Thermal imagers in CMOS technology:
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Konstanz
Hartung-Gorre
2002
|
| Edition: | 1. ed. |
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Item Description: | Zürich, Eidgenössische Techn. Hochsch., Diss., 2001 |
| Physical Description: | II, 134 S. Ill., graph. Darst. |
| ISBN: | 3896497952 |
Staff View
MARC
| LEADER | 00000nam a22000008c 4500 | ||
|---|---|---|---|
| 001 | BV014585662 | ||
| 003 | DE-604 | ||
| 005 | 20030307 | ||
| 007 | t | ||
| 008 | 020723s2002 gw ad|| m||| 00||| eng d | ||
| 016 | 7 | |a 964809974 |2 DE-101 | |
| 020 | |a 3896497952 |9 3-89649-795-2 | ||
| 035 | |a (OCoLC)722845126 | ||
| 035 | |a (DE-599)BVBBV014585662 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 044 | |a gw |c DE | ||
| 049 | |a DE-703 | ||
| 100 | 1 | |a Schaufelbühl, Andri |d 1971- |e Verfasser |0 (DE-588)123925452 |4 aut | |
| 245 | 1 | 0 | |a Thermal imagers in CMOS technology |c presented by Andri Schaufelbühl |
| 250 | |a 1. ed. | ||
| 264 | 1 | |a Konstanz |b Hartung-Gorre |c 2002 | |
| 300 | |a II, 134 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Zürich, Eidgenössische Techn. Hochsch., Diss., 2001 | ||
| 650 | 0 | 7 | |a Infrarotdetektor |0 (DE-588)4161692-3 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Integrierter Sensor |0 (DE-588)4235815-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Thermoelektrischer Effekt |0 (DE-588)4223155-3 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Infrarotmesstechnik |0 (DE-588)4161698-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Sensor-Array |0 (DE-588)4213726-3 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a CMOS-Schaltung |0 (DE-588)4148111-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Signalverarbeitung |0 (DE-588)4054947-1 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a CMOS |0 (DE-588)4010319-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Infrarotthermographie |0 (DE-588)4242353-3 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Infrarotdetektor |0 (DE-588)4161692-3 |D s |
| 689 | 0 | 1 | |a Thermoelektrischer Effekt |0 (DE-588)4223155-3 |D s |
| 689 | 0 | 2 | |a Sensor-Array |0 (DE-588)4213726-3 |D s |
| 689 | 0 | 3 | |a Integrierter Sensor |0 (DE-588)4235815-2 |D s |
| 689 | 0 | 4 | |a CMOS |0 (DE-588)4010319-5 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a CMOS-Schaltung |0 (DE-588)4148111-2 |D s |
| 689 | 1 | |8 1\p |5 DE-604 | |
| 689 | 2 | 0 | |a Infrarotmesstechnik |0 (DE-588)4161698-4 |D s |
| 689 | 2 | |8 2\p |5 DE-604 | |
| 689 | 3 | 0 | |a Infrarotthermographie |0 (DE-588)4242353-3 |D s |
| 689 | 3 | |8 3\p |5 DE-604 | |
| 689 | 4 | 0 | |a Signalverarbeitung |0 (DE-588)4054947-1 |D s |
| 689 | 4 | |8 4\p |5 DE-604 | |
| 856 | 4 | 2 | |m DNB Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009916220&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 883 | 1 | |8 2\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 883 | 1 | |8 3\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 883 | 1 | |8 4\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-009916220 | |
Record in the Search Index
| _version_ | 1808136245306458112 |
|---|---|
| adam_text |
ABSTRACT
1
ZUSAMMENFASSUNG
3
1
INTRODUCTION
5
1.1
INFRARED
RADIATION
6
1.2
INFRARED
DETECTING
PRINCIPLES
7
1.3
THERMOELECTRIC
INFRARED
IMAGERS
9
1.4
MAJOR
RESULTS
12
2
THEORY
15
2.1
THERMAL
RADIATION
15
2.2
HEAT
TRANSFER
BY
RADIATION
17
2.3
SEEBECK
EFFECT
18
2.4
SENSOR
CHARACTERISTICS
AND
FIGURES
OF
MERIT
19
3
DEVICE
FABRICATION
23
3.1
CMOS
PROCESS
23
3.2
POST-PROCESSING
BY
ANISOTROPIC
ETCHING
26
3.3
THERMAL
SEPARATION
OF
PIXELS
28
3.4
PACKAGING
34
3.5
ON-CHIP
CIRCUITRY
38
3.6
FABRICATED
DEVICES
40
3.7
YIELD
48
4
SENSOR
MODELING
51
4.1
FEM
SIMULATIONS
51
4.2
ANALYTICAL
PIXEL
MODEL
59
4.3
PIXEL
OPTIMIZATION
73
4.4
THERMOELEMENT
OPTIMIZATION
80
5
SENSOR
PERFORMANCE
87
5.1
SENSITIVITY
87
5.2
CROSS-TALK
97
5.3
OFFSET
98
5.4
THERMOPILE
RESISTANCE
103
5.5
SYSTEM
PERFORMANCE
OVERVIEW
105
5.6
RELIABILITY,
LONG
TERM
STABILITY
109
6
PROTOTYPE
CAMERAS
111
6.1
HARDWARE
111
6.2
MICROPROCESSOR
SOFTWARE
113
6.3
PC
INTERFACE
115
6.4
THERMAL
IMAGES
116
7
CONCLUSIONS
AND
OUTLOOK
119
REFERENCES
121
LIST
OF
SYMBOLS
AND
ABBREVIATIONS
