Chemical physics of thin film deposition processes for micro- and nano-technologies:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Dordrecht
Kluwer Academic Publishers
2002
|
| Schriftenreihe: | NATO science series
Series II: Mathematics, physics and chemistry ; 55 |
| Schlagworte: | |
| Beschreibung: | "Published in cooperation with NATO Scientific Affairs Division.". - Includes bibliographical references and index |
| Beschreibung: | xii, 363 p. Ill., graph. Darst. |
| ISBN: | 1402005245 |
Internformat
MARC
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| 245 | 1 | 0 | |a Chemical physics of thin film deposition processes for micro- and nano-technologies |c edited by Yves Pauleau |
| 264 | 1 | |a Dordrecht |b Kluwer Academic Publishers |c 2002 | |
| 300 | |a xii, 363 p. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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| 490 | 1 | |a NATO science series : Series II: Mathematics, physics and chemistry |v 55 | |
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| 650 | 4 | |a Nanotechnology |v Congresses | |
| 650 | 4 | |a Thin films |v Congresses | |
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Datensatz im Suchindex
| _version_ | 1804129318314442752 |
|---|---|
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| building | Verbundindex |
| bvnumber | BV014522008 |
| callnumber-first | T - Technology |
| callnumber-label | TA418 |
| callnumber-raw | TA418.9.T45 |
| callnumber-search | TA418.9.T45 |
| callnumber-sort | TA 3418.9 T45 |
| callnumber-subject | TA - General and Civil Engineering |
| classification_rvk | UP 7550 |
| ctrlnum | (OCoLC)49901833 (DE-599)BVBBV014522008 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| genre | (DE-588)1071861417 Konferenzschrift 2001 Kaunas gnd-content |
| genre_facet | Konferenzschrift 2001 Kaunas |
| id | DE-604.BV014522008 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T19:03:14Z |
| institution | BVB |
| isbn | 1402005245 |
| language | English |
| lccn | 2002072962 |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009887136 |
| oclc_num | 49901833 |
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| owner | DE-703 DE-898 DE-BY-UBR |
| owner_facet | DE-703 DE-898 DE-BY-UBR |
| physical | xii, 363 p. Ill., graph. Darst. |
| publishDate | 2002 |
| publishDateSearch | 2002 |
| publishDateSort | 2002 |
| publisher | Kluwer Academic Publishers |
| record_format | marc |
| series | NATO science series |
| series2 | NATO science series : Series II: Mathematics, physics and chemistry |
| spelling | Chemical physics of thin film deposition processes for micro- and nano-technologies edited by Yves Pauleau Dordrecht Kluwer Academic Publishers 2002 xii, 363 p. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier NATO science series : Series II: Mathematics, physics and chemistry 55 "Published in cooperation with NATO Scientific Affairs Division.". - Includes bibliographical references and index Nanotechnology Congresses Thin films Congresses Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2001 Kaunas gnd-content Dünnschichttechnik (DE-588)4136339-5 s Mikrosystemtechnik (DE-588)4221617-5 s Nanotechnologie (DE-588)4327470-5 s DE-604 Pauleau, Yves Sonstige oth NATO science series Series II: Mathematics, physics and chemistry ; 55 (DE-604)BV014048326 55 |
| spellingShingle | Chemical physics of thin film deposition processes for micro- and nano-technologies NATO science series Nanotechnology Congresses Thin films Congresses Nanotechnologie (DE-588)4327470-5 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| subject_GND | (DE-588)4327470-5 (DE-588)4136339-5 (DE-588)4221617-5 (DE-588)1071861417 |
| title | Chemical physics of thin film deposition processes for micro- and nano-technologies |
| title_auth | Chemical physics of thin film deposition processes for micro- and nano-technologies |
| title_exact_search | Chemical physics of thin film deposition processes for micro- and nano-technologies |
| title_full | Chemical physics of thin film deposition processes for micro- and nano-technologies edited by Yves Pauleau |
| title_fullStr | Chemical physics of thin film deposition processes for micro- and nano-technologies edited by Yves Pauleau |
| title_full_unstemmed | Chemical physics of thin film deposition processes for micro- and nano-technologies edited by Yves Pauleau |
| title_short | Chemical physics of thin film deposition processes for micro- and nano-technologies |
| title_sort | chemical physics of thin film deposition processes for micro and nano technologies |
| topic | Nanotechnology Congresses Thin films Congresses Nanotechnologie (DE-588)4327470-5 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| topic_facet | Nanotechnology Congresses Thin films Congresses Nanotechnologie Dünnschichttechnik Mikrosystemtechnik Konferenzschrift 2001 Kaunas |
| volume_link | (DE-604)BV014048326 |
| work_keys_str_mv | AT pauleauyves chemicalphysicsofthinfilmdepositionprocessesformicroandnanotechnologies |