Design, test, integration, and packaging of MEMS, MOEMS: 9 - 11 May 2000, Paris, France
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Bellingham, Wash.
SPIE
2000
|
| Series: | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers
4019 |
| Subjects: | |
| Physical Description: | xv, 596 p. ill. : 28 cm |
| ISBN: | 0819436453 |
Staff View
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Record in the Search Index
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| id | DE-604.BV014341617 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T19:01:55Z |
| institution | BVB |
| isbn | 0819436453 |
| language | English |
| lccn | 2001267594 |
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| physical | xv, 596 p. ill. : 28 cm |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| publisher | SPIE |
| record_format | marc |
| series2 | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers |
| spelling | Design, test, integration, and packaging of MEMS, MOEMS 9 - 11 May 2000, Paris, France Bernard Courtois ..., chairs/ed. Bellingham, Wash. SPIE 2000 xv, 596 p. ill. : 28 cm txt rdacontent n rdamedia nc rdacarrier Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers 4019 Microelectromechanical systems Congresses Microelectronic packaging Congresses Micromachining Congresses Optoelectronic devices Congresses Mikromechanik (DE-588)4205811-9 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2000 Paris gnd-content Mikromechanik (DE-588)4205811-9 s Mikroelektronik (DE-588)4039207-7 s DE-604 Courtois, Bernard 1777-1838 Sonstige (DE-588)117701254 oth Society of Photo-Optical Instrumentation Engineers Proceedings of SPIE 4019 (DE-604)BV000010887 4019 |
| spellingShingle | Design, test, integration, and packaging of MEMS, MOEMS 9 - 11 May 2000, Paris, France Microelectromechanical systems Congresses Microelectronic packaging Congresses Micromachining Congresses Optoelectronic devices Congresses Mikromechanik (DE-588)4205811-9 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| subject_GND | (DE-588)4205811-9 (DE-588)4039207-7 (DE-588)1071861417 |
| title | Design, test, integration, and packaging of MEMS, MOEMS 9 - 11 May 2000, Paris, France |
| title_auth | Design, test, integration, and packaging of MEMS, MOEMS 9 - 11 May 2000, Paris, France |
| title_exact_search | Design, test, integration, and packaging of MEMS, MOEMS 9 - 11 May 2000, Paris, France |
| title_full | Design, test, integration, and packaging of MEMS, MOEMS 9 - 11 May 2000, Paris, France Bernard Courtois ..., chairs/ed. |
| title_fullStr | Design, test, integration, and packaging of MEMS, MOEMS 9 - 11 May 2000, Paris, France Bernard Courtois ..., chairs/ed. |
| title_full_unstemmed | Design, test, integration, and packaging of MEMS, MOEMS 9 - 11 May 2000, Paris, France Bernard Courtois ..., chairs/ed. |
| title_short | Design, test, integration, and packaging of MEMS, MOEMS |
| title_sort | design test integration and packaging of mems moems 9 11 may 2000 paris france |
| title_sub | 9 - 11 May 2000, Paris, France |
| topic | Microelectromechanical systems Congresses Microelectronic packaging Congresses Micromachining Congresses Optoelectronic devices Congresses Mikromechanik (DE-588)4205811-9 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| topic_facet | Microelectromechanical systems Congresses Microelectronic packaging Congresses Micromachining Congresses Optoelectronic devices Congresses Mikromechanik Mikroelektronik Konferenzschrift 2000 Paris |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT courtoisbernard designtestintegrationandpackagingofmemsmoems911may2000parisfrance |