127
ACKNOWLEDGMENTS
131
CURRICULUM
VITAE
133
PUBLICATIONS
134
II |
| any_adam_object | 1 |
| author | Schaufelbühl, Andri 1971- |
| author_GND | (DE-588)123925452 |
| author_facet | Schaufelbühl, Andri 1971- |
| author_role | aut |
| author_sort | Schaufelbühl, Andri 1971- |
| author_variant | a s as |
| building | Verbundindex |
| bvnumber | BV014585662 |
| ctrlnum | (OCoLC)722845126 (DE-599)BVBBV014585662 |
| edition | 1. ed. |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00000nam a22000008c 4500</leader><controlfield tag="001">BV014585662</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20030307</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">020723s2002 gw ad|| m||| 00||| eng d</controlfield><datafield tag="016" ind1="7" ind2=" "><subfield code="a">964809974</subfield><subfield code="2">DE-101</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3896497952</subfield><subfield code="9">3-89649-795-2</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)722845126</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV014585662</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">gw</subfield><subfield code="c">DE</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Schaufelbühl, Andri</subfield><subfield code="d">1971-</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)123925452</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Thermal imagers in CMOS technology</subfield><subfield code="c">presented by Andri Schaufelbühl</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">1. ed.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Konstanz</subfield><subfield code="b">Hartung-Gorre</subfield><subfield code="c">2002</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">II, 134 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Zürich, Eidgenössische Techn. Hochsch., Diss., 2001</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Infrarotdetektor</subfield><subfield code="0">(DE-588)4161692-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Integrierter Sensor</subfield><subfield code="0">(DE-588)4235815-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Thermoelektrischer Effekt</subfield><subfield code="0">(DE-588)4223155-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Infrarotmesstechnik</subfield><subfield code="0">(DE-588)4161698-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Sensor-Array</subfield><subfield code="0">(DE-588)4213726-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">CMOS-Schaltung</subfield><subfield code="0">(DE-588)4148111-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Signalverarbeitung</subfield><subfield code="0">(DE-588)4054947-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">CMOS</subfield><subfield code="0">(DE-588)4010319-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Infrarotthermographie</subfield><subfield code="0">(DE-588)4242353-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Infrarotdetektor</subfield><subfield code="0">(DE-588)4161692-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Thermoelektrischer Effekt</subfield><subfield code="0">(DE-588)4223155-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Sensor-Array</subfield><subfield code="0">(DE-588)4213726-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="3"><subfield code="a">Integrierter Sensor</subfield><subfield code="0">(DE-588)4235815-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="4"><subfield code="a">CMOS</subfield><subfield code="0">(DE-588)4010319-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">CMOS-Schaltung</subfield><subfield code="0">(DE-588)4148111-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="2" ind2="0"><subfield code="a">Infrarotmesstechnik</subfield><subfield code="0">(DE-588)4161698-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2=" "><subfield code="8">2\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="3" ind2="0"><subfield code="a">Infrarotthermographie</subfield><subfield code="0">(DE-588)4242353-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="3" ind2=" "><subfield code="8">3\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="4" ind2="0"><subfield code="a">Signalverarbeitung</subfield><subfield code="0">(DE-588)4054947-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="4" ind2=" "><subfield code="8">4\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">DNB Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009916220&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">2\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">3\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">4\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-009916220</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV014585662 |
| illustrated | Illustrated |
| indexdate | 2024-08-23T00:31:36Z |
| institution | BVB |
| isbn | 3896497952 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009916220 |
| oclc_num | 722845126 |
| open_access_boolean | |
| owner | DE-703 |
| owner_facet | DE-703 |
| physical | II, 134 S. Ill., graph. Darst. |
| publishDate | 2002 |
| publishDateSearch | 2002 |
| publishDateSort | 2002 |
| publisher | Hartung-Gorre |
| record_format | marc |
| spelling | Schaufelbühl, Andri 1971- Verfasser (DE-588)123925452 aut Thermal imagers in CMOS technology presented by Andri Schaufelbühl 1. ed. Konstanz Hartung-Gorre 2002 II, 134 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Zürich, Eidgenössische Techn. Hochsch., Diss., 2001 Infrarotdetektor (DE-588)4161692-3 gnd rswk-swf Integrierter Sensor (DE-588)4235815-2 gnd rswk-swf Thermoelektrischer Effekt (DE-588)4223155-3 gnd rswk-swf Infrarotmesstechnik (DE-588)4161698-4 gnd rswk-swf Sensor-Array (DE-588)4213726-3 gnd rswk-swf CMOS-Schaltung (DE-588)4148111-2 gnd rswk-swf Signalverarbeitung (DE-588)4054947-1 gnd rswk-swf CMOS (DE-588)4010319-5 gnd rswk-swf Infrarotthermographie (DE-588)4242353-3 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Infrarotdetektor (DE-588)4161692-3 s Thermoelektrischer Effekt (DE-588)4223155-3 s Sensor-Array (DE-588)4213726-3 s Integrierter Sensor (DE-588)4235815-2 s CMOS (DE-588)4010319-5 s DE-604 CMOS-Schaltung (DE-588)4148111-2 s 1\p DE-604 Infrarotmesstechnik (DE-588)4161698-4 s 2\p DE-604 Infrarotthermographie (DE-588)4242353-3 s 3\p DE-604 Signalverarbeitung (DE-588)4054947-1 s 4\p DE-604 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009916220&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 3\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 4\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Schaufelbühl, Andri 1971- Thermal imagers in CMOS technology Infrarotdetektor (DE-588)4161692-3 gnd Integrierter Sensor (DE-588)4235815-2 gnd Thermoelektrischer Effekt (DE-588)4223155-3 gnd Infrarotmesstechnik (DE-588)4161698-4 gnd Sensor-Array (DE-588)4213726-3 gnd CMOS-Schaltung (DE-588)4148111-2 gnd Signalverarbeitung (DE-588)4054947-1 gnd CMOS (DE-588)4010319-5 gnd Infrarotthermographie (DE-588)4242353-3 gnd |
| subject_GND | (DE-588)4161692-3 (DE-588)4235815-2 (DE-588)4223155-3 (DE-588)4161698-4 (DE-588)4213726-3 (DE-588)4148111-2 (DE-588)4054947-1 (DE-588)4010319-5 (DE-588)4242353-3 (DE-588)4113937-9 |
| title | Thermal imagers in CMOS technology |
| title_auth | Thermal imagers in CMOS technology |
| title_exact_search | Thermal imagers in CMOS technology |
| title_full | Thermal imagers in CMOS technology presented by Andri Schaufelbühl |
| title_fullStr | Thermal imagers in CMOS technology presented by Andri Schaufelbühl |
| title_full_unstemmed | Thermal imagers in CMOS technology presented by Andri Schaufelbühl |
| title_short | Thermal imagers in CMOS technology |
| title_sort | thermal imagers in cmos technology |
| topic | Infrarotdetektor (DE-588)4161692-3 gnd Integrierter Sensor (DE-588)4235815-2 gnd Thermoelektrischer Effekt (DE-588)4223155-3 gnd Infrarotmesstechnik (DE-588)4161698-4 gnd Sensor-Array (DE-588)4213726-3 gnd CMOS-Schaltung (DE-588)4148111-2 gnd Signalverarbeitung (DE-588)4054947-1 gnd CMOS (DE-588)4010319-5 gnd Infrarotthermographie (DE-588)4242353-3 gnd |
| topic_facet | Infrarotdetektor Integrierter Sensor Thermoelektrischer Effekt Infrarotmesstechnik Sensor-Array CMOS-Schaltung Signalverarbeitung CMOS Infrarotthermographie Hochschulschrift |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009916220&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT schaufelbuhlandri thermalimagersincmostechnology |