichten (DE-588)4476620-8 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Nanostrukturiertes Material (DE-588)4342626-8 gnd Excimerlaser (DE-588)4153300-8 gnd Laserlithografie (DE-588)4240927-5 gnd Laserablation (DE-588)4279134-0 gnd |
| subject_GND | (DE-588)4476620-8 (DE-588)4136339-5 (DE-588)4342626-8 (DE-588)4153300-8 (DE-588)4240927-5 (DE-588)4279134-0 |
| title | Laser assisted synthesis of nanostructured materials |
| title_auth | Laser assisted synthesis of nanostructured materials |
| title_exact_search | Laser assisted synthesis of nanostructured materials |
| title_full | Laser assisted synthesis of nanostructured materials André Gorbunoff |
| title_fullStr | Laser assisted synthesis of nanostructured materials André Gorbunoff |
| title_full_unstemmed | Laser assisted synthesis of nanostructured materials André Gorbunoff |
| title_short | Laser assisted synthesis of nanostructured materials |
| title_sort | laser assisted synthesis of nanostructured materials |
| topic | Nanostrukturiertes Material - Laserablation - Excimerlaser - Impulslaserbeschichten - Laserlithographie - Dünnschichttechnik Impulslaserbeschichten (DE-588)4476620-8 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Nanostrukturiertes Material (DE-588)4342626-8 gnd Excimerlaser (DE-588)4153300-8 gnd Laserlithografie (DE-588)4240927-5 gnd Laserablation (DE-588)4279134-0 gnd |
| topic_facet | Nanostrukturiertes Material - Laserablation - Excimerlaser - Impulslaserbeschichten - Laserlithographie - Dünnschichttechnik Impulslaserbeschichten Dünnschichttechnik Nanostrukturiertes Material Excimerlaser Laserlithografie Laserablation |
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