Gallium nitride derived from liquid precursors: thin films and nanopowders
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Berlin
Mensch-und-Buch-Verl.
2002
|
| Schriftenreihe: | Forschungsberichte aus den Naturwissenschaften
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Zugl.: Stuttgart, Univ., Diss., 2002 |
| Beschreibung: | 162 S. Ill., graph. Darst. |
| ISBN: | 3898203697 |
Internformat
MARC
| LEADER | 00000nam a22000008c 4500 | ||
|---|---|---|---|
| 001 | BV014444406 | ||
| 003 | DE-604 | ||
| 005 | 20030113 | ||
| 007 | t | ||
| 008 | 020625s2002 gw ad|| m||| 00||| eng d | ||
| 016 | 7 | |a 964667274 |2 DE-101 | |
| 020 | |a 3898203697 |9 3-89820-369-7 | ||
| 035 | |a (OCoLC)52308207 | ||
| 035 | |a (DE-599)BVBBV014444406 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 044 | |a gw |c DE | ||
| 049 | |a DE-703 | ||
| 100 | 1 | |a Puchinger, Manfred |d 1973- |e Verfasser |0 (DE-588)124434142 |4 aut | |
| 245 | 1 | 0 | |a Gallium nitride derived from liquid precursors |b thin films and nanopowders |c vorgelegt von Manfred Puchinger |
| 264 | 1 | |a Berlin |b Mensch-und-Buch-Verl. |c 2002 | |
| 300 | |a 162 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Forschungsberichte aus den Naturwissenschaften | |
| 500 | |a Zugl.: Stuttgart, Univ., Diss., 2002 | ||
| 650 | 0 | 7 | |a Pulver |0 (DE-588)4219041-1 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Kornwachstum |0 (DE-588)4165324-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Epitaxieschicht |0 (DE-588)4152546-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Galliumnitrid |0 (DE-588)4375592-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Schichtwachstum |0 (DE-588)4273432-0 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Galliumnitrid |0 (DE-588)4375592-6 |D s |
| 689 | 0 | 1 | |a Epitaxieschicht |0 (DE-588)4152546-2 |D s |
| 689 | 0 | 2 | |a Schichtwachstum |0 (DE-588)4273432-0 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Galliumnitrid |0 (DE-588)4375592-6 |D s |
| 689 | 1 | 1 | |a Pulver |0 (DE-588)4219041-1 |D s |
| 689 | 1 | 2 | |a Kornwachstum |0 (DE-588)4165324-5 |D s |
| 689 | 1 | |5 DE-604 | |
| 856 | 4 | 2 | |m DNB Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009873713&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-009873713 | |
Datensatz im Suchindex
| _version_ | 1808136284139421696 |
|---|---|
| adam_text |
TABLE
OF
CONTENTS
TABLE
OF
ABBREVIATIONS
8
ABSTRACT
12
ZUSANUNENFASSUNG
13
1.
INTRODUCTION
17
1.1.
NOVEL
PROCESSING
TECHNIQUES
AND
MATERIALS
17
1.2.
GOALS
OF
THE
STUDY
18
2.
LITERATURE
SURVEY
20
2.1.
PRECURSOR-DERIVED
CERAMICS
20
2.1.1.
MATERIALS
SYNTHESIS
FROM
PRECURSORS
20
2.1.2.
PRECURSOR-DERIVED
THIN
FILMS
22
2.2.
GALLIUM
NITRIDE
25
2.2.1.
PROPERTIES
AND
APPLICATIONS
25
2.2.2.
THIN
FILMS
28
2.3.
GRAIN
GROWTH
IN
NANOCRYSTALLINE
MATERIALS
33
2.3.1.
STATIC
MODEL
33
2.3.2.
MKB-MODEL
34
3.
SAMPLE
PREPARATION
36
3.1.
PRECURSOR
SYNTHESIS
36
3.1.1.
GA-NCN
PRECURSOR
SYSTEM
36
3.1.2.
GA-NME
PRECURSOR
SYSTEM
37
3.2.
THIN
FILM
PREPARATION
38
3.2.1.
CHEMICAL
SOLUTION
DEPOSITION
FACILITIES
AND
PROCEDURE
38
3.2.2.
INDIRECT
COATING
SETUP
40
3.2.3.
MOCVD
GAN
THIN
FILMS
40
3.2.4.
COATING
VIA
SAMS
41
3.3.
POWDER
PREPARATION
42
4.
METHODS
OF
CHARACTERIZATION
43
4.1.
TRANSMISSION
ELECTRON
MICROSCOPY
(TEM)
43
4.1.1.
BRIGHT
FIELD,
DARK
FIELD
AND
SELECTED
AREA
DIFFRACTION
43
4.1.2.
DISLOCATION
ANALYSIS
46
4.1.3.
HIGH
RESOLUTION
TEM
47
4.2.
ANALYTICAL
ELECTRON
MICROSCOPY
47
4.2.1.
ELECTRON
ENERGY
LOSS
SPECTROSCOPY
(EELS)
47
4.2.2.
ENERGY
DISPERSIVE
X-RAY
ANALYSIS
(EDX)
48
4.2.3.
AUGER
ELECTRON
SPECTROSCOPY
(AES)
49
4.3.
SCANNING
ELECTRON
MICROSCOPY
(SEM)
49
4.4.
ATOMIC
FORCE
MICROSCOPY
(AFM)
50
4.5.
X-RAY
DIFFRACTION
50
4.5.1.
0-20
SCANS
50
4.5.2.
ROCKING
CURVE
ANALYSIS
51
4.6.
ANALYSIS
OF
PRECURSOR
POWDER
AT
DIFFERENT
STAGES
OF
PYROLYSIS
51
4.6.1.
THERMOGRAVIMETRY
AND
DIFFERENTIAL
THERMO
ANALYSIS
51
4.6.2.
FTIR
ANALYSIS
52
4.7.
OPTOELECTRONIC
CHARACTERIZATION
OF
THIN
FILMS
52
4.7.1.
PHOTOLUMINESCENCE
52
4.7.2.
HALL
CONDUCTIVITY
53
5.
EXPERIMENTAL
RESULTS
55
5.1.
PRECURSOR
POWDER
DURING
PYROLYSIS
55
5.1.1.
TGANDDTA
55
5.1.2.
FTIR
ANALYSIS
57
5.1.3.
GRAIN
GROWTH
59
5.1.4.
SHRINKAGE
AND
MASS
LOSS
61
5.2.
CSD-DERIVED
GAN
FILMS
63
5.2.1.
FILMS
PREPARED
WITH
DIFFERENT
PRECURSOR
CONCENTRATIONS
63
5.2.1.1.
LOW
PRECURSOR
CONCENTRATIONS
63
5.2.I.2.
MEDIUM
PRECURSOR
CONCENTRATIONS
73
5.2.1.3.
HIGH
PRECURSOR
CONCENTRATIONS
77
5.2.2.
EPITAXIAL
FILM
GROWTH
AT
DIFFERENT
STAGES
OF
PYROLYSIS
IN
THE
GA-NME
79
PRECURSOR
SYSTEM
5.2.2.L
XRD
STUDY
79
5.2.2.2.
HRTEM
STUDY
80
5.2.2.3.
AUGER
STUDY
89
5.2.2.4.
EELS
MAPPING
STUDY
91
5.2.3.
FILMS
PREPARED
AT
HIGHER
TEMPERATURES
93
5.2.4.
FILMS
PREPARED
AT
HIGHER
HEATING
RATES
96
5.2.5.
INDIRECT
COATING
97
5.3.
CSD-BUFFERED
MOCVD-DERIVED
GAN
LAYERS
98
5.3.1.
SURFACE
MORPHOLOGY
98
5.3.2.
XRD
ROCKING
CURVES
101
5.3.3.
OPTOELECTRONIC
CHARACTERIZATION
101
5.3.4.
CROSS-SECTIONAL
TEM
103
5.4.
THIN
FILMS
PREPARED
BY
SAMS
109
5.4.1.
FILMS
ON
SILICON
109
5.4.2.
FILMS
ON
SAPPHIRE
109
6.
DISCUSSION
115
6.1.
EVOLUTION
OF
GAN
POWDER
MATERIAL
115
6.1.1.
PRECURSOR
PYROLYSIS
115
6.1.2.
GRAIN
GROWTH
PARAMETERS
117
6.1.3.
GRAIN
GROWTH
MECHANISMS
123
6
6.2.
EVOLUTION
OF
GAN
THIN
FILMS
IN
THE
GA-NME
PRECURSOR
SYSTEM
124
6.2.1.
COMPARISON
WITH
KNOWN
GRAIN
GROWTH
MECHANISMS
124
6.2.2.
THIN
FILMS:
EARLY
STAGE
OF
EPITAXIAL
GROWTH
125
6.2.3.
THIN
FILMS:
FINAL
STAGE
OF
EPITAXIAL
GROWTH
128
6.2.4.
THIN
FILMS:
SUMMARY
130
6.2.5.
FILM
GROWTH
IN
THICK
FILMS
130
6.2.6.
BASIC
CONSIDERATIONS
OF
THE
EVOLUTION
OF
THIN AND
THICK
FILMS
132
6.2.7.
POSSIBLE
EXPLANATIONS
FOR
THE
EVOLUTION
OF
THIN
AND
THICK
FILMS
133
6.2.8.
CONCLUSION
137
6.3.
CSD-DERIVED
BUFFER
LAYERS
IN
GAN
THIN
FILM
PRODUCTION
138
6.3.1.
PHENOMENOLOGICAL
ANALYSIS
OF
CSD/MOCVD
COMBINED
GAN
FILMS
138
6.3.2.
ORIGIN AND
EFFECT
OF
THREADING
DISLOCATIONS
139
6.3.3.
EVALUATION
OF
CSD
BUFFERS
140
6.4.
SAMS
IN
GAN
THIN
FILM
FABRICATION
142
6.4.1.
EVALUATION
OF
CLD-DERIVED
GA
AND
N
CONTAINING
THIN
FILMS
142
6.4.2.
COMPARISON
WITH
CSD-DERIVED
GAN
THIN
FILMS
143
7.
SUMMARY
144
8.
OUTLOOK
147
9.
APPENDIX
149
XRD
DIFFRACTION
DATA
9.1.
A-GAN
149
9.2.
Y-GA
2
O
3
149
9.3.
A1ON
150
9.4.
A-AL
2
O
3
150
10.
REFERENCES
151
DEDUCED
PUBLICATIONS
159
11.
ACKNOWLEDGEMENTS
160
CURRICULUM
VITAE
162
7 |
| any_adam_object | 1 |
| author | Puchinger, Manfred 1973- |
| author_GND | (DE-588)124434142 |
| author_facet | Puchinger, Manfred 1973- |
| author_role | aut |
| author_sort | Puchinger, Manfred 1973- |
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| bvnumber | BV014444406 |
| ctrlnum | (OCoLC)52308207 (DE-599)BVBBV014444406 |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV014444406 |
| illustrated | Illustrated |
| indexdate | 2024-08-23T00:32:14Z |
| institution | BVB |
| isbn | 3898203697 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009873713 |
| oclc_num | 52308207 |
| open_access_boolean | |
| owner | DE-703 |
| owner_facet | DE-703 |
| physical | 162 S. Ill., graph. Darst. |
| publishDate | 2002 |
| publishDateSearch | 2002 |
| publishDateSort | 2002 |
| publisher | Mensch-und-Buch-Verl. |
| record_format | marc |
| series2 | Forschungsberichte aus den Naturwissenschaften |
| spelling | Puchinger, Manfred 1973- Verfasser (DE-588)124434142 aut Gallium nitride derived from liquid precursors thin films and nanopowders vorgelegt von Manfred Puchinger Berlin Mensch-und-Buch-Verl. 2002 162 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Forschungsberichte aus den Naturwissenschaften Zugl.: Stuttgart, Univ., Diss., 2002 Pulver (DE-588)4219041-1 gnd rswk-swf Kornwachstum (DE-588)4165324-5 gnd rswk-swf Epitaxieschicht (DE-588)4152546-2 gnd rswk-swf Galliumnitrid (DE-588)4375592-6 gnd rswk-swf Schichtwachstum (DE-588)4273432-0 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Galliumnitrid (DE-588)4375592-6 s Epitaxieschicht (DE-588)4152546-2 s Schichtwachstum (DE-588)4273432-0 s DE-604 Pulver (DE-588)4219041-1 s Kornwachstum (DE-588)4165324-5 s DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009873713&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Puchinger, Manfred 1973- Gallium nitride derived from liquid precursors thin films and nanopowders Pulver (DE-588)4219041-1 gnd Kornwachstum (DE-588)4165324-5 gnd Epitaxieschicht (DE-588)4152546-2 gnd Galliumnitrid (DE-588)4375592-6 gnd Schichtwachstum (DE-588)4273432-0 gnd |
| subject_GND | (DE-588)4219041-1 (DE-588)4165324-5 (DE-588)4152546-2 (DE-588)4375592-6 (DE-588)4273432-0 (DE-588)4113937-9 |
| title | Gallium nitride derived from liquid precursors thin films and nanopowders |
| title_auth | Gallium nitride derived from liquid precursors thin films and nanopowders |
| title_exact_search | Gallium nitride derived from liquid precursors thin films and nanopowders |
| title_full | Gallium nitride derived from liquid precursors thin films and nanopowders vorgelegt von Manfred Puchinger |
| title_fullStr | Gallium nitride derived from liquid precursors thin films and nanopowders vorgelegt von Manfred Puchinger |
| title_full_unstemmed | Gallium nitride derived from liquid precursors thin films and nanopowders vorgelegt von Manfred Puchinger |
| title_short | Gallium nitride derived from liquid precursors |
| title_sort | gallium nitride derived from liquid precursors thin films and nanopowders |
| title_sub | thin films and nanopowders |
| topic | Pulver (DE-588)4219041-1 gnd Kornwachstum (DE-588)4165324-5 gnd Epitaxieschicht (DE-588)4152546-2 gnd Galliumnitrid (DE-588)4375592-6 gnd Schichtwachstum (DE-588)4273432-0 gnd |
| topic_facet | Pulver Kornwachstum Epitaxieschicht Galliumnitrid Schichtwachstum Hochschulschrift |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009873713&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT puchingermanfred galliumnitridederivedfromliquidprecursorsthinfilmsandnanopowders |