Gettering and defect engineering in semiconductor technology: GADEST 2001 ; proceedings of the 9th International Autumn Meeting, S. Tecla, Italy, September 30 - October 3, 2001
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Uetikon-Zürich
Scitec Publ.
2002
|
| Schriftenreihe: | Diffusion and defect data
B, Solid state phenomena ; 82/84 |
| Schlagworte: | |
| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | xviii, 823 S. Ill., graph. Darst. |
| ISBN: | 3908450640 |
Internformat
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Datensatz im Suchindex
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| genre | (DE-588)1071861417 Konferenzschrift 2001 Catania gnd-content |
| genre_facet | Konferenzschrift 2001 Catania |
| id | DE-604.BV014548085 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T19:03:22Z |
| institution | BVB |
| isbn | 3908450640 |
| language | English |
| lccn | 2002265757 |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009892133 |
| oclc_num | 634445556 |
| open_access_boolean | |
| owner | DE-703 DE-706 |
| owner_facet | DE-703 DE-706 |
| physical | xviii, 823 S. Ill., graph. Darst. |
| publishDate | 2002 |
| publishDateSearch | 2002 |
| publishDateSort | 2002 |
| publisher | Scitec Publ. |
| record_format | marc |
| series | Diffusion and defect data |
| series2 | Diffusion and defect data : B, Solid state phenomena |
| spelling | Gettering and defect engineering in semiconductor technology GADEST 2001 ; proceedings of the 9th International Autumn Meeting, S. Tecla, Italy, September 30 - October 3, 2001 ed.: V. Raineri ... GADEST 2001 Uetikon-Zürich Scitec Publ. 2002 xviii, 823 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Diffusion and defect data : B, Solid state phenomena 82/84 Includes bibliographical references and index Gitterbaufehler (DE-588)4125030-8 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Getterung (DE-588)4157223-3 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2001 Catania gnd-content Halbleitertechnologie (DE-588)4158814-9 s Getterung (DE-588)4157223-3 s Gitterbaufehler (DE-588)4125030-8 s DE-604 Raineri, Vito Sonstige oth Diffusion and defect data B, Solid state phenomena ; 82/84 (DE-604)BV021637351 82/84 |
| spellingShingle | Gettering and defect engineering in semiconductor technology GADEST 2001 ; proceedings of the 9th International Autumn Meeting, S. Tecla, Italy, September 30 - October 3, 2001 Diffusion and defect data Gitterbaufehler (DE-588)4125030-8 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Getterung (DE-588)4157223-3 gnd |
| subject_GND | (DE-588)4125030-8 (DE-588)4158814-9 (DE-588)4157223-3 (DE-588)1071861417 |
| title | Gettering and defect engineering in semiconductor technology GADEST 2001 ; proceedings of the 9th International Autumn Meeting, S. Tecla, Italy, September 30 - October 3, 2001 |
| title_alt | GADEST 2001 |
| title_auth | Gettering and defect engineering in semiconductor technology GADEST 2001 ; proceedings of the 9th International Autumn Meeting, S. Tecla, Italy, September 30 - October 3, 2001 |
| title_exact_search | Gettering and defect engineering in semiconductor technology GADEST 2001 ; proceedings of the 9th International Autumn Meeting, S. Tecla, Italy, September 30 - October 3, 2001 |
| title_full | Gettering and defect engineering in semiconductor technology GADEST 2001 ; proceedings of the 9th International Autumn Meeting, S. Tecla, Italy, September 30 - October 3, 2001 ed.: V. Raineri ... |
| title_fullStr | Gettering and defect engineering in semiconductor technology GADEST 2001 ; proceedings of the 9th International Autumn Meeting, S. Tecla, Italy, September 30 - October 3, 2001 ed.: V. Raineri ... |
| title_full_unstemmed | Gettering and defect engineering in semiconductor technology GADEST 2001 ; proceedings of the 9th International Autumn Meeting, S. Tecla, Italy, September 30 - October 3, 2001 ed.: V. Raineri ... |
| title_short | Gettering and defect engineering in semiconductor technology |
| title_sort | gettering and defect engineering in semiconductor technology gadest 2001 proceedings of the 9th international autumn meeting s tecla italy september 30 october 3 2001 |
| title_sub | GADEST 2001 ; proceedings of the 9th International Autumn Meeting, S. Tecla, Italy, September 30 - October 3, 2001 |
| topic | Gitterbaufehler (DE-588)4125030-8 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Getterung (DE-588)4157223-3 gnd |
| topic_facet | Gitterbaufehler Halbleitertechnologie Getterung Konferenzschrift 2001 Catania |
| volume_link | (DE-604)BV021637351 |
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