Chemical physics of thin film deposition processes for micro- and nano-technologies:
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Dordrecht
Kluwer Academic Publishers
2002
|
| Series: | NATO science series
Series II: Mathematics, physics and chemistry ; 55 |
| Subjects: | |
| Item Description: | "Published in cooperation with NATO Scientific Affairs Division.". - Includes bibliographical references and index |
| Physical Description: | xii, 363 p. Ill., graph. Darst. |
| ISBN: | 1402005245 |
Staff View
MARC
| LEADER | 00000nam a2200000zcb4500 | ||
|---|---|---|---|
| 001 | BV014522008 | ||
| 003 | DE-604 | ||
| 005 | 20090121 | ||
| 007 | t | ||
| 008 | 020605s2002 ne ad|| |||| 10||| eng d | ||
| 010 | |a 2002072962 | ||
| 020 | |a 1402005245 |c alk. paper |9 1-402-00524-5 | ||
| 035 | |a (OCoLC)49901833 | ||
| 035 | |a (DE-599)BVBBV014522008 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 044 | |a ne |c NL | ||
| 049 | |a DE-703 |a DE-898 | ||
| 050 | 0 | |a TA418.9.T45 | |
| 082 | 0 | |a 621.3815/2 |2 21 | |
| 084 | |a UP 7550 |0 (DE-625)146434: |2 rvk | ||
| 245 | 1 | 0 | |a Chemical physics of thin film deposition processes for micro- and nano-technologies |c edited by Yves Pauleau |
| 264 | 1 | |a Dordrecht |b Kluwer Academic Publishers |c 2002 | |
| 300 | |a xii, 363 p. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a NATO science series : Series II: Mathematics, physics and chemistry |v 55 | |
| 500 | |a "Published in cooperation with NATO Scientific Affairs Division.". - Includes bibliographical references and index | ||
| 650 | 4 | |a Nanotechnology |v Congresses | |
| 650 | 4 | |a Thin films |v Congresses | |
| 650 | 0 | 7 | |a Nanotechnologie |0 (DE-588)4327470-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Dünnschichttechnik |0 (DE-588)4136339-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 2001 |z Kaunas |2 gnd-content | |
| 689 | 0 | 0 | |a Dünnschichttechnik |0 (DE-588)4136339-5 |D s |
| 689 | 0 | 1 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |D s |
| 689 | 0 | 2 | |a Nanotechnologie |0 (DE-588)4327470-5 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Pauleau, Yves |e Sonstige |4 oth | |
| 830 | 0 | |a NATO science series |v Series II: Mathematics, physics and chemistry ; 55 |w (DE-604)BV014048326 |9 55 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-009887136 | ||
Record in the Search Index
| _version_ | 1804129318314442752 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV014522008 |
| callnumber-first | T - Technology |
| callnumber-label | TA418 |
| callnumber-raw | TA418.9.T45 |
| callnumber-search | TA418.9.T45 |
| callnumber-sort | TA 3418.9 T45 |
| callnumber-subject | TA - General and Civil Engineering |
| classification_rvk | UP 7550 |
| ctrlnum | (OCoLC)49901833 (DE-599)BVBBV014522008 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01843nam a2200469zcb4500</leader><controlfield tag="001">BV014522008</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20090121 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">020605s2002 ne ad|| |||| 10||| eng d</controlfield><datafield tag="010" ind1=" " ind2=" "><subfield code="a">2002072962</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1402005245</subfield><subfield code="c">alk. paper</subfield><subfield code="9">1-402-00524-5</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)49901833</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV014522008</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">ne</subfield><subfield code="c">NL</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield><subfield code="a">DE-898</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TA418.9.T45</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815/2</subfield><subfield code="2">21</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 7550</subfield><subfield code="0">(DE-625)146434:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Chemical physics of thin film deposition processes for micro- and nano-technologies</subfield><subfield code="c">edited by Yves Pauleau</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Dordrecht</subfield><subfield code="b">Kluwer Academic Publishers</subfield><subfield code="c">2002</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">xii, 363 p.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">NATO science series : Series II: Mathematics, physics and chemistry</subfield><subfield code="v">55</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">"Published in cooperation with NATO Scientific Affairs Division.". - Includes bibliographical references and index</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Nanotechnology</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Thin films</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Nanotechnologie</subfield><subfield code="0">(DE-588)4327470-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dünnschichttechnik</subfield><subfield code="0">(DE-588)4136339-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikrosystemtechnik</subfield><subfield code="0">(DE-588)4221617-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">2001</subfield><subfield code="z">Kaunas</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Dünnschichttechnik</subfield><subfield code="0">(DE-588)4136339-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Mikrosystemtechnik</subfield><subfield code="0">(DE-588)4221617-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Nanotechnologie</subfield><subfield code="0">(DE-588)4327470-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Pauleau, Yves</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">NATO science series</subfield><subfield code="v">Series II: Mathematics, physics and chemistry ; 55</subfield><subfield code="w">(DE-604)BV014048326</subfield><subfield code="9">55</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-009887136</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 2001 Kaunas gnd-content |
| genre_facet | Konferenzschrift 2001 Kaunas |
| id | DE-604.BV014522008 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T19:03:14Z |
| institution | BVB |
| isbn | 1402005245 |
| language | English |
| lccn | 2002072962 |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009887136 |
| oclc_num | 49901833 |
| open_access_boolean | |
| owner | DE-703 DE-898 DE-BY-UBR |
| owner_facet | DE-703 DE-898 DE-BY-UBR |
| physical | xii, 363 p. Ill., graph. Darst. |
| publishDate | 2002 |
| publishDateSearch | 2002 |
| publishDateSort | 2002 |
| publisher | Kluwer Academic Publishers |
| record_format | marc |
| series | NATO science series |
| series2 | NATO science series : Series II: Mathematics, physics and chemistry |
| spelling | Chemical physics of thin film deposition processes for micro- and nano-technologies edited by Yves Pauleau Dordrecht Kluwer Academic Publishers 2002 xii, 363 p. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier NATO science series : Series II: Mathematics, physics and chemistry 55 "Published in cooperation with NATO Scientific Affairs Division.". - Includes bibliographical references and index Nanotechnology Congresses Thin films Congresses Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2001 Kaunas gnd-content Dünnschichttechnik (DE-588)4136339-5 s Mikrosystemtechnik (DE-588)4221617-5 s Nanotechnologie (DE-588)4327470-5 s DE-604 Pauleau, Yves Sonstige oth NATO science series Series II: Mathematics, physics and chemistry ; 55 (DE-604)BV014048326 55 |
| spellingShingle | Chemical physics of thin film deposition processes for micro- and nano-technologies NATO science series Nanotechnology Congresses Thin films Congresses Nanotechnologie (DE-588)4327470-5 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| subject_GND | (DE-588)4327470-5 (DE-588)4136339-5 (DE-588)4221617-5 (DE-588)1071861417 |
| title | Chemical physics of thin film deposition processes for micro- and nano-technologies |
| title_auth | Chemical physics of thin film deposition processes for micro- and nano-technologies |
| title_exact_search | Chemical physics of thin film deposition processes for micro- and nano-technologies |
| title_full | Chemical physics of thin film deposition processes for micro- and nano-technologies edited by Yves Pauleau |
| title_fullStr | Chemical physics of thin film deposition processes for micro- and nano-technologies edited by Yves Pauleau |
| title_full_unstemmed | Chemical physics of thin film deposition processes for micro- and nano-technologies edited by Yves Pauleau |
| title_short | Chemical physics of thin film deposition processes for micro- and nano-technologies |
| title_sort | chemical physics of thin film deposition processes for micro and nano technologies |
| topic | Nanotechnology Congresses Thin films Congresses Nanotechnologie (DE-588)4327470-5 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| topic_facet | Nanotechnology Congresses Thin films Congresses Nanotechnologie Dünnschichttechnik Mikrosystemtechnik Konferenzschrift 2001 Kaunas |
| volume_link | (DE-604)BV014048326 |
| work_keys_str_mv | AT pauleauyves chemicalphysicsofthinfilmdepositionprocessesformicroandnanotechnologies |