Design, test, integration, and packaging of MEMS, MOEMS: 9 - 11 May 2000, Paris, France
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash.
SPIE
2000
|
| Schriftenreihe: | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers
4019 |
| Schlagworte: | |
| Beschreibung: | xv, 596 p. ill. : 28 cm |
| ISBN: | 0819436453 |
Internformat
MARC
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| 245 | 1 | 0 | |a Design, test, integration, and packaging of MEMS, MOEMS |b 9 - 11 May 2000, Paris, France |c Bernard Courtois ..., chairs/ed. |
| 264 | 1 | |a Bellingham, Wash. |b SPIE |c 2000 | |
| 300 | |a xv, 596 p. |b ill. : 28 cm | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers |v 4019 | |
| 650 | 4 | |a Microelectromechanical systems |v Congresses | |
| 650 | 4 | |a Microelectronic packaging |v Congresses | |
| 650 | 4 | |a Micromachining |v Congresses | |
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| 700 | 1 | |a Courtois, Bernard |d 1777-1838 |e Sonstige |0 (DE-588)117701254 |4 oth | |
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Datensatz im Suchindex
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| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 4980 |
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| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| genre_facet | Konferenzschrift 2000 Paris |
| id | DE-604.BV014341617 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T19:01:55Z |
| institution | BVB |
| isbn | 0819436453 |
| language | English |
| lccn | 2001267594 |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009835424 |
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| owner_facet | DE-703 |
| physical | xv, 596 p. ill. : 28 cm |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| publisher | SPIE |
| record_format | marc |
| series2 | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers |
| spelling | Design, test, integration, and packaging of MEMS, MOEMS 9 - 11 May 2000, Paris, France Bernard Courtois ..., chairs/ed. Bellingham, Wash. SPIE 2000 xv, 596 p. ill. : 28 cm txt rdacontent n rdamedia nc rdacarrier Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers 4019 Microelectromechanical systems Congresses Microelectronic packaging Congresses Micromachining Congresses Optoelectronic devices Congresses Mikromechanik (DE-588)4205811-9 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2000 Paris gnd-content Mikromechanik (DE-588)4205811-9 s Mikroelektronik (DE-588)4039207-7 s DE-604 Courtois, Bernard 1777-1838 Sonstige (DE-588)117701254 oth Society of Photo-Optical Instrumentation Engineers Proceedings of SPIE 4019 (DE-604)BV000010887 4019 |
| spellingShingle | Design, test, integration, and packaging of MEMS, MOEMS 9 - 11 May 2000, Paris, France Microelectromechanical systems Congresses Microelectronic packaging Congresses Micromachining Congresses Optoelectronic devices Congresses Mikromechanik (DE-588)4205811-9 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| subject_GND | (DE-588)4205811-9 (DE-588)4039207-7 (DE-588)1071861417 |
| title | Design, test, integration, and packaging of MEMS, MOEMS 9 - 11 May 2000, Paris, France |
| title_auth | Design, test, integration, and packaging of MEMS, MOEMS 9 - 11 May 2000, Paris, France |
| title_exact_search | Design, test, integration, and packaging of MEMS, MOEMS 9 - 11 May 2000, Paris, France |
| title_full | Design, test, integration, and packaging of MEMS, MOEMS 9 - 11 May 2000, Paris, France Bernard Courtois ..., chairs/ed. |
| title_fullStr | Design, test, integration, and packaging of MEMS, MOEMS 9 - 11 May 2000, Paris, France Bernard Courtois ..., chairs/ed. |
| title_full_unstemmed | Design, test, integration, and packaging of MEMS, MOEMS 9 - 11 May 2000, Paris, France Bernard Courtois ..., chairs/ed. |
| title_short | Design, test, integration, and packaging of MEMS, MOEMS |
| title_sort | design test integration and packaging of mems moems 9 11 may 2000 paris france |
| title_sub | 9 - 11 May 2000, Paris, France |
| topic | Microelectromechanical systems Congresses Microelectronic packaging Congresses Micromachining Congresses Optoelectronic devices Congresses Mikromechanik (DE-588)4205811-9 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| topic_facet | Microelectromechanical systems Congresses Microelectronic packaging Congresses Micromachining Congresses Optoelectronic devices Congresses Mikromechanik Mikroelektronik Konferenzschrift 2000 Paris |
| volume_link | (DE-604)BV000010887 |
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