Transmission electron microscopy studies of the Si-Ge-C system in non-equilibrium conditions:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
2002
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Jena, Univ., Diss., 2002 |
| Beschreibung: | 53 Bl. Ill., graph. Darst. : 30 cm |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV014617610 | ||
| 003 | DE-604 | ||
| 005 | 20021030 | ||
| 007 | t | ||
| 008 | 020730s2002 gw ad|| m||| 00||| eng d | ||
| 016 | 7 | |a 964770288 |2 DE-101 | |
| 035 | |a (OCoLC)248535416 | ||
| 035 | |a (DE-599)BVBBV014617610 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 044 | |a gw |c DE | ||
| 049 | |a DE-355 | ||
| 100 | 1 | |a Gorelik, Tatiana |d 1973- |e Verfasser |0 (DE-588)123912660 |4 aut | |
| 245 | 1 | 0 | |a Transmission electron microscopy studies of the Si-Ge-C system in non-equilibrium conditions |c von Tatiana Gorelik |
| 264 | 1 | |c 2002 | |
| 300 | |a 53 Bl. |b Ill., graph. Darst. : 30 cm | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Jena, Univ., Diss., 2002 | ||
| 650 | 0 | 7 | |a Germaniumlegierung |0 (DE-588)4156872-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Durchstrahlungselektronenmikroskopie |0 (DE-588)4215608-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Siliciumlegierung |0 (DE-588)4181392-3 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ternäres System |0 (DE-588)4150676-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Kohlenstoff |0 (DE-588)4164538-8 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Siliciumlegierung |0 (DE-588)4181392-3 |D s |
| 689 | 0 | 1 | |a Germaniumlegierung |0 (DE-588)4156872-2 |D s |
| 689 | 0 | 2 | |a Kohlenstoff |0 (DE-588)4164538-8 |D s |
| 689 | 0 | 3 | |a Ternäres System |0 (DE-588)4150676-5 |D s |
| 689 | 0 | 4 | |a Durchstrahlungselektronenmikroskopie |0 (DE-588)4215608-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 856 | 4 | 2 | |m DNB Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009935985&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-009935985 | |
Datensatz im Suchindex
| _version_ | 1812460542100504576 |
|---|---|
| adam_text |
CONTENTS
1. INTRODUCTION
2. ION IMPLANTATION
2.1. INTRODUCTION
2.2. EXPERIMENTAL
2.3. RESULTS AND DISCUSSION
2.3.1. ROOM-TEMPERATURE IMPLANTATION
2.3.2. HIGH TEMPERATURE IMPLANTATION
2.3.3. RAPID THERMAL ANNEALING (RTA) OF ROOM-TEMPERATURE IMPLANTED SIC
2.3.4. RAPID THERMAL ANNEALING (RTA) OF HIGH TEMPERATURE IMPLANTED SIC
2.3.5. STRUCTURE OF GE CLUSTERS
2.3.6. GE DEPTH DISTRIBUTION
2.4. CHAPTER SUMMARY
3. RAPID THERMAL ANNEALING (RTA) OF AMORPHOUS SIC PRODUCED BY LASER
ABLATION
3.1. INTRODUCTION
3.2. EXPERIMENTAL
3.3. RESULTS ARE DISCUSSION
3.3.1. AMORPHOUS LAYERS
3.3.2. RAPID THERMAL ANNEALING
3.3.3. IN COMPARISON WITH THE CRYSTALLIZATION OF ION IMPLANTATION
AMORPHIZED SIC
3.4. CHAPTER SUMMARY
4. LASER TREATMENT OF CRYSTALLINE AND AMORPHOUS SIC
4.1. INTRODUCTION
4.2. EXPERIMENTAL
4.3. RESULTS AND DISCUSSION
4.3.1. LASER SHOT ON CRYSTALLINE SIC
4.3.2. LASER CRYSTALLIZATION OF AMORPHOUS SIC
4.3.3. FORMATION OF ONION-LIKE CARBON: RESULTS
4.3.4. FORMATION OF ONION-LIKE CARBON: DISCUSSION
4.4. CHAPTER SUMMARY
5. LASER CRYSTALLIZATION OF AMORPHOUS SI-GE LAYERS
5.1. INTRODUCTION
5.2. EXPERIMENTAL
5.3. RESULTS AND DISCUSSION
5.4. CHAPTER SUMMARY
6. CONCLUSIONS '
7. LIST OF ABBREVIATIONS
APPENDIX A. EQUILIBRIUM PHASE DIAGRAMS, STRUCTURE OF THE STABLE PHASES
SI-GE SYSTEM
SI-C SYSTEM
SIC STRUCTURE
GE-C SYSTEM
THE TERNARY SI-GE-C SYSTEM
APPENDIX B. TRANSMISSION ELECTRON MICROSCOPY (TEM)
ELECTRON DIFFRACTION
IMAGE FORMATION
TEM SAMPLE PREPARATION
APPENDIX C. QUANTITATIVE ENERGY DISPERSIVE X-RAY (EDX) ANALYSIS
REFERENCES
1
2
2
2
3
3
3
5
9
11
13
15
17
17
17
17
17
18
20
21
22
22
22
22
22
25
27
29
31
32
32
32
32
35
36
38
39
39
39
39
41
42
43
43
45
46
48
50
BIBLIOGRAFISCHE INFORMATIONEN
HTTP://D-NB.INFO/964770288 |
| any_adam_object | 1 |
| author | Gorelik, Tatiana 1973- |
| author_GND | (DE-588)123912660 |
| author_facet | Gorelik, Tatiana 1973- |
| author_role | aut |
| author_sort | Gorelik, Tatiana 1973- |
| author_variant | t g tg |
| building | Verbundindex |
| bvnumber | BV014617610 |
| ctrlnum | (OCoLC)248535416 (DE-599)BVBBV014617610 |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00000nam a2200000 c 4500</leader><controlfield tag="001">BV014617610</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20021030</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">020730s2002 gw ad|| m||| 00||| eng d</controlfield><datafield tag="016" ind1="7" ind2=" "><subfield code="a">964770288</subfield><subfield code="2">DE-101</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)248535416</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV014617610</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">gw</subfield><subfield code="c">DE</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-355</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Gorelik, Tatiana</subfield><subfield code="d">1973-</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)123912660</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Transmission electron microscopy studies of the Si-Ge-C system in non-equilibrium conditions</subfield><subfield code="c">von Tatiana Gorelik</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2002</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">53 Bl.</subfield><subfield code="b">Ill., graph. Darst. : 30 cm</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Jena, Univ., Diss., 2002</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Germaniumlegierung</subfield><subfield code="0">(DE-588)4156872-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Durchstrahlungselektronenmikroskopie</subfield><subfield code="0">(DE-588)4215608-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Siliciumlegierung</subfield><subfield code="0">(DE-588)4181392-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ternäres System</subfield><subfield code="0">(DE-588)4150676-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Kohlenstoff</subfield><subfield code="0">(DE-588)4164538-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Siliciumlegierung</subfield><subfield code="0">(DE-588)4181392-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Germaniumlegierung</subfield><subfield code="0">(DE-588)4156872-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Kohlenstoff</subfield><subfield code="0">(DE-588)4164538-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="3"><subfield code="a">Ternäres System</subfield><subfield code="0">(DE-588)4150676-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="4"><subfield code="a">Durchstrahlungselektronenmikroskopie</subfield><subfield code="0">(DE-588)4215608-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">DNB Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009935985&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-009935985</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV014617610 |
| illustrated | Illustrated |
| indexdate | 2024-10-09T18:04:25Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009935985 |
| oclc_num | 248535416 |
| open_access_boolean | |
| owner | DE-355 DE-BY-UBR |
| owner_facet | DE-355 DE-BY-UBR |
| physical | 53 Bl. Ill., graph. Darst. : 30 cm |
| publishDate | 2002 |
| publishDateSearch | 2002 |
| publishDateSort | 2002 |
| record_format | marc |
| spelling | Gorelik, Tatiana 1973- Verfasser (DE-588)123912660 aut Transmission electron microscopy studies of the Si-Ge-C system in non-equilibrium conditions von Tatiana Gorelik 2002 53 Bl. Ill., graph. Darst. : 30 cm txt rdacontent n rdamedia nc rdacarrier Jena, Univ., Diss., 2002 Germaniumlegierung (DE-588)4156872-2 gnd rswk-swf Durchstrahlungselektronenmikroskopie (DE-588)4215608-7 gnd rswk-swf Siliciumlegierung (DE-588)4181392-3 gnd rswk-swf Ternäres System (DE-588)4150676-5 gnd rswk-swf Kohlenstoff (DE-588)4164538-8 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Siliciumlegierung (DE-588)4181392-3 s Germaniumlegierung (DE-588)4156872-2 s Kohlenstoff (DE-588)4164538-8 s Ternäres System (DE-588)4150676-5 s Durchstrahlungselektronenmikroskopie (DE-588)4215608-7 s DE-604 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009935985&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Gorelik, Tatiana 1973- Transmission electron microscopy studies of the Si-Ge-C system in non-equilibrium conditions Germaniumlegierung (DE-588)4156872-2 gnd Durchstrahlungselektronenmikroskopie (DE-588)4215608-7 gnd Siliciumlegierung (DE-588)4181392-3 gnd Ternäres System (DE-588)4150676-5 gnd Kohlenstoff (DE-588)4164538-8 gnd |
| subject_GND | (DE-588)4156872-2 (DE-588)4215608-7 (DE-588)4181392-3 (DE-588)4150676-5 (DE-588)4164538-8 (DE-588)4113937-9 |
| title | Transmission electron microscopy studies of the Si-Ge-C system in non-equilibrium conditions |
| title_auth | Transmission electron microscopy studies of the Si-Ge-C system in non-equilibrium conditions |
| title_exact_search | Transmission electron microscopy studies of the Si-Ge-C system in non-equilibrium conditions |
| title_full | Transmission electron microscopy studies of the Si-Ge-C system in non-equilibrium conditions von Tatiana Gorelik |
| title_fullStr | Transmission electron microscopy studies of the Si-Ge-C system in non-equilibrium conditions von Tatiana Gorelik |
| title_full_unstemmed | Transmission electron microscopy studies of the Si-Ge-C system in non-equilibrium conditions von Tatiana Gorelik |
| title_short | Transmission electron microscopy studies of the Si-Ge-C system in non-equilibrium conditions |
| title_sort | transmission electron microscopy studies of the si ge c system in non equilibrium conditions |
| topic | Germaniumlegierung (DE-588)4156872-2 gnd Durchstrahlungselektronenmikroskopie (DE-588)4215608-7 gnd Siliciumlegierung (DE-588)4181392-3 gnd Ternäres System (DE-588)4150676-5 gnd Kohlenstoff (DE-588)4164538-8 gnd |
| topic_facet | Germaniumlegierung Durchstrahlungselektronenmikroskopie Siliciumlegierung Ternäres System Kohlenstoff Hochschulschrift |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009935985&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT goreliktatiana transmissionelectronmicroscopystudiesofthesigecsysteminnonequilibriumconditions |