Papers from the tenth Canadian Semiconductor Technology Conference: 12-17 August 2001, Ottawa, Canada
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York, NY
American Inst. of Physics
2002
|
| Schriftenreihe: | Journal of vacuum science & technology / A
20,3 |
| Schlagworte: | |
| Beschreibung: | Einzelaufn. eines Zeitschr.-Heftes |
| Beschreibung: | S. 961 - 1169 Ill., graph. Darst. |
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| spelling | Canadian Semiconductor Technology Conference 10 2001 Ottawa Verfasser (DE-588)1500355-3 aut Papers from the tenth Canadian Semiconductor Technology Conference 12-17 August 2001, Ottawa, Canada spec. ed. for the proc.: Dolf Landheer New York, NY American Inst. of Physics 2002 S. 961 - 1169 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology / A 20,3 Einzelaufn. eines Zeitschr.-Heftes Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2001 Ottawa gnd-content Halbleitertechnologie (DE-588)4158814-9 s DE-604 Landheer, Dolf Sonstige oth |
| spellingShingle | Papers from the tenth Canadian Semiconductor Technology Conference 12-17 August 2001, Ottawa, Canada Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)1071861417 |
| title | Papers from the tenth Canadian Semiconductor Technology Conference 12-17 August 2001, Ottawa, Canada |
| title_auth | Papers from the tenth Canadian Semiconductor Technology Conference 12-17 August 2001, Ottawa, Canada |
| title_exact_search | Papers from the tenth Canadian Semiconductor Technology Conference 12-17 August 2001, Ottawa, Canada |
| title_full | Papers from the tenth Canadian Semiconductor Technology Conference 12-17 August 2001, Ottawa, Canada spec. ed. for the proc.: Dolf Landheer |
| title_fullStr | Papers from the tenth Canadian Semiconductor Technology Conference 12-17 August 2001, Ottawa, Canada spec. ed. for the proc.: Dolf Landheer |
| title_full_unstemmed | Papers from the tenth Canadian Semiconductor Technology Conference 12-17 August 2001, Ottawa, Canada spec. ed. for the proc.: Dolf Landheer |
| title_short | Papers from the tenth Canadian Semiconductor Technology Conference |
| title_sort | papers from the tenth canadian semiconductor technology conference 12 17 august 2001 ottawa canada |
| title_sub | 12-17 August 2001, Ottawa, Canada |
| topic | Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Halbleitertechnologie Konferenzschrift 2001 Ottawa |
